JPH02128151U - - Google Patents

Info

Publication number
JPH02128151U
JPH02128151U JP3780089U JP3780089U JPH02128151U JP H02128151 U JPH02128151 U JP H02128151U JP 3780089 U JP3780089 U JP 3780089U JP 3780089 U JP3780089 U JP 3780089U JP H02128151 U JPH02128151 U JP H02128151U
Authority
JP
Japan
Prior art keywords
transferred
pattern area
mask
pattern
mask substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3780089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3780089U priority Critical patent/JPH02128151U/ja
Publication of JPH02128151U publication Critical patent/JPH02128151U/ja
Pending legal-status Critical Current

Links

JP3780089U 1989-03-31 1989-03-31 Pending JPH02128151U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3780089U JPH02128151U (enrdf_load_stackoverflow) 1989-03-31 1989-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3780089U JPH02128151U (enrdf_load_stackoverflow) 1989-03-31 1989-03-31

Publications (1)

Publication Number Publication Date
JPH02128151U true JPH02128151U (enrdf_load_stackoverflow) 1990-10-23

Family

ID=31545238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3780089U Pending JPH02128151U (enrdf_load_stackoverflow) 1989-03-31 1989-03-31

Country Status (1)

Country Link
JP (1) JPH02128151U (enrdf_load_stackoverflow)

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