JPH0212621Y2 - - Google Patents

Info

Publication number

JPH0212621Y2

JPH0212621Y2 JP5626084U JP5626084U JPH0212621Y2 JP H0212621 Y2 JPH0212621 Y2 JP H0212621Y2 JP 5626084 U JP5626084 U JP 5626084U JP 5626084 U JP5626084 U JP 5626084U JP H0212621 Y2 JPH0212621 Y2 JP H0212621Y2

Authority

JP

Japan

Prior art keywords

magnetic

magnetically sensitive

bodies

sensitive body

groove

Prior art date

1984-04-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 230000004907 flux Effects 0.000 description 12
• 239000000758 substrate Substances 0.000 description 7
• 238000010586 diagram Methods 0.000 description 4
• 230000035945 sensitivity Effects 0.000 description 4
• 238000013459 approach Methods 0.000 description 3
• 230000000694 effects Effects 0.000 description 2
• 238000005530 etching Methods 0.000 description 2
• WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
• 229910000673 Indium arsenide Inorganic materials 0.000 description 1
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
• 238000009434 installation Methods 0.000 description 1
• 239000000696 magnetic material Substances 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 229910000859 α-Fe Inorganic materials 0.000 description 1