JPH02120638U - - Google Patents
Info
- Publication number
- JPH02120638U JPH02120638U JP2606989U JP2606989U JPH02120638U JP H02120638 U JPH02120638 U JP H02120638U JP 2606989 U JP2606989 U JP 2606989U JP 2606989 U JP2606989 U JP 2606989U JP H02120638 U JPH02120638 U JP H02120638U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- frame
- ventilation
- purified gas
- ventilation plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Duct Arrangements (AREA)
- Air-Flow Control Members (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2606989U JPH02120638U (fr) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2606989U JPH02120638U (fr) | 1989-03-09 | 1989-03-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02120638U true JPH02120638U (fr) | 1990-09-28 |
Family
ID=31247359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2606989U Pending JPH02120638U (fr) | 1989-03-09 | 1989-03-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02120638U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012154503A (ja) * | 2011-01-21 | 2012-08-16 | Koken Ltd | 空気吹き出し装置の連結具およびその連結具を使用した空気吹き出し装置の連続体 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138635A (ja) * | 1985-12-12 | 1987-06-22 | Kumagai Gumi Ltd | 垂直層流式クリ−ンル−ムにおける全面吹出天井設備 |
-
1989
- 1989-03-09 JP JP2606989U patent/JPH02120638U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138635A (ja) * | 1985-12-12 | 1987-06-22 | Kumagai Gumi Ltd | 垂直層流式クリ−ンル−ムにおける全面吹出天井設備 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012154503A (ja) * | 2011-01-21 | 2012-08-16 | Koken Ltd | 空気吹き出し装置の連結具およびその連結具を使用した空気吹き出し装置の連続体 |
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