JPH0213727U - - Google Patents
Info
- Publication number
- JPH0213727U JPH0213727U JP9105488U JP9105488U JPH0213727U JP H0213727 U JPH0213727 U JP H0213727U JP 9105488 U JP9105488 U JP 9105488U JP 9105488 U JP9105488 U JP 9105488U JP H0213727 U JPH0213727 U JP H0213727U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- luminescence intensity
- plasma processing
- sample
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004020 luminiscence type Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9105488U JPH0213727U (enExample) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9105488U JPH0213727U (enExample) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213727U true JPH0213727U (enExample) | 1990-01-29 |
Family
ID=31315549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9105488U Pending JPH0213727U (enExample) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213727U (enExample) |
-
1988
- 1988-07-08 JP JP9105488U patent/JPH0213727U/ja active Pending
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