JPH02120744U - - Google Patents

Info

Publication number
JPH02120744U
JPH02120744U JP3009589U JP3009589U JPH02120744U JP H02120744 U JPH02120744 U JP H02120744U JP 3009589 U JP3009589 U JP 3009589U JP 3009589 U JP3009589 U JP 3009589U JP H02120744 U JPH02120744 U JP H02120744U
Authority
JP
Japan
Prior art keywords
steerers
horizontal
vertical
microbeam
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3009589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3009589U priority Critical patent/JPH02120744U/ja
Publication of JPH02120744U publication Critical patent/JPH02120744U/ja
Pending legal-status Critical Current

Links

JP3009589U 1989-03-16 1989-03-16 Pending JPH02120744U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3009589U JPH02120744U (fr) 1989-03-16 1989-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3009589U JPH02120744U (fr) 1989-03-16 1989-03-16

Publications (1)

Publication Number Publication Date
JPH02120744U true JPH02120744U (fr) 1990-09-28

Family

ID=31254854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3009589U Pending JPH02120744U (fr) 1989-03-16 1989-03-16

Country Status (1)

Country Link
JP (1) JPH02120744U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009540528A (ja) * 2006-06-12 2009-11-19 アクセリス テクノロジーズ， インコーポレイテッド イオン注入装置におけるビーム角調節

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009540528A (ja) * 2006-06-12 2009-11-19 アクセリス テクノロジーズ， インコーポレイテッド イオン注入装置におけるビーム角調節

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