JPH02125328U - - Google Patents

Info

Publication number
JPH02125328U
JPH02125328U JP3337289U JP3337289U JPH02125328U JP H02125328 U JPH02125328 U JP H02125328U JP 3337289 U JP3337289 U JP 3337289U JP 3337289 U JP3337289 U JP 3337289U JP H02125328 U JPH02125328 U JP H02125328U
Authority
JP
Japan
Prior art keywords
pressure
control mechanism
chemical vapor
vapor phase
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3337289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3337289U priority Critical patent/JPH02125328U/ja
Publication of JPH02125328U publication Critical patent/JPH02125328U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP3337289U 1989-03-23 1989-03-23 Pending JPH02125328U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3337289U JPH02125328U (enrdf_load_stackoverflow) 1989-03-23 1989-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3337289U JPH02125328U (enrdf_load_stackoverflow) 1989-03-23 1989-03-23

Publications (1)

Publication Number Publication Date
JPH02125328U true JPH02125328U (enrdf_load_stackoverflow) 1990-10-16

Family

ID=31536975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3337289U Pending JPH02125328U (enrdf_load_stackoverflow) 1989-03-23 1989-03-23

Country Status (1)

Country Link
JP (1) JPH02125328U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011003744A (ja) * 2009-06-18 2011-01-06 Denso Corp 表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011003744A (ja) * 2009-06-18 2011-01-06 Denso Corp 表面処理装置

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