JPH0212067Y2 - - Google Patents

Info

Publication number
JPH0212067Y2
JPH0212067Y2 JP433681U JP433681U JPH0212067Y2 JP H0212067 Y2 JPH0212067 Y2 JP H0212067Y2 JP 433681 U JP433681 U JP 433681U JP 433681 U JP433681 U JP 433681U JP H0212067 Y2 JPH0212067 Y2 JP H0212067Y2
Authority
JP
Japan
Prior art keywords
wafer
fixing device
substrate
main body
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP433681U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57118188U (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP433681U priority Critical patent/JPH0212067Y2/ja
Publication of JPS57118188U publication Critical patent/JPS57118188U/ja
Application granted granted Critical
Publication of JPH0212067Y2 publication Critical patent/JPH0212067Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Discharging, Photosensitive Material Shape In Electrophotography (AREA)
  • Electron Beam Exposure (AREA)
JP433681U 1981-01-16 1981-01-16 Expired JPH0212067Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP433681U JPH0212067Y2 (US20030199744A1-20031023-C00003.png) 1981-01-16 1981-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP433681U JPH0212067Y2 (US20030199744A1-20031023-C00003.png) 1981-01-16 1981-01-16

Publications (2)

Publication Number Publication Date
JPS57118188U JPS57118188U (US20030199744A1-20031023-C00003.png) 1982-07-22
JPH0212067Y2 true JPH0212067Y2 (US20030199744A1-20031023-C00003.png) 1990-04-04

Family

ID=29802766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP433681U Expired JPH0212067Y2 (US20030199744A1-20031023-C00003.png) 1981-01-16 1981-01-16

Country Status (1)

Country Link
JP (1) JPH0212067Y2 (US20030199744A1-20031023-C00003.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4690028B2 (ja) * 2004-12-17 2011-06-01 株式会社ミツトヨ キャリパー形マイクロメータ

Also Published As

Publication number Publication date
JPS57118188U (US20030199744A1-20031023-C00003.png) 1982-07-22

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