JPH02114938U - - Google Patents
Info
- Publication number
- JPH02114938U JPH02114938U JP2444589U JP2444589U JPH02114938U JP H02114938 U JPH02114938 U JP H02114938U JP 2444589 U JP2444589 U JP 2444589U JP 2444589 U JP2444589 U JP 2444589U JP H02114938 U JPH02114938 U JP H02114938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support frame
- entrance
- support
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 11
- 230000002093 peripheral effect Effects 0.000 claims 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024445U JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024445U JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02114938U true JPH02114938U (US20100268047A1-20101021-C00003.png) | 1990-09-14 |
| JPH0648859Y2 JPH0648859Y2 (ja) | 1994-12-12 |
Family
ID=31244299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989024445U Expired - Lifetime JPH0648859Y2 (ja) | 1989-03-03 | 1989-03-03 | ウエハー支持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648859Y2 (US20100268047A1-20101021-C00003.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06286812A (ja) * | 1993-03-13 | 1994-10-11 | Yodogawa Kasei Kk | カセット |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6278753U (US20100268047A1-20101021-C00003.png) * | 1985-11-05 | 1987-05-20 | ||
| JPS62128633U (US20100268047A1-20101021-C00003.png) * | 1986-02-07 | 1987-08-14 | ||
| JPS633155U (US20100268047A1-20101021-C00003.png) * | 1986-06-25 | 1988-01-11 | ||
| JPS6320428U (US20100268047A1-20101021-C00003.png) * | 1986-07-25 | 1988-02-10 | ||
| JPS63170464U (US20100268047A1-20101021-C00003.png) * | 1987-04-22 | 1988-11-07 |
-
1989
- 1989-03-03 JP JP1989024445U patent/JPH0648859Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6278753U (US20100268047A1-20101021-C00003.png) * | 1985-11-05 | 1987-05-20 | ||
| JPS62128633U (US20100268047A1-20101021-C00003.png) * | 1986-02-07 | 1987-08-14 | ||
| JPS633155U (US20100268047A1-20101021-C00003.png) * | 1986-06-25 | 1988-01-11 | ||
| JPS6320428U (US20100268047A1-20101021-C00003.png) * | 1986-07-25 | 1988-02-10 | ||
| JPS63170464U (US20100268047A1-20101021-C00003.png) * | 1987-04-22 | 1988-11-07 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06286812A (ja) * | 1993-03-13 | 1994-10-11 | Yodogawa Kasei Kk | カセット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648859Y2 (ja) | 1994-12-12 |
