JPH0213007A - Litao3 thickness-share vibrator - Google Patents
Litao3 thickness-share vibratorInfo
- Publication number
- JPH0213007A JPH0213007A JP16186388A JP16186388A JPH0213007A JP H0213007 A JPH0213007 A JP H0213007A JP 16186388 A JP16186388 A JP 16186388A JP 16186388 A JP16186388 A JP 16186388A JP H0213007 A JPH0213007 A JP H0213007A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- vibrator
- share
- width
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 9
- 229910012463 LiTaO3 Inorganic materials 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 238000003776 cleavage reaction Methods 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000007017 scission Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、ＬｔＴａＯ，厚みすべり振動子、特に、Ｌｉ
Ｔａ０ａ圧電単結晶のストリップ状のＸ板からなるＬｉ
ＴａＯ３厚みすべり振動子に関する。Detailed Description of the Invention [Industrial Application Field] The present invention is directed to LtTaO, thickness-shear oscillators, especially Li
Li consisting of a strip-shaped X plate of Ta0a piezoelectric single crystal
This relates to a TaO3 thickness-shear oscillator.
［従来の技術］
ＬｉＴａＯ３圧電単結晶のストリップ状のＸ板からなる
従来の厚みすべり振動子は、たとえば特開昭５９−６２
２０７号に記載されているように、その長辺方向がＹ軸
から時計方向に５０°±４゜回転した方向に設定されて
いる。[Prior Art] A conventional thickness-shear oscillator made of a strip-shaped X-plate of LiTaO3 piezoelectric single crystal is disclosed in, for example, Japanese Patent Laid-Open No. 59-62.
As described in No. 207, the long side direction thereof is set in a direction rotated by 50°±4° clockwise from the Y axis.
［発明が解決しようとする課題］
ところが、ＬｉＴａ０１のＸ板は、Ｙ軸から時計方向に
５７°回転した方向に男開面を持つ。このため、前記従
来の構成では、素子を切出す際に臂開面で割れやすく、
加工しにくいという欠点があった。[Problems to be Solved by the Invention] However, the X plate of LiTa01 has a male opening in a direction rotated by 57° clockwise from the Y axis. For this reason, in the conventional configuration, when cutting out the element, it is easy to break at the arm opening surface.
The drawback was that it was difficult to process.
本発明の第１の目的は、加工しやすく良好な特性を有す
る厚みすべり振動子を容易に得ることができる１ｉＴａ
ｏ、厚みすべり振動子を提供することにある。また、さ
らに別の目的は、そのような厚みすべり振動子を得た場
合に、スプリアスの抑制を十分図ることのできる形状を
得ることにある。The first object of the present invention is to obtain a thickness-shear resonator using 1iTa, which is easy to process and has good characteristics.
o. To provide a thickness-shear oscillator. Still another object is to obtain a shape that can sufficiently suppress spurious waves when such a thickness-shear oscillator is obtained.
［課題を解決するための手段］
第１の発明に係るＬｉＴａＯ３厚みすべり振動子は、Ｌ
ｉＴａＯ３圧電単結晶のストリップ状のＸ板からなり、
振動子の長辺方向が、Ｙ軸から時計方向に５６．５゜〜
５７．５°の範囲に設定されている。[Means for solving the problem] The LiTaO3 thickness-shear oscillator according to the first invention has L
Consists of a strip-shaped X plate of iTaO3 piezoelectric single crystal,
The long side direction of the vibrator is 56.5 degrees clockwise from the Y axis.
The range is set to 57.5°.
第２の発明に係るＬｉＴａＯ３厚みすべり振動子は、前
記第１の発明に係る厚みすべり振動子であって、振動子
の幅をＷ１厚さをＴとした場合に、幅と厚さの比Ｗ／Ｔ
が１．５〜２．０の範囲に設定されている。The LiTaO3 thickness-shear oscillator according to the second invention is the thickness-shear oscillator according to the first invention, where the width of the oscillator is W1 and the thickness is T. /T
is set in the range of 1.5 to 2.0.
［作用］
ＬｉＴａＯ３は、上述のようにＹ軸から時計方向に５７
°回転した方向に襞間面を有している。[Function] As mentioned above, LiTaO3 moves 57 clockwise from the Y axis.
It has an interfold surface in the rotated direction.
したがって、本発明に係る厚みすべり振動子は、その長
辺方向が概ね襞間面に沿っていることになる。このため
、ＬｉＴａＯ３単結晶から厚みすべり振動子を加工する
場合に、加工が容易となり、小型で良好な特性を有する
厚みすべり振動子を得ることができるようになる。Therefore, in the thickness-shear vibrator according to the present invention, the long side direction is generally along the inter-fold plane. Therefore, when processing a thickness-shear oscillator from a LiTaO3 single crystal, the processing becomes easy, and a thickness-shear oscillator that is small and has good characteristics can be obtained.
また、第２の発明によれば、上述のような加工容易性に
加えて、スプリアスが抑制された良好な特性が得られる
ようになる。Further, according to the second invention, in addition to the above-mentioned ease of processing, it is possible to obtain good characteristics with suppressed spurious.
［実施例コ
第１図は、本発明に係る厚みすべり振動子の斜視図であ
る。[Example 1] FIG. 1 is a perspective view of a thickness-shear vibrator according to the present invention.
第１図において、厚みすべり振動子本体１はＬｉＴａｏ
ａ単結晶からなり、ストリップ状に形成されている。厚
みすべり振動子本体１の両生面には、それぞれ中央部に
振動電極２が形成されている。また、振動電極２から振
動子端部に向けてそれぞれ逆方向に延びる引出電極３が
形成されており、引出電極３の先端部には端子電極４が
それぞれ形成されている。In FIG. 1, the thickness-shear oscillator body 1 is LiTao
a It is made of single crystal and is formed into a strip shape. A vibrating electrode 2 is formed at the center of each bidirectional surface of the thickness-shear vibrator body 1. Further, extraction electrodes 3 are formed extending in opposite directions from the vibrating electrode 2 toward the ends of the vibrator, and terminal electrodes 4 are formed at the tips of the extraction electrodes 3, respectively.
第１図に示す厚みすべり振動子は、長さをＬ１幅をＷ、
厚さをＴとした場合に、次のような関係を満足するよう
にそれぞれが設定されている。The thickness-shear oscillator shown in Fig. 1 has a length of L1, a width of W,
When the thickness is T, each is set so as to satisfy the following relationship.
長さと厚さの比Ｌ／Ｔ≧１０
幅と厚さの比Ｗ／Ｔ−１，５〜２．０
この厚みすべり振動子は、その両生面がＸ軸と直角な方
向に延びる平面に設定されており、したかってこの振動
子はＸ、＆となっている。また、第２図にし示すように
、厚みすべり振動子の、長辺方向Ａは、Ｙ軸から時計方
向に測定した角度θが５６．５゜〜５７．５°の範囲に
設定されている。Length-to-thickness ratio L/T≧10 Width-to-thickness ratio W/T-1.5 to 2.0 This thickness-shear oscillator is set on a plane in which its amphiphilic surface extends in a direction perpendicular to the X-axis. Therefore, this oscillator is X, &. Further, as shown in FIG. 2, in the long side direction A of the thickness-shear vibrator, the angle θ measured clockwise from the Y-axis is set in the range of 56.5° to 57.5°.
なお、この実施例に係る厚みすべり振動子を作製する場
合には、ＬｉＴａＯ３単結晶から、振動子の長辺方向が
Ｙ軸から時計方向に５６．５゜〜５７．５°の範囲にな
るように加工する。この長辺の方向は、概ねＬｉＴａＯ
３単結晶の襞間面に一致することから、加工が容易かつ
正確に行なえる。ストリップ状のＸ板を得た後に、両生
面に蒸着法などを用いて各電極２．３．４を形成する。In addition, when manufacturing the thickness-shear resonator according to this example, it is made of LiTaO3 single crystal so that the long side direction of the resonator is in the range of 56.5° to 57.5° clockwise from the Y axis. Process it into The direction of this long side is approximately LiTaO
3. Since it matches the interfold plane of a single crystal, processing can be performed easily and accurately. After obtaining the strip-shaped X plate, each electrode 2.3.4 is formed on the amphiboid surface using a vapor deposition method or the like.
これによって、厚みすべり振動子を得ることができる。As a result, a thickness-shear oscillator can be obtained.
上述の製造方法に従って、幅と厚さの比Ｗ／Ｔを１．８
に設定して得られた厚みすべり振動子の周波数−インピ
ーダンス特性を第３図に示す。−方、同様の製造方法に
基づき、幅と厚さの比Ｗ／Ｔを２．１に設定した場合の
周波数−インピーダンス特性を第４図に示す。第３図お
よび第４図を比較すれば明らかなように、本発明に係る
実施例によれば、スプリアスが少なく良好な特性を有す
る素子が得られることがわかる。なお、幅と厚さの比Ｗ
／Ｔの範囲が１．５〜２．０を逸脱した場合には、スプ
リアスが強く発生し、良好な特性が得られなかった。According to the above manufacturing method, the width to thickness ratio W/T was 1.8
FIG. 3 shows the frequency-impedance characteristics of the thickness-shear oscillator obtained by setting . - On the other hand, FIG. 4 shows the frequency-impedance characteristics when the width-to-thickness ratio W/T is set to 2.1 based on the same manufacturing method. As is clear from a comparison of FIG. 3 and FIG. 4, it can be seen that according to the embodiment of the present invention, an element with less spurious and good characteristics can be obtained. In addition, the width to thickness ratio W
When /T deviated from the range of 1.5 to 2.0, spurious noise was strongly generated and good characteristics could not be obtained.
このように、本発明に係る実施例によれば、振動子の長
辺方向が襞間面と概ね一致しているため、加工時の割れ
などを減少させることができる。また、電気機械結合係
数が大きく、スプリアスも少ない良好な厚みすべり振動
子を得ることができる。As described above, according to the embodiment of the present invention, since the long side direction of the vibrator generally coincides with the inter-fold plane, it is possible to reduce cracks during processing. Further, a good thickness-shear vibrator with a large electromechanical coupling coefficient and little spurious can be obtained.
特に、幅と厚さの比Ｗ／Ｔを１．５〜２．０の範囲に設
定した場合には、さらに好ましい特性が得られる。また
、幅と厚さの比の限定に加えて、長さと厚さの比Ｌ／Ｔ
を１０以上に設定すれば、振動ダンピングによる特性劣
化を無視できるようになる。長さと厚さの比Ｌ／Ｔが１
０未満であれば、振動ダンピングが無視できなくなる。In particular, when the width to thickness ratio W/T is set in the range of 1.5 to 2.0, more preferable characteristics can be obtained. In addition to limiting the width to thickness ratio, the length to thickness ratio L/T
If is set to 10 or more, characteristic deterioration due to vibration damping can be ignored. Length to thickness ratio L/T is 1
If it is less than 0, vibration damping cannot be ignored.
また、比Ｌ／Ｔが２０を超えると、寸法の点で難がある
。Moreover, when the ratio L/T exceeds 20, there is a problem in terms of dimensions.
［発明の効果］
第１の発明によれば、振動子の長辺方向をＹ軸から時計
方向に５６．５゜〜５７．５°の範囲に設定したので、
加工が容易で良好な特性を得ることのできるＬｉＴａＯ
３厚みすべり振動子が得られるようになる。[Effect of the Invention] According to the first invention, since the long side direction of the vibrator is set in the range of 56.5° to 57.5° clockwise from the Y axis,
LiTaO is easy to process and has good properties.
A three-thickness shear oscillator can now be obtained.
第２の発明によれば、第１の発明による効果に加えて、
幅と厚さの比Ｗ／Ｔを１．５〜２． ０の範囲に設定し
たことから、さらに好ましい特性を有する小型のＬｉＴ
ａＯ３厚みすべり振動子が得られるようになる。According to the second invention, in addition to the effects of the first invention,
The width to thickness ratio W/T is 1.5 to 2. Since it is set in the range of 0, it is a small LiT with more favorable characteristics.
An aO3 thickness-shear oscillator can now be obtained.
第１図は、本発明に係る厚みすべり振動子の斜視図であ
る。第２図は、その振動子の長辺方向を示す平面図であ
る。第３図は、一実施例の周波数−インピーダンス特性
を示すグラフである。第４図は、比較例の第３図に相当
するグラフである。
１は厚みすべり振動子本体、Ｌは長さ、Ｗは幅、Ｔは厚
さである。
特許出願人 株式会社村田製作所
第１
図FIG. 1 is a perspective view of a thickness-shear vibrator according to the present invention. FIG. 2 is a plan view showing the long side direction of the vibrator. FIG. 3 is a graph showing frequency-impedance characteristics of one embodiment. FIG. 4 is a graph corresponding to FIG. 3 of the comparative example. 1 is the thickness-shear vibrator body, L is the length, W is the width, and T is the thickness. Patent applicant Murata Manufacturing Co., Ltd. Figure 1
Claims (2)
からなるＬｉＴａＯ＿３厚みすべり振動子において、 振動子の長辺方向を、Ｙ軸から時計方向に５６．５゜〜
５７．５゜の範囲に設定した ＬｉＴａＯ＿３厚みすべり振動子。(1) In the LiTaO_3 thickness-shear oscillator made of a strip-shaped X plate of LiTaO_3 piezoelectric single crystal, the long side direction of the oscillator is 56.5 degrees clockwise from the Y axis.
LiTaO_3 thickness shear oscillator set in the range of 57.5°.
と厚さの比Ｗ／Ｔを１．５〜２．０の範囲に設定した請
求項１記載のＬｉＴａＯ＿３厚みすべり振動子。(2) LiTaO_3 thickness slip according to claim 1, wherein the width and thickness ratio W/T of the vibrator is set in the range of 1.5 to 2.0, where W is the width and T is the thickness of the vibrator. vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16186388A JPH0213007A (en) | 1988-06-29 | 1988-06-29 | Litao3 thickness-share vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16186388A JPH0213007A (en) | 1988-06-29 | 1988-06-29 | Litao3 thickness-share vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0213007A true JPH0213007A (en) | 1990-01-17 |
Family
ID=15743394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16186388A Pending JPH0213007A (en) | 1988-06-29 | 1988-06-29 | Litao3 thickness-share vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213007A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0620640A1 (en) * | 1993-04-15 | 1994-10-19 | Murata Manufacturing Co., Ltd. | Piezoelectric filter |
| JP2001230654A (en) * | 2000-02-16 | 2001-08-24 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrating element and producing method therefor |
| EP1363396A1 (en) * | 2001-02-19 | 2003-11-19 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| JP2010062723A (en) * | 2008-09-02 | 2010-03-18 | Epson Toyocom Corp | At-cut crystal vibrating piece, at-cut crystal vibrator and oscillator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54126492A (en) * | 1978-03-24 | 1979-10-01 | Toshiba Corp | Production of ferrodielectric substance crystal element piece |
| JPS58190115A (en) * | 1982-04-28 | 1983-11-07 | Fujitsu Ltd | Piezoelectric oscillator |
| JPS5962207A (en) * | 1982-10-01 | 1984-04-09 | Fujitsu Ltd | Litao3 piezoelectric strip oscillator |
-
1988
- 1988-06-29 JP JP16186388A patent/JPH0213007A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54126492A (en) * | 1978-03-24 | 1979-10-01 | Toshiba Corp | Production of ferrodielectric substance crystal element piece |
| JPS58190115A (en) * | 1982-04-28 | 1983-11-07 | Fujitsu Ltd | Piezoelectric oscillator |
| JPS5962207A (en) * | 1982-10-01 | 1984-04-09 | Fujitsu Ltd | Litao3 piezoelectric strip oscillator |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0620640A1 (en) * | 1993-04-15 | 1994-10-19 | Murata Manufacturing Co., Ltd. | Piezoelectric filter |
| JP2001230654A (en) * | 2000-02-16 | 2001-08-24 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrating element and producing method therefor |
| EP1363396A1 (en) * | 2001-02-19 | 2003-11-19 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| EP1363396A4 (en) * | 2001-02-19 | 2010-01-13 | Panasonic Corp | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| JP2010062723A (en) * | 2008-09-02 | 2010-03-18 | Epson Toyocom Corp | At-cut crystal vibrating piece, at-cut crystal vibrator and oscillator |
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