JPH02134571A - Probe card - Google Patents

Abstract

PURPOSE:To realize a probe card having a narrow terminal interval by reducing the dimension of each of probe terminal conductors in the lateral direction thereof and fixing the spaces between said conductors by an insulating substance to prevent the lateral collapse of the conductors. CONSTITUTION:Conductors 1 are bonded and fixed through an insulating body 2. Herein, the thickness of the insulating body 2 is preliminarily adjusted so that the conductors become a planned terminal interval. The conductors 1 are fixed by the insulating body 2 in large part excepting the contact parts with semiconductor wafers 3 to hold the strength of the conductors 1. Since it is convenient to form the insulating body 2 into a flat plate in order to adjust a thickness, a structure wherein one side of the insulating body 2 is bonded to a probe card substrate 6 is aligned as a probing module 5 at the time of the mounting on the probe card substrate 6 to be bonded to the substrate. The electrical connection to lands 4 can be performed with allowance because the lengths of the conductors are different to each other.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a probe card.

[Conventional technology]

FIG. 3 is a sectional view of an example of a conventional probe card.

The probe card includes a probe card board 6. A probe needle 8 was connected to the probe needle 8, and the position of the needle tip was fixed by a mold 7.

[Problem to be solved by the invention]

The above-mentioned conventional 10-book card maintains positional accuracy by the mechanical strength of the probe needles themselves, and has the disadvantage that it is difficult to make the probe needles thinner and arrange them at narrow intervals.

[Means to solve the problem]

The probe card of the present invention includes a probe group in which a plurality of probe terminals each having a terminal conductor formed on an insulating film plate having a thickness corresponding to the distance between the probe terminals are pasted together.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

1A to 1C are a cross-sectional view, a side view, and a bottom view of the blobbing module portion of the embodiment of the present invention shown in FIG.

The conductor 1 is sandwiched between the insulators 2 and fixed by adhesive.

Here, the thickness of the insulator 2 is adjusted so that the conductor 1 has the designed terminal spacing.

The strength of the conductor 1 is maintained by fixing most of the conductor 1 with an insulating material, except for the part that contacts the semiconductor wafer 3.

In order to adjust the thickness, it is convenient for the insulator 2 to be a flat plate, so when mounting it on the probe card board 6, please use the
), a probe card conductor 6 and an insulator 2 are bonded together on one side, and the probe card conductor 6 and insulator 2 are bonded together to form a blobbing module 5, which is aligned and bonded to a substrate.

Electrical connection can be made to the land 4 with lick margins for different conductor lengths.

FIGS. 2(a) and 2(b) are side and bottom views of a blobbing module portion according to a second embodiment of the present invention.

Terminal conductor 1. are fixed by the insulator 2, but unlike the first embodiment, the insulator 2. is not a flat plate.

Further, a ground conductor 1b is inserted between the terminal conductors 11 for the purpose of preventing crosstalk between the terminals.

In this example, insulator 2. Because it is tapered, insulator 2. There is an advantage that the thickness, that is, the terminal spacing, can be adjusted by cutting in the direction of arrow A.

Also, there is an insulator 2 between the terminal conductors. You may insert something other than the

〔Effect of the invention〕

As explained above, the present invention reduces the distance between the terminals by reducing the lateral dimension of the probe terminal conductor and fixing the space between the conductors almost entirely with an insulator to prevent the conductor from shifting laterally. A probe card could be easily realized.

[Brief explanation of the drawing]

FIGS. 1(a) to (c) are cross-sectional views, side views, and bottom views of the blobbing module portion of the first embodiment of the present invention, and FIGS. 2(a) and (b) are the second embodiment of the present invention. FIG. 3 is a sectional view of an example of a conventional probe card. 1.1. ...Conductor, 2.2. ...Insulator, 3...
Semiconductor wafer, 4... Land, 5... Blobbing module, 6... Probe card. Representative Patent Attorney Susumu Uchihara $ 2 Zuhoki / Zuen 3 Illustrations

Claims (1)

[Claims] 1. A probe card comprising a probe terminal group in which a plurality of probe terminals each having a terminal conductor formed on a plate of an insulating film having a thickness corresponding to the distance between the probe terminals are pasted together.