JPH02116726A - Thin-film thermocouple - Google Patents
Thin-film thermocoupleInfo
- Publication number
- JPH02116726A JPH02116726A JP63270572A JP27057288A JPH02116726A JP H02116726 A JPH02116726 A JP H02116726A JP 63270572 A JP63270572 A JP 63270572A JP 27057288 A JP27057288 A JP 27057288A JP H02116726 A JPH02116726 A JP H02116726A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- thermocouple
- thin
- round rod
- thin films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 57
- 230000001681 protective effect Effects 0.000 claims abstract description 10
- 239000012212 insulator Substances 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 abstract description 8
- 230000002093 peripheral effect Effects 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 5
- 229910018967 Pt—Rh Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、薄膜熱電対の改良に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to improvements in thin film thermocouples.
（従来の技術）
従来より熱電対は、ワイヤ熱電対が主流を占め、そのほ
かのものとしてはフラットな絶縁基板上に薄膜を形成し
て成る薄膜熱電対が使用されていた。(Prior Art) Conventionally, wire thermocouples have been the mainstream of thermocouples, and other types of thermocouples have been thin film thermocouples, which are formed by forming a thin film on a flat insulating substrate.
（発明が解決しようとする課題）
ところで、ワイヤ熱電対の場合、熱電対を絶縁する為に
、Ａｌ１２０３の保護管に挿入しなければならず、手間
がかかって生産性が悪かった。(Problems to be Solved by the Invention) In the case of wire thermocouples, in order to insulate the thermocouple, it had to be inserted into an Al1203 protective tube, which was time-consuming and poor productivity.
また薄膜熱電対の場合は、真空中にて使用する場合、真
空側と大気側の封止が困難であった。Furthermore, in the case of thin film thermocouples, when used in a vacuum, it is difficult to seal the vacuum side and the atmosphere side.
そこで本発明は、従来のワイヤ熱電対の場合のような絶
縁用の保護管が不要で、しかも従来の薄膜熱電対の場合
の困難な真空封止を容易にできるようにした新規な薄膜
熱電対を提供しようとするものである。Therefore, the present invention provides a novel thin-film thermocouple that does not require an insulating protection tube as in the case of conventional wire thermocouples, and can easily perform vacuum sealing, which is difficult in the case of conventional thin-film thermocouples. This is what we are trying to provide.
（課題を解決するための手段）
上記課題を解決するための本発明の薄膜熱電対は、絶縁
体の丸棒の外周面の長手方向に、上下対称に薄膜が形成
され、丸棒の一端面で薄膜が重合接続され、丸棒の他端
面にコネクタ接合凹部が設けられていることを特徴とす
るものである。(Means for Solving the Problems) A thin film thermocouple of the present invention for solving the above problems has a thin film vertically symmetrically formed in the longitudinal direction of the outer peripheral surface of an insulating round bar, and one end surface of the round bar. The round rod is characterized in that the thin films are polymerized and connected, and a connector joining recess is provided on the other end surface of the round rod.
前記薄膜の表面には安定した酸化物（ＡｆｚＯｓ、Ｚｒ
Ｏ７等）がコーティングされて絶縁保護膜が形成されて
いることが好ましい。The surface of the thin film is coated with stable oxides (AfzOs, Zr
It is preferable that an insulating protective film is formed by coating with O7, etc.).
（作用）
上述の如く本発明の薄膜熱電対は、絶縁体の丸、棒の外
周面に薄膜が形成されているので、ワイヤ熱電対の場合
に必要であった絶縁用保護管が不要となり、またフラッ
トな絶縁基板上に薄膜を形成して成る薄膜熱電対の場合
に困難であった真空封止が、０リングを使用することに
より容易にできる。さらに丸棒の他端にコネクタ用凹部
が設けられているので、丸棒にあったサイズのコネクタ
を作れば容器に抜き差しができる。(Function) As mentioned above, the thin film thermocouple of the present invention has a thin film formed on the outer circumferential surface of the insulator round or rod, so there is no need for an insulating protective tube, which is required in the case of wire thermocouples. Further, vacuum sealing, which is difficult in the case of a thin film thermocouple formed by forming a thin film on a flat insulating substrate, can be easily achieved by using an O-ring. Furthermore, since a recess for a connector is provided at the other end of the round bar, if a connector of the size suitable for the round bar is made, it can be inserted into and removed from the container.
然して、薄膜の表面に安定したＡｊ！２０ｓ、ＺｒＯ２
等の安定した酸化物がコーティングされ絶縁保護膜が形
成されたものにあっては、薄膜が保護されて、熱電対と
しての寿命が増長する。However, stable Aj! on the surface of the thin film! 20s, ZrO2
When a thermocouple is coated with a stable oxide such as a thermocouple and an insulating protective film is formed, the thin film is protected and the life of the thermocouple is extended.
（実施例）
本発明の薄膜熱電対の一実施例を第１図によって説明す
ると、直径３［ＩＩ［ｏ、長さ２００ ｍｍのＡｌ２Ｏ
。(Example) An example of the thin film thermocouple of the present invention will be described with reference to FIG.
.
より成る絶縁体の丸棒１の外周面の長手方向に、上下対
称に幅２ｍ１１１．長さ２００ ｍｍ、厚さ１μｍのＰ
ｔとＰ ｔ −Ｒｈ １３ｗｔ％の薄膜２．３がメタル
マスクを用いるスパッタリング法によりコーティングさ
れて形成され、且つ丸棒１の一端面で薄膜２．３が重合
接続され、丸棒１の他端面に薄膜２．３間でコネクタ接
合凹部４が設けられている。In the longitudinal direction of the outer peripheral surface of the insulator round bar 1, the width is 2 m111. P with a length of 200 mm and a thickness of 1 μm
A thin film 2.3 of t and P t -Rh of 13 wt% is formed by coating by a sputtering method using a metal mask, and the thin film 2.3 is polymerized and connected to one end surface of the round bar 1, and the other end surface of the round bar 1 is connected by polymerization. A connector joining recess 4 is provided between the thin films 2 and 3.
かかる薄膜熱電対５は、絶縁体の丸棒１の外周面に薄膜
２．３が形成されているので、ワイヤ熱電対の場合に必
要であった絶縁用保護管は不要である。またフラットな
絶縁基板上に薄膜を形成して成る従来の薄膜熱電対の場
合に困難であった真空封止が０リングを使用することに
より可能である。即ち第２図に示す如〈実施例の薄膜熱
電対５を真空側６と大気側７とを区画している隔壁８の
透孔９に貫通して前半部を真空側に配し、透孔９の大気
側の周縁部に同心に固設した外周にねじ１０を有する円
筒体１１内にワッシャ１２．０リング１３、ワッシャ１
２を薄膜熱電対５に嵌装の上挿入し、薄膜熱電対５にキ
ャップ１４を嵌装して、その内周のねじ１５にて円筒体
１１のねじ１０に螺締し、０リング１３を締付けて、薄
膜熱電対５の外周面と円筒体１１の内周面に密着し、真
空側６を封止した。そして真空側６の真空度１Ｏ−５Ｔ
ｏ ｒ ｒとなして、５００℃の温度測定を行った処
、精度良く測定できた。Since such a thin film thermocouple 5 has a thin film 2.3 formed on the outer circumferential surface of the insulating round bar 1, an insulating protective tube, which is necessary in the case of a wire thermocouple, is not necessary. Further, by using an O-ring, vacuum sealing, which has been difficult with conventional thin film thermocouples formed by forming a thin film on a flat insulating substrate, is possible. That is, as shown in FIG. A washer 12.0, a ring 13, and a washer 1 are installed in a cylindrical body 11 having a screw 10 on the outer periphery, which is fixed concentrically to the peripheral edge on the atmosphere side of 9.
2 into the thin film thermocouple 5, fit the cap 14 onto the thin film thermocouple 5, screw it into the screw 10 of the cylindrical body 11 with the screw 15 on the inner circumference, and then attach the O ring 13. It was tightened to tightly contact the outer circumferential surface of the thin film thermocouple 5 and the inner circumferential surface of the cylindrical body 11, thereby sealing the vacuum side 6. And vacuum degree of vacuum side 6 is 1O-5T
The temperature was measured at 500° C. with high accuracy.
また絶縁体の丸棒１の他端面に、コネクタ接合凹部４が
設けられているので、第３図に示す如くコネクタ接合凹
部４に対応した凸部１６を底に有する円筒部１７の内周
に弾性端子ＩＳを備えたコネクタ１９を、薄膜熱電対５
の他端部に嵌合し、弾性端子１８にて挟持せしめられる
ことにより、薄膜２．３と弾性端子１８とが導通せしめ
られ、またコネクタ１９を引き抜くことにより簡単に外
れる。Furthermore, since the connector joining recess 4 is provided on the other end surface of the insulator round bar 1, the inner periphery of the cylindrical portion 17, which has a protrusion 16 corresponding to the connector joining recess 4 at the bottom, as shown in FIG. Connector 19 with elastic terminal IS is connected to thin film thermocouple 5
The thin film 2.3 and the elastic terminal 18 are electrically connected by being fitted to the other end and being sandwiched between the elastic terminals 18, and can be easily removed by pulling out the connector 19.
尚、上記薄膜熱電対５のコネクタ１９を嵌合する部分の
薄膜２．３を除いて、薄膜２．３の表面に安定した酸化
物例えばＡｌ、０３をスパッタリング法により０．５μ
ｍコーティングして絶縁保護膜を形成したものは、薄膜
２．３が汚染から保護されて熱電対としての寿命が増長
する。Note that, except for the thin film 2.3 in the portion where the connector 19 of the thin film thermocouple 5 is fitted, a stable oxide such as Al, 03 is applied to the surface of the thin film 2.3 by sputtering to 0.5 μm.
In the case where an insulating protective film is formed by coating with m, the thin film 2.3 is protected from contamination and the life of the thermocouple is extended.
（発明の効果）
以上の説明で判るように本発明の薄膜熱電対は、ワイヤ
熱電対の場合に必要であった絶縁用保護管が不要であり
、またフラットな絶縁基板上に薄膜を形成して成る薄膜
熱電対の場合に困難であった真空封止が、０リングを使
用することにより容易にできる。従って、真空中での温
度測定を精度良くできる。また本発明の薄膜熱電対は、
他端部に合ったサイズのコネクタを作れば脱着が容易に
できる。さらに本発明の薄膜熱電対は、薄膜の表面に絶
縁保護膜を形成したものにあっては、薄膜が汚染から保
護されて熱電対としての寿命が増長する等の効果がある
。(Effects of the Invention) As can be seen from the above explanation, the thin film thermocouple of the present invention does not require an insulating protective tube, which is required in the case of a wire thermocouple, and the thin film is formed on a flat insulating substrate. Vacuum sealing, which is difficult to achieve with thin film thermocouples, can be easily achieved by using an O-ring. Therefore, temperature measurement in vacuum can be performed with high accuracy. Furthermore, the thin film thermocouple of the present invention has
If you make a connector that is the right size for the other end, it can be easily attached and detached. Furthermore, in the case of the thin film thermocouple of the present invention in which an insulating protective film is formed on the surface of the thin film, the thin film is protected from contamination and the life of the thermocouple is extended.
第１図は本発明の薄膜熱電対の一実施例を示す図、第２
図はその薄膜熱電対により真空中で温度測定する場合の
真空封止の状態を示す縦断面図、第３図はその薄膜熱電
対のコネクタとの接合状態を示す縦断面図である。
出願人 田中貴金属工業株式会社FIG. 1 is a diagram showing an embodiment of the thin film thermocouple of the present invention, and FIG.
The figure is a vertical cross-sectional view showing the state of vacuum sealing when temperature is measured in vacuum with the thin film thermocouple, and FIG. 3 is a vertical cross-sectional view showing the state of connection of the thin film thermocouple with the connector. Applicant Tanaka Kikinzoku Kogyo Co., Ltd.
Claims (1)
膜が形成され、丸棒の一端面で薄膜が重合接続され、丸
棒の他端面にコネクタ接合凹部が設けられていることを
特徴とする薄膜熱電対。 ２、薄膜の表面に安定した酸化物がコーティングされ絶
縁保護膜が形成されている請求項１記載の薄膜熱電対。[Claims] 1. A thin film is vertically symmetrically formed in the longitudinal direction of the outer circumferential surface of the insulator round bar, the thin film is overlaid and connected on one end face of the round bar, and a connector joining recess is formed on the other end face of the round bar. A thin film thermocouple characterized by being provided with. 2. The thin film thermocouple according to claim 1, wherein the surface of the thin film is coated with a stable oxide to form an insulating protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63270572A JPH02116726A (en) | 1988-10-26 | 1988-10-26 | Thin-film thermocouple |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63270572A JPH02116726A (en) | 1988-10-26 | 1988-10-26 | Thin-film thermocouple |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02116726A true JPH02116726A (en) | 1990-05-01 |
Family
ID=17488016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63270572A Pending JPH02116726A (en) | 1988-10-26 | 1988-10-26 | Thin-film thermocouple |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02116726A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8313040B2 (en) * | 2008-03-28 | 2012-11-20 | Fujikoki Corporation | Temperature sensing tube for expansion valve |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976569A (en) * | 1972-11-25 | 1974-07-24 | ||
| JPS6079784A (en) * | 1983-10-06 | 1985-05-07 | New Japan Radio Co Ltd | Thin-film thermocouple |
-
1988
- 1988-10-26 JP JP63270572A patent/JPH02116726A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4976569A (en) * | 1972-11-25 | 1974-07-24 | ||
| JPS6079784A (en) * | 1983-10-06 | 1985-05-07 | New Japan Radio Co Ltd | Thin-film thermocouple |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8313040B2 (en) * | 2008-03-28 | 2012-11-20 | Fujikoki Corporation | Temperature sensing tube for expansion valve |
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