JPH02139711A - Magnetic storage body and its manufacture and magnetic storage device - Google Patents

Magnetic storage body and its manufacture and magnetic storage device

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Publication number
JPH02139711A
JPH02139711A JP30465188A JP30465188A JPH02139711A JP H02139711 A JPH02139711 A JP H02139711A JP 30465188 A JP30465188 A JP 30465188A JP 30465188 A JP30465188 A JP 30465188A JP H02139711 A JPH02139711 A JP H02139711A
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JP
Japan
Prior art keywords
thin film
magnetic
magnetic storage
phthalocyanine
storage body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30465188A
Other languages
Japanese (ja)
Inventor
Tetsuo Nakagawa
中川 哲男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP30465188A priority Critical patent/JPH02139711A/en
Publication of JPH02139711A publication Critical patent/JPH02139711A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve corrosion resistance of a metal medium in an environment with water or chlorine and to reduce the coefft. of friction between the storage body and a head by depositing an organic compd. layer containing substituents or derivatives of phthalocyanine or fluorinated polyether polymers on a substrate coated with a magnetic thin film. CONSTITUTION:The substrate is coated with a magnetic thin film, on which an org. compd. layer containing phthalocyanine, substituents or derivatives of phthalocyanine, or fluorinated polyether polymer is deposited. A thin film comprising carbide, nitride, oxide or carbon is provided between the magnetic thin film and the organic compound layer. Recently, magnetic heads have been made hardened more and more and the medium of this invention can endure against larger shock caused by this kind of head. By this method, crushing of a head can be avoided and such a storage body having excellent long-term mechanical reliability and storage reliability can be manufactured.

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野] 本発明は磁気記憶装置(磁気ディスク装置、磁気ドラム
装置及び磁気テープ装置)及び、該磁気記憶装置に用い
られる磁気記憶体(以下、記憶体と呼ぶ)及びその製造
方法に関する。 [従来の技術] En性薄膜を有する記憶体に於いては、記録再生ヘッド
(以下、ヘッドと呼ぶ)との接触に耐えるだけの充分な
機械的信頼性と水分、塩素等の方食環境に充分耐える耐
食性が要求される。 従来より基板はアルマイト処理やN1−Pメツキ等の非
磁性メツキ処理後、鏡面化やすし目付けのための研摩が
施こされたAfi合金基板、ガラス板やセラミック板等
が用いられ、次にN1−P、N1−Cu−P等の非磁性
メツキやCr、Bi等の被覆の有無の後、磁性薄膜を被
覆し、更にSiO2(ポリケイ酸を含む) 、 Al1
 N、 C,S i sN4とAl1.0gの固溶体等
の保護膜が被覆され、カップリング剤を用いた中間層の
有無の後パーフロロポリエーテルに代表される液体潤滑
剤や高級アルコールや脂肪酸に代表される固体潤滑剤の
薄層が被覆される。 上記記憶体は一応の耐久性能を有し、既に市場に出回り
始めているものの大きな欠点を有している。 上記記憶体を搭載した磁気記憶装置を40℃80%Rf
H,の環境下に放置すると記憶体1枚の1〜2ケ所に方
食点が発生し、ディフェクトエラーに至る。又記憶体と
ヘッドとの接触を繰り返すことにより、両者間の摩擦係
数が増大し、スピンドルモーターがしばしば停止に至っ
た。 〔発明が解決しようとする課題1 従来の技術では、磁性薄膜の耐食性を充分に確。 保できず、又記憶体とヘッド間の機械的信頼性を充分に
確保できないという課題を有していた。 本発明は上記の課題を解決するものであり、その目的と
するところは、水分や塩素等の環境下に於ける金属媒体
の耐食性を飛躍的に向上させるとともに、記憶体とヘッ
ド間の摩擦係数を大幅に低減し、且つその効果を長期に
維持しつる信頼性に優れた記憶体の製造、提供と該記憶
体を用いた磁気記憶装置を提供することにある。 〔課題を解決するための手段1 本発明は基体上に磁性薄膜が被覆され、該磁性薄膜上に
少なくともフタロシアニン或いはフタロシアニン骨格を
基本とするその置換体や誘導体或いは/そして弗素化ポ
リエーテル重合体を含む有機化合物層を被覆せしめた事
を特徴とする。 父型に該磁性薄膜と該有機化合物層との間に炭化物、窒
化物、酸化物或いは炭素から選ばれる少なくとも1種の
物質より成る薄膜を形成せしめた事を特徴とする。又、
更に炭化物、窒化物、酸化物或いは炭素から選ばれる少
なくとも1種の物質より成る薄膜と該有機化合物層との
間に分子内に異なる官能基を有するカップリング剤の薄
膜を形成せしめた事を特徴とする。 磁性薄膜は従来技術と同様の材料そして製法によって被
覆する事が出来る。Co、Fe、Ni、Cr、Ta、P
、貴金属元素等から成る金属を湿式メツキ法やスパッタ
リング法に代表される乾式成膜法で被覆形成する。 炭化物、窒化物、酸化物は、A2、B、Y、Si、Ti
、Zr、Hf、Nb、Ta、Cr、Mo、Wから選ばれ
る元素の化合物であり、その混合や積層化は任意である
。炭素はグラファイト、ダイヤモンド、アモルファス(
i−カーボンを含む)の単独、混合、積層であり、いず
れも100〜400人の膜厚が適切である。上記化合物
及び炭素はスパッタリング法、イオンブレーティング法
等のPVD法やCVD法で被覆形成可能であり、更に酸
化物は有機金属化合物の熱分解法によっても被覆形成が
可能である。 分子内に異なる官能基を有するカップリング剤は、例え
ば分子の一方に加水分解性基を有し、他方にアミノ基或
いはイミノ基の少なくとも1種の官能基を有する有機金
属化合物であるが下記一般式で表わされる。 R′ 、−M−(OR)n− ここでR′はアミン基或いはイミノ基の少なくとも1種
の官能基を有する有機基であり、Rは炭素数1〜5のア
ルキル基である。又Mは、Sl、Ti、Zr、Nb、H
f、Ta等の金属元素であり、mは各々の金属元素の価
数である。又iは1から(m−1)までの整数である。 代表的な有機金属化合物を、以下に示す。 NH2−(CH2)2−NH−(CH2) 3S i 
 (OCHa ) 5 NHz   (CHz )z  NH(CH2) 3−
 H3 S i −(OCH3) 2 NH2−(CH2)2  NH(CHz )2−NH(
CH2) 2  S i  (OCHa ) 3これら
は、いずれも、アルコール 媒に希釈され、スプレー法、スピンナー法、ディッピン
グ法やパイロゾル法等の既知の方法で塗布後焼成により
重縮合膜とする。濃度は得たい膜厚により決定され,膜
厚は単分子厚みでも充分であり、200人前後以下の膜
厚でも問題はない。又焼成は60℃〜2 0 0 ”C
、5分〜20分で充分である。 フタロシアニン或いはフタロシアニン骨格を基本とする
その置換体や誘導体は、無金属フタロシアニン、金属フ
タロシアニンを基本とし、その水素元素をハロゲン類や
アミン基、酸アミド基、水酸基、カルボキシル基等の極
性基やエポキシ基、ビニル基等を含めた官能基に置換し
た化合物及び直鎖、分枝飽和、不飽和の炭化水素鎖や該
炭化水素鎖の水素を前記官能基で置換した化合物等であ
り、特に制限は無い.これらは、真空蒸着法等の乾式法
や可溶性溶媒に希釈し、スプレー法、スピンナー法、デ
ィッピング法やパイロゾル法等の既知の湿式法で塗布で
き、膜厚は50人前後が適切である。 弗素化ポリエーテル重合体は分子内に前述の官能基を有
するものの他に不対電子を有する窒素を含む有機基、環
状の基を含む有機基を有し,その主体はパーフロロアル
キルポリエーテルである。 これらは、単独、混合で弗素系溶媒に希釈し、更に上記
フタロシアニン或いはフタロシアニン骨格を基本とする
その置換体や誘導体で同一溶媒に希釈出来る場合は弗素
化ポリエーテル重合体に混合したうえ、スプレー法、ス
ピンナー法、ディッピング法やパイロゾル法等の既知の
方法で塗布後、必要に応じて、焼成を行なう。焼成は6
0〜150℃、3〜10分で充分である。又膜厚は50
人前後で充分である。 [作 用] 本発明によれば、耐食性に劣る金属磁性薄膜を含む各種
5n性薄膜上に、密着性に優れ、高硬度、緻密性の特長
を有する炭化物、窒化物、酸化物或いは炭素から選ばれ
る物質より成る薄膜が被覆され、方食を誘発する水分が
塩素等から6n性薄膜を保護する。 しかし炭化物、窒化物そして酸化物は、いずれも潤滑性
に乏しく、比較的潤滑性に優れる炭素に於いても潤滑能
が不充分であり、更に潤滑剤を被覆することが試みられ
ている。 上記潤滑剤として、前述の如くパーフロロポリエーテル
重合体に代表される液体潤滑剤や高級アルコール、脂肪
酸に代表される固体潤滑剤が検討されているが、記憶体
の回転時の遠心力や熱等により、その膜厚が減少し、初
期の優れた潤滑能が経時的に失なわれた。又ヘッドの衝
撃力が吸収しきれず、ヘッドが磁性薄膜に到達し、ヘッ
ドクラッシュに至った。 本発明では、磁性薄膜及び炭化物、窒化物、酸化物或い
は炭素から選ばれる物質より成る薄膜、弗素化ポリエー
テル重合体そしてフタロシアニンとそれぞれ親和性を持
つカップリング剤の薄膜を形成するものであり、潤滑能
に優れる弗素化ポリエーテル重合体及びフタロシアニン
はヘッドの衝撃摩耗や記憶体の回転遠心力によって、簡
単に記憶体上を移動する事はない。又弗素化ポリエーテ
ル重合体及びフタロシアニンは共に耐熱性に優れる物質
であり、特にフタロシアニンは耐衝撃力の吸収性に優れ
ることから、増々硬質化するヘッドによる強い衝撃にも
充分耐え、ヘッドクラッシュを皆無にすることが可能に
なった。 以上により長期機械的信頼性及び保存信頼性に優れた記
憶体の製造、提供が可能になり、更に該記憶体を用いる
事により磁気記憶装置の長期信頼性は著るしく向上した
。 〔実 施 例〕 鏡面仕上げされたディスク状アルミニウム合金基板上に
非磁性N1−P合金メツキを約15μm厚に施こした後
、研摩加工により表面粗度Rf=50〜100人、Rf
、、、=500〜1000人にすじ目付けし、更にCo
−N1−P合金メツキを約0.05μm厚に施こした。 上記基板を用いマグネトロンスパッタ装置で各々の物質
の薄膜を第1表の如く被覆した。尚到達真空度は1x1
0−’torr以下、基板前加熱は80℃、10分間、
パワーは4 W / c m 2とした。 他方、上記基板を用い第2表の如くディッピング法によ
り、各種有機金属化合物を塗布後、焼成しその重縮合膜
を被覆した。尚処理液溶媒はメタノールとフロン113
の混合(体積比1対3)とし、濃度は1.OW/V%、
液温は25℃とした。又引き上げ速度はlocm/mi
nとし、焼成は150℃、30分間とした。 次に第3表のカップリング剤をメタノールとフロン11
3(体積比1対3)に0.005W/V%に希釈後、デ
ィッピング法で塗布後、焼成しその重縮合膜を被覆した
。尚液温は25℃、引き上げ速度は、locm/min
とし、焼成は110℃、10分間とした。 次に第3表のフタロシアニン或いは/そして弗素化ポリ
エーテル重合体を被覆した。尚両材料とも商品名や略号
で表わし′たので、後に詳細を記す6 フタロシアニンに於いて溶媒に溶けにくいタイプは蒸着
法により被覆した。サンプルはl×10−’torr以
下の真空中に於いて80℃、10分間の前加熱後抵抗加
熱源から蒸着させた。 溶媒可溶のタイプは弗素化ポリエーテル重合体との混合
の有無の後、可溶性溶媒に希釈し、ディッピング法で塗
布した。蒸着法によってフタロシアニンを被覆したサン
プルは、弗素化ポリエーテル重合体のフロン113希釈
溶液(濃度0.OIW/V%)を用い、ディッピング法
で塗布した。ディッピング法は共に液温25℃、引き上
げ速度10cm/minとした。 又最後に110℃で10分間、焼成した。 第  1  表 Pc 、無金属フタロシアニン N  1−Pc ニッケルフタロシアニン u−Pc 銅フタロシアニン N 1−PcD  : 2〔 クライトックスはデュポン社製品であり、157FS/
LZMは分子末端片官能基タイプ(−C00H) であ
り、同PSLは一般式A、同GLA及びMLは一般式B
のタイプである。 フォンブリンZ−D IACはモンテジソン社製品であ
り、分子両端官能基タイプである。 FC−AはCF、−CF、O−(C,F。 −(−C,F2O)、CF、0−CF、である。 上記製造方法により作製した8己憶体と、3370タイ
プの薄膜へ・ソド(フライノhイト0.15LLm、9
m/5ec)を用171磁気言己憶装置をイ乍製し、下
記試験によって評価した1吉果Cま第4表1こ示す・ H)CSS耐久試験、 C8S動作(立ち上がり、立ち下刃S9日寺門10se
c)前後の外観変化、静摩擦イ系数と出力のf氏下率を
求める。 (2)耐食性試験、 80°C190%RfH,の環境丁番こ放置して、放置
時間の経過をおって、ミ・ソシングビット数を測定し、
その増加が認められた時点を寿命と半11断した。
[Industrial Application Field] The present invention relates to magnetic storage devices (magnetic disk devices, magnetic drum devices, and magnetic tape devices), magnetic storage bodies (hereinafter referred to as storage bodies) used in the magnetic storage devices, and methods for manufacturing the same. Regarding. [Prior Art] A memory body having an En-containing thin film has sufficient mechanical reliability to withstand contact with a recording/reproducing head (hereinafter referred to as a head) and is resistant to harsh environments such as moisture and chlorine. Sufficient corrosion resistance is required. Conventionally, Afi alloy substrates, glass plates, ceramic plates, etc. have been used as substrates, which have been subjected to alumite treatment or non-magnetic plating treatment such as N1-P plating, and then polished to make them mirror-finished or have a surface density. After non-magnetic plating such as P, N1-Cu-P, coating with Cr, Bi, etc., a magnetic thin film is coated, and further SiO2 (including polysilicic acid), Al1
After coating with a protective film such as a solid solution of N, C, Si sN4 and 1.0 g of Al, with or without an intermediate layer using a coupling agent, it is coated with a liquid lubricant such as perfluoropolyether, a higher alcohol, or a fatty acid. A thin layer of a representative solid lubricant is applied. Although the above-mentioned memory bodies have a certain level of durability and have already begun to appear on the market, they have major drawbacks. Magnetic storage device equipped with the above storage body at 40℃80%Rf
If left in an environment of H., galling points will occur in one or two places on one memory body, leading to a defect error. Furthermore, repeated contact between the storage body and the head increased the coefficient of friction between them, often causing the spindle motor to stop. [Problem to be solved by the invention 1 With conventional technology, the corrosion resistance of magnetic thin films cannot be sufficiently ensured. Furthermore, there was a problem in that it was not possible to maintain sufficient mechanical reliability between the storage body and the head. The present invention solves the above problems, and its purpose is to dramatically improve the corrosion resistance of metal media in environments containing moisture and chlorine, and to improve the coefficient of friction between the storage body and the head. It is an object of the present invention to manufacture and provide a highly reliable memory body that can significantly reduce the amount of water and maintain its effects over a long period of time, and to provide a magnetic memory device using the memory body. [Means for Solving the Problems 1] The present invention provides a method in which a magnetic thin film is coated on a substrate, and at least phthalocyanine, a substituted product or derivative thereof based on a phthalocyanine skeleton, and/or a fluorinated polyether polymer is coated on the magnetic thin film. It is characterized by being coated with an organic compound layer containing. A thin film made of at least one substance selected from carbide, nitride, oxide, or carbon is formed between the magnetic thin film and the organic compound layer on the master mold. or,
Furthermore, a thin film of a coupling agent having different functional groups in the molecule is formed between the thin film made of at least one substance selected from carbide, nitride, oxide, or carbon and the organic compound layer. shall be. The magnetic thin film can be coated using materials and methods similar to those of the prior art. Co, Fe, Ni, Cr, Ta, P
, a coating is formed using a dry film forming method such as a wet plating method or a sputtering method using a metal made of a noble metal element or the like. Carbides, nitrides, and oxides include A2, B, Y, Si, and Ti.
It is a compound of elements selected from , Zr, Hf, Nb, Ta, Cr, Mo, and W, and the mixing and lamination thereof are arbitrary. Carbon is graphite, diamond, amorphous (
(including i-carbon) alone, in a mixture, or in a laminated manner, and a film thickness of 100 to 400 layers is appropriate for each. The above-mentioned compounds and carbon can be coated by a PVD method or CVD method such as a sputtering method or an ion blasting method, and the oxide can also be coated by a thermal decomposition method of an organometallic compound. Coupling agents having different functional groups in the molecule are, for example, organometallic compounds having a hydrolyzable group on one side of the molecule and at least one kind of functional group such as an amino group or an imino group on the other side. It is expressed by the formula. R', -M-(OR)n- Here, R' is an organic group having at least one functional group such as an amine group or an imino group, and R is an alkyl group having 1 to 5 carbon atoms. Also, M is Sl, Ti, Zr, Nb, H
These are metal elements such as f and Ta, and m is the valence of each metal element. Further, i is an integer from 1 to (m-1). Representative organometallic compounds are shown below. NH2-(CH2)2-NH-(CH2) 3S i
(OCHa) 5 NHz (CHz)z NH(CH2) 3-
H3 Si-(OCH3)2NH2-(CH2)2NH(CHz)2-NH(
CH2) 2 S i (OCHa) 3 Each of these is diluted with an alcohol medium, and a polycondensation film is formed by coating and baking by a known method such as a spray method, a spinner method, a dipping method, or a pyrosol method. The concentration is determined by the desired film thickness, and a monomolecular film thickness is sufficient, and a film thickness of around 200 molecules or less is no problem. Also, the firing temperature is 60℃~200"C
, 5 to 20 minutes is sufficient. Phthalocyanine or its substituted products and derivatives based on a phthalocyanine skeleton are based on metal-free phthalocyanine or metal phthalocyanine, and the hydrogen element is substituted with halogens, polar groups such as amine groups, acid amide groups, hydroxyl groups, carboxyl groups, or epoxy groups. , compounds substituted with functional groups including vinyl groups, linear, branched, saturated, unsaturated hydrocarbon chains, and compounds in which the hydrogen of the hydrocarbon chain is substituted with the functional group, etc., and there are no particular limitations. .. These can be applied by a dry method such as a vacuum evaporation method, or by a known wet method such as a spray method, a spinner method, a dipping method, a pyrosol method, etc. after diluting with a soluble solvent, and a film thickness of about 50 mm is appropriate. In addition to having the above-mentioned functional groups in the molecule, the fluorinated polyether polymer also has an organic group containing nitrogen with an unpaired electron and an organic group containing a cyclic group, and the main component thereof is perfluoroalkyl polyether. be. These can be diluted in a fluorinated solvent either singly or in combination, and if the above phthalocyanine or its substituted product or derivative based on a phthalocyanine skeleton can be diluted in the same solvent, it can be mixed with a fluorinated polyether polymer and then sprayed. After coating by a known method such as , spinner method, dipping method, or pyrosol method, baking is performed if necessary. Firing is 6
3 to 10 minutes at 0 to 150°C is sufficient. Also, the film thickness is 50
Around 1 person is enough. [Function] According to the present invention, a material selected from carbides, nitrides, oxides, or carbon having excellent adhesion, high hardness, and denseness is applied to various 5n thin films including metal magnetic thin films with poor corrosion resistance. The 6n thin film is coated with a thin film made of a substance that protects the 6n film from moisture that induces caries, such as chlorine. However, carbides, nitrides, and oxides all have poor lubricity, and even carbon, which has relatively excellent lubricity, has insufficient lubricity, and attempts have been made to coat the surface with a lubricant. As mentioned above, liquid lubricants typified by perfluoropolyether polymers and solid lubricants typified by higher alcohols and fatty acids are being considered as the above-mentioned lubricants. As a result, the film thickness decreased and the initial excellent lubricating ability was lost over time. Furthermore, the impact force of the head could not be absorbed completely and the head reached the magnetic thin film, resulting in a head crash. In the present invention, a magnetic thin film, a thin film made of a substance selected from carbides, nitrides, oxides, or carbon, a thin film of a coupling agent having affinity with fluorinated polyether polymer, and phthalocyanine are formed, The fluorinated polyether polymer and phthalocyanine, which have excellent lubrication ability, do not easily move on the storage medium due to impact wear of the head or rotational centrifugal force of the storage medium. In addition, both fluorinated polyether polymers and phthalocyanine are substances with excellent heat resistance, and phthalocyanine in particular has excellent impact resistance absorption, so it can withstand strong impact from increasingly hard heads, eliminating head crashes. It is now possible to As described above, it has become possible to manufacture and provide a memory body with excellent long-term mechanical reliability and storage reliability, and furthermore, by using this memory body, the long-term reliability of a magnetic memory device has been significantly improved. [Example] After applying non-magnetic N1-P alloy plating to a thickness of about 15 μm on a mirror-finished disc-shaped aluminum alloy substrate, the surface roughness was polished to Rf = 50 to 100, Rf
,,, = 500 to 1000 people were marked with streaks, and Co
-N1-P alloy plating was applied to a thickness of about 0.05 μm. Using the above substrate, a thin film of each substance was coated as shown in Table 1 using a magnetron sputtering device. The degree of vacuum achieved is 1x1
Below 0-'torr, pre-heating the substrate at 80°C for 10 minutes.
The power was 4 W/cm2. On the other hand, using the above substrate, various organic metal compounds were applied by dipping as shown in Table 2, and then baked to cover the polycondensation film. The processing liquid solvent is methanol and Freon 113.
(volume ratio 1:3) with a concentration of 1. OW/V%,
The liquid temperature was 25°C. Also, the pulling speed is locm/mi
The firing time was 150° C. for 30 minutes. Next, combine the coupling agent in Table 3 with methanol and Freon 11.
3 (volume ratio 1:3) and diluted to 0.005 W/V%, applied by a dipping method, baked, and coated with the polycondensation film. The liquid temperature is 25°C, and the pulling speed is locm/min.
The firing was performed at 110° C. for 10 minutes. The phthalocyanine and/or fluorinated polyether polymers listed in Table 3 were then coated. Since both materials were expressed by trade names or abbreviations, the details will be described later.6 Among the phthalocyanines, types that are difficult to dissolve in solvents were coated by vapor deposition. Samples were deposited from a resistive heating source after preheating at 80°C for 10 minutes in a vacuum below 1 x 10-'torr. The solvent-soluble type was mixed with a fluorinated polyether polymer, diluted with a soluble solvent, and applied by dipping. Samples coated with phthalocyanine by vapor deposition were coated by dipping using a dilute solution of fluorinated polyether polymer in Freon 113 (concentration 0.OIW/V%). In both dipping methods, the liquid temperature was 25° C. and the pulling rate was 10 cm/min. Finally, it was fired at 110°C for 10 minutes. Table 1 Pc, Metal-free phthalocyanine N 1-Pc Nickel phthalocyanine u-Pc Copper phthalocyanine N 1-PcD: 2 [Krytox is a DuPont product, 157FS/
LZM is a monofunctional group type at the molecular end (-C00H), PSL is a general formula A, and GLA and ML are a general formula B.
This is the type of Fomblin Z-D IAC is a product of Montegisson and has functional groups at both ends of the molecule. FC-A is CF, -CF, O-(C,F.-(-C,F2O), CF, 0-CF.・Sodo (Fly No Hite 0.15LLm, 9
A 171 magnetic self-memory device was manufactured using 171 m/5ec) and evaluated by the following tests. Nichijimon 10se
c) Find the change in appearance before and after, the static friction coefficient, and the rate of decrease in output by f. (2) Corrosion resistance test: leave the hinge in an environment of 80°C, 190% RfH, and measure the number of mis-singing bits after the leaving time has elapsed.
The point at which this increase was observed was cut off at half the lifespan.

【発明の効果】【Effect of the invention】

高記録密度対応の記憶体としての薄膜型記憶体を用いた
磁気記憶装置が登場して久しいが、長期信頼性に対する
不安からその使用は一部に限られていた。 本発明によれば、加温部下で記憶体が用いられても6f
1性薄膜は実用的に何等の影響を受けず、又増々硬質化
、低フライハイド化するヘッドを用いての機械的信頼性
が高いので、更に小型化し、厳しい環境下で用いられる
磁気記憶装置に搭載されても、記憶体、ヘッドはともに
特性劣化は、はとんど認められない。 以上の如く、高記録密度対応の高耐久性記憶体の製造、
提供そして該記憶体を用いることにより信頼性の高い磁
気記憶装置の提供が可能になった。 以上 出願人 セイコーエプソン株式会社
Magnetic storage devices using thin-film storage materials have been on the market for a long time as storage devices compatible with high recording densities, but their use has been limited to a limited number of people due to concerns about long-term reliability. According to the present invention, even if the storage body is used under heating, 6f
Uniform thin films are not affected in any way in practical use, and have high mechanical reliability even with heads that are becoming increasingly hard and have low fly-hide properties, so they can be used in magnetic storage devices that can be further miniaturized and used in harsh environments. Even when installed in a computer, there is almost no noticeable deterioration in the characteristics of both the memory and the head. As described above, manufacturing of highly durable memory bodies compatible with high recording density,
By providing and using the storage body, it has become possible to provide a highly reliable magnetic storage device. Applicant: Seiko Epson Corporation

Claims (11)

【特許請求の範囲】[Claims] (1)磁性薄膜が被覆された基体上に、少なくともフタ
ロシアニン或いはフタロシアニン骨格を基本とするその
置換体や誘導体或いは/そして弗素化ポリエーテル重合
体を含む有機化合物層を被覆せしめた事を特徴とする磁
気記憶体。
(1) A substrate coated with a magnetic thin film is coated with an organic compound layer containing at least phthalocyanine, its substituted product or derivative based on a phthalocyanine skeleton, and/or a fluorinated polyether polymer. magnetic memory.
(2)該磁性薄膜と該有機化合物層の間に、炭化物、窒
化物、酸化物或いは炭素から選ばれる少なくとも1種の
物質より成る薄膜を形成せしめた事を特徴とする請求項
1記載の磁気記憶体。
(2) The magnetic material according to claim 1, wherein a thin film made of at least one substance selected from carbide, nitride, oxide, or carbon is formed between the magnetic thin film and the organic compound layer. Memory body.
(3)弗素化ポリエーテル重合体が一般式A、B或いは
Cで表わされる化合物である事を特徴とする請求項1又
は請求項2記載の磁気記憶体。 一般式A:R_f−X−Y−X−R_f 〃B:R_f−X−Y C:Y−X−R_f−X−Y ここで、R_fは、CF_3−(C_2F_4O)_m
−(CF_2O)_n−、−(C_2F_4O)_m−
(CF_2O)_n−、▲数式、化学式、表等がありま
す▼、− ▲数式、化学式、表等があります▼等であり、mは整数 を表わす。又Xは、不対電子を有する窒素を含む有機基
、そして、Yは、環状の基を含む有機基を表わす。分子
量は1000〜8000である。
(3) The magnetic memory according to claim 1 or 2, wherein the fluorinated polyether polymer is a compound represented by general formula A, B, or C. General formula A: R_f-X-Y-X-R_f B: R_f-X-Y C: Y-X-R_f-X-Y Here, R_f is CF_3-(C_2F_4O)_m
-(CF_2O)_n-, -(C_2F_4O)_m-
(CF_2O)_n-, ▲There are mathematical formulas, chemical formulas, tables, etc.▼, - ▲There are mathematical formulas, chemical formulas, tables, etc.▼, etc., and m represents an integer. Further, X represents an organic group containing nitrogen having an unpaired electron, and Y represents an organic group containing a cyclic group. The molecular weight is 1000-8000.
(4)炭化物、窒化物、炭化物或いは炭素から選ばれる
少なくとも1種の物質より成る薄膜と該有機化合物層と
の間に、分子内に異なる官能基を有するカップリング剤
の薄膜を形成せしめた事を特徴とする請求項2又は請求
項3記載の磁気記憶体。
(4) A thin film of a coupling agent having different functional groups in the molecule is formed between the organic compound layer and a thin film made of at least one substance selected from carbide, nitride, carbide, or carbon. The magnetic storage body according to claim 2 or claim 3, characterized in that:
(5)基体上に磁性薄膜を被覆する工程、磁性薄膜上に
、少なくともフタロシアニン或いはフタロシアニン骨格
を基本とするその置換体や誘導体或いは/そして弗素化
ポリエーテル重合体を含む有機化合物層を被覆せしめる
工程を有することを特徴とする磁気記憶体の製造方法。
(5) A step of coating a magnetic thin film on a substrate, a step of coating the magnetic thin film with an organic compound layer containing at least phthalocyanine, its substituted product or derivative based on a phthalocyanine skeleton, and/or a fluorinated polyether polymer. A method for manufacturing a magnetic memory body, comprising:
(6)該磁性薄膜と該有機化合物層の間に、炭化物、窒
化物、酸化物或いは炭素から選ばれる少なくとも1種の
物質より成る薄膜を形成する工程を有する事を特徴とす
る請求項5記載の磁気記憶体の製造方法。
(6) The method further comprises the step of forming a thin film made of at least one substance selected from carbides, nitrides, oxides, and carbon between the magnetic thin film and the organic compound layer. A method for manufacturing a magnetic storage body.
(7)炭化物、窒化物、酸化物或いは炭素から選ばれる
少なくとも1種の物質より成る薄膜と該有機化合物層と
の間に、分子内に異なる官能基を有するカップリング剤
の薄膜を形成せしめる工程を有する事を特徴とする請求
項6記載の磁気記憶体の製造方法。
(7) Forming a thin film of a coupling agent having different functional groups in the molecule between the organic compound layer and a thin film made of at least one substance selected from carbides, nitrides, oxides, or carbon. 7. The method of manufacturing a magnetic memory body according to claim 6, further comprising:
(8)請求項1記載の磁気記憶体を用いた事を特徴とす
る磁気記憶装置。
(8) A magnetic storage device characterized by using the magnetic storage body according to claim 1.
(9)請求項2記載の磁気記憶体を用いた事を特徴とす
る磁気記憶装置。
(9) A magnetic storage device characterized by using the magnetic storage body according to claim 2.
(10)請求項3記載の磁気記憶体を用いた事を特徴と
する磁気記憶装置。
(10) A magnetic storage device characterized by using the magnetic storage body according to claim 3.
(11)請求項4記載の磁気記憶体を用いた事を特徴と
する磁気記憶装置。
(11) A magnetic storage device characterized by using the magnetic storage body according to claim 4.
JP30465188A 1988-08-06 1988-12-01 Magnetic storage body and its manufacture and magnetic storage device Pending JPH02139711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30465188A JPH02139711A (en) 1988-08-06 1988-12-01 Magnetic storage body and its manufacture and magnetic storage device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP19649088 1988-08-06
JP63-196490 1988-08-06
JP63-217507 1988-08-31
JP30465188A JPH02139711A (en) 1988-08-06 1988-12-01 Magnetic storage body and its manufacture and magnetic storage device

Publications (1)

Publication Number Publication Date
JPH02139711A true JPH02139711A (en) 1990-05-29

Family

ID=26509765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30465188A Pending JPH02139711A (en) 1988-08-06 1988-12-01 Magnetic storage body and its manufacture and magnetic storage device

Country Status (1)

Country Link
JP (1) JPH02139711A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5536577A (en) * 1993-09-28 1996-07-16 Mitsubishi Chemical Corporation Magnetic recording medium comprising a protective layer and a lubricant layer which contains a host multidentate ligand and a guest reversibly trapped lubricant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5536577A (en) * 1993-09-28 1996-07-16 Mitsubishi Chemical Corporation Magnetic recording medium comprising a protective layer and a lubricant layer which contains a host multidentate ligand and a guest reversibly trapped lubricant
US5830577A (en) * 1993-09-28 1998-11-03 Mitsubishi Chemical Corporation Surface having a coating of a host multidentate ligand and a reversibly trapped lubricant

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