JPH02120744U - - Google Patents
Info
- Publication number
- JPH02120744U JPH02120744U JP3009589U JP3009589U JPH02120744U JP H02120744 U JPH02120744 U JP H02120744U JP 3009589 U JP3009589 U JP 3009589U JP 3009589 U JP3009589 U JP 3009589U JP H02120744 U JPH02120744 U JP H02120744U
- Authority
- JP
- Japan
- Prior art keywords
- steerers
- horizontal
- vertical
- microbeam
- collimator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3009589U JPH02120744U (cs) | 1989-03-16 | 1989-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3009589U JPH02120744U (cs) | 1989-03-16 | 1989-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120744U true JPH02120744U (cs) | 1990-09-28 |
Family
ID=31254854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3009589U Pending JPH02120744U (cs) | 1989-03-16 | 1989-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120744U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009540528A (ja) * | 2006-06-12 | 2009-11-19 | アクセリス テクノロジーズ， インコーポレイテッド | イオン注入装置におけるビーム角調節 |
-
1989
- 1989-03-16 JP JP3009589U patent/JPH02120744U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009540528A (ja) * | 2006-06-12 | 2009-11-19 | アクセリス テクノロジーズ， インコーポレイテッド | イオン注入装置におけるビーム角調節 |
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