JPH02120638U - - Google Patents

Info

Publication number
JPH02120638U
JPH02120638U JP2606989U JP2606989U JPH02120638U JP H02120638 U JPH02120638 U JP H02120638U JP 2606989 U JP2606989 U JP 2606989U JP 2606989 U JP2606989 U JP 2606989U JP H02120638 U JPH02120638 U JP H02120638U
Authority
JP
Japan
Prior art keywords
clean room
frame
ventilation
purified gas
ventilation plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2606989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2606989U priority Critical patent/JPH02120638U/ja
Publication of JPH02120638U publication Critical patent/JPH02120638U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
  • Duct Arrangements (AREA)
  • Air-Flow Control Members (AREA)
JP2606989U 1989-03-09 1989-03-09 Pending JPH02120638U (forum.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2606989U JPH02120638U (forum.php) 1989-03-09 1989-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2606989U JPH02120638U (forum.php) 1989-03-09 1989-03-09

Publications (1)

Publication Number Publication Date
JPH02120638U true JPH02120638U (forum.php) 1990-09-28

Family

ID=31247359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2606989U Pending JPH02120638U (forum.php) 1989-03-09 1989-03-09

Country Status (1)

Country Link
JP (1) JPH02120638U (forum.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012154503A (ja) * 2011-01-21 2012-08-16 Koken Ltd 空気吹き出し装置の連結具およびその連結具を使用した空気吹き出し装置の連続体

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62138635A (ja) * 1985-12-12 1987-06-22 Kumagai Gumi Ltd 垂直層流式クリ−ンル−ムにおける全面吹出天井設備

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62138635A (ja) * 1985-12-12 1987-06-22 Kumagai Gumi Ltd 垂直層流式クリ−ンル−ムにおける全面吹出天井設備

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012154503A (ja) * 2011-01-21 2012-08-16 Koken Ltd 空気吹き出し装置の連結具およびその連結具を使用した空気吹き出し装置の連続体

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