JPH02122306U - - Google Patents

Info

Publication number
JPH02122306U
JPH02122306U JP3125289U JP3125289U JPH02122306U JP H02122306 U JPH02122306 U JP H02122306U JP 3125289 U JP3125289 U JP 3125289U JP 3125289 U JP3125289 U JP 3125289U JP H02122306 U JPH02122306 U JP H02122306U
Authority
JP
Japan
Prior art keywords
substrate
measured
transport mechanism
calibration
holding part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3125289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648328Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3125289U priority Critical patent/JPH0648328Y2/ja
Publication of JPH02122306U publication Critical patent/JPH02122306U/ja
Application granted granted Critical
Publication of JPH0648328Y2 publication Critical patent/JPH0648328Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP3125289U 1989-03-17 1989-03-17 光学式膜厚自動測定装置 Expired - Lifetime JPH0648328Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3125289U JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3125289U JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Publications (2)

Publication Number Publication Date
JPH02122306U true JPH02122306U (OSRAM) 1990-10-05
JPH0648328Y2 JPH0648328Y2 (ja) 1994-12-12

Family

ID=31256980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3125289U Expired - Lifetime JPH0648328Y2 (ja) 1989-03-17 1989-03-17 光学式膜厚自動測定装置

Country Status (1)

Country Link
JP (1) JPH0648328Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267419A (ja) * 2001-03-14 2002-09-18 Horiba Ltd 膜厚測定装置
KR20160123992A (ko) * 2015-04-16 2016-10-26 헤라우스 일렉트로-나이트 인터내셔날 엔. 브이. 분광계 영점교정 방법 및 기준 재료

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002267419A (ja) * 2001-03-14 2002-09-18 Horiba Ltd 膜厚測定装置
KR20160123992A (ko) * 2015-04-16 2016-10-26 헤라우스 일렉트로-나이트 인터내셔날 엔. 브이. 분광계 영점교정 방법 및 기준 재료
JP2016206189A (ja) * 2015-04-16 2016-12-08 ヘレーウス エレクトロ−ナイト インターナシヨナル エヌ ヴイＨｅｒａｅｕｓ Ｅｌｅｃｔｒｏ−Ｎｉｔｅ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｎ．Ｖ． 分光計較正方法及び基準物質

Also Published As

Publication number Publication date
JPH0648328Y2 (ja) 1994-12-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term