JPH02114865A - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- JPH02114865A JPH02114865A JP63267885A JP26788588A JPH02114865A JP H02114865 A JPH02114865 A JP H02114865A JP 63267885 A JP63267885 A JP 63267885A JP 26788588 A JP26788588 A JP 26788588A JP H02114865 A JPH02114865 A JP H02114865A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric element
- torsional
- pieces
- electrode plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002356 single layer Substances 0.000 claims abstract description 6
- 230000010287 polarization Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 abstract description 14
- 238000006073 displacement reaction Methods 0.000 abstract description 14
- 239000010410 layer Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 6
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野］
この発明は、圧電体における厚み滑り効果を利用した圧
電アクチュエータに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric actuator that utilizes the thickness sliding effect in a piezoelectric material.
［従来の技術］
セラミックス等の誘電体に電圧を加えると変位する圧電
現象を利用したいわゆる圧電アクチュエータは、通常、
分極方向と電界の向きを揃えるように電圧を加えること
により分極方向に沿って伸縮させる縦効果を応用した６
のである。この圧電アクチュエータは、変位ｍが少ない
こと、あるいは高い印加電圧が必要であることなどが欠
点とされているが、その変位量を大きくとるために、積
層型アクチュエータを構成している。そして、この積層
型アクチュエータを同心円の周方向に配置することによ
り、中心軸の回りに捩りの向きに作動するアクチュエー
タが構成される。また、この縦効果型のアクチュエータ
の他、横効果を応用したパイモルファクテコ。エータな
ども開発されている。[Prior Art] A so-called piezoelectric actuator, which utilizes the piezoelectric phenomenon in which a dielectric material such as ceramics is displaced when a voltage is applied, usually
Applying a vertical effect that stretches and contracts along the polarization direction by applying a voltage to align the polarization direction and the electric field direction 6
It is. This piezoelectric actuator has drawbacks such as a small displacement m or the need for a high applied voltage, but in order to increase the amount of displacement, a laminated actuator is constructed. By arranging this laminated actuator in the circumferential direction of concentric circles, an actuator that operates in a torsional direction around the central axis is constructed. In addition to this vertical effect type actuator, we also have a pymorph actuator that uses a horizontal effect. Eta has also been developed.
［発明が解決しようとする課題］
しかしながら、上記のような従来の技術においては、い
ずれも変位量は大きくとれるものの、極微小の回転量を
細かく制御する場合においては不向きであった。[Problems to be Solved by the Invention] However, in the conventional techniques as described above, although a large amount of displacement can be obtained, they are not suitable for finely controlling an extremely small amount of rotation.
この発明【よ、付与されノこ電源電圧に対して極微小な
捩り回転変位をし、それにより精密な細かい制御を行う
ことができるような圧電アクチュエータを提供すること
を特徴とする特
許
［課題を解決するための手段］
」二記のような課題を解決するために、この発明は、平
板状の圧電体を板面に沿う方向に分極させた圧電素子片
を、複数、分極方向が同心円の接線に沿うように平面配
置し、この両面に電極を設置して捩り素子を構成し、こ
の捩り素子を単層あるいは多層に重ねたものである。圧
電素子片は通常は互いに密接して平面配置され、個々の
形状は特に限定するものではないが、扇状あるいは円を
周方向に等分割した形状の６のが好適である。This invention is a patent which is characterized by providing a piezoelectric actuator that can perform extremely small torsional rotational displacement with respect to an applied saw power supply voltage, thereby enabling precise and fine control. Means for Solving the Problem] In order to solve the problems as described in item 2, the present invention includes a plurality of piezoelectric element pieces in which a flat piezoelectric material is polarized in the direction along the plate surface, and the polarization direction is concentric circles. A torsion element is constructed by arranging the torsion element in a plane along a tangent line and placing electrodes on both sides of the torsion element, and this torsion element is stacked in a single layer or in multiple layers. The piezoelectric element pieces are usually arranged in close proximity to each other in a plane, and although their individual shapes are not particularly limited, it is preferable to have a fan shape or a shape in which a circle is equally divided in the circumferential direction.
［作用 ］
このような構成の圧電アクチユエータにおいては、個々
の平板状の圧電素子が両面の電極から電圧を印加される
と、この圧電素子は分極方向を含む平板に直交する面に
沿って滑り変形する。それぞれの圧電素子がその分極方
向が同心の円周に沿うように配置されているので、その
集合体である捩り素子は総体として中心線の回りに捩り
の向きに変形し、従って、単層または積層した捩り素子
の両端の端板どうしは互いに逆の向きに、電源の電圧に
比例して極微小角度回転する。[Function] In a piezoelectric actuator with such a configuration, when voltage is applied to each flat piezoelectric element from the electrodes on both sides, this piezoelectric element slides and deforms along a plane perpendicular to the flat plate including the polarization direction. do. Since each piezoelectric element is arranged so that its polarization direction is along the concentric circumference, the torsion element which is an assembly of the piezoelectric elements is deformed as a whole in the direction of torsion around the center line, and therefore, a single layer or The end plates at both ends of the stacked torsion element rotate in opposite directions by a very small angle in proportion to the voltage of the power supply.
［実施例］ 以下、図面を参照してこの発明の詳細な説明する。[Example] Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図ないし第３図において、１は筒状の積層圧電体で
あり、その両端にはアルミニウム等からなる円板状の端
板２，２が配され、積層圧電体１を挿通ずる連結ボルト
３により連結されて積層圧電体ｌを一定の力で押圧して
いる。In Figures 1 to 3, 1 is a cylindrical laminated piezoelectric body, and disk-shaped end plates 2, 2 made of aluminum or the like are arranged at both ends of the body, and a connecting bolt is inserted through the laminated piezoelectric body 1. 3 to press the laminated piezoelectric body 1 with a constant force.
上記積層圧電体ｌは、第３図に示すように、圧電素子片
４からなる圧電セラミックス層５と電極板６とが交互に
積層されて構成されており、圧電素子片４は中心孔を有
する円板を８分割した形状に構成されている。この圧電
素子片４は、ＰＺ’ｌ’などの圧電セラミックスからな
り、その両側端面から高電圧をかけることにｊ；す、は
ぼ」二記円の周方向に沿って矢印Ａの向きに分極されて
おり、各圧電素子片４の分極方向は同じ向きになるよう
に配置している。As shown in FIG. 3, the laminated piezoelectric body 1 is constructed by alternately laminating piezoelectric ceramic layers 5 made of piezoelectric element pieces 4 and electrode plates 6, and the piezoelectric element piece 4 has a center hole. It is constructed in the shape of a disk divided into eight parts. This piezoelectric element piece 4 is made of a piezoelectric ceramic such as PZ'l', and is polarized in the direction of arrow A along the circumferential direction of the circle marked by applying a high voltage from both end faces thereof. The piezoelectric element pieces 4 are arranged so that the polarization direction of each piezoelectric element piece 4 is the same.
」―配電極板６は圧電セラミックス層５の両側に導電性
を持つ接着剤により接合されており、この圧電セラミッ
クス層５と電極板６．６とが捩り素子７の単位を構成し
ている。この実施例では、セラミックス層５と電極板６
とが交互に配置され、捩り素子７が４層に重ねられた構
成になっている。- The distribution electrode plate 6 is bonded to both sides of the piezoelectric ceramic layer 5 with a conductive adhesive, and the piezoelectric ceramic layer 5 and the electrode plate 6.6 constitute a unit of the torsion element 7. In this embodiment, the ceramic layer 5 and the electrode plate 6
are arranged alternately, and the torsion elements 7 are stacked in four layers.
そして、隣り合う圧電セラミックス層５の分極の向きは
交互に逆になっており、電極板６への電源の配線は１つ
置きに連絡されて、隣接する圧電セラミックス層５にお
いては、分極する方向と電源の接続の向きが双方とも逆
となっている。The polarization directions of the adjacent piezoelectric ceramic layers 5 are alternately reversed, and the power supply wiring to the electrode plate 6 is connected every other time, so that the polarization direction of the adjacent piezoelectric ceramic layers 5 is reversed. The direction of the power connection is reversed.
端板２の素材にアルミニウム、圧電素子片４の素材セラ
ミックスにＰＺＴ、電極板６にリン青銅をそれぞれ用い
、第３図に示すような形状に製作した圧電アクチユエー
タについて、その動作特性を調べた結果を示す。なお、
１枚の圧電セラミックスは厚さ１．５ｍｍ、直径４０ｍ
ｍφ、積層圧電体ｌは厚さ７ 、５ ｍｍ、端板２は厚
さ５ ｍｍ、直径６０ｍｍφである。圧電アクチュエー
タの一方の端板２を固定し、他方の端板２の外周に棒状
部材を径方向に取りイマ］げ、電源をイ；］与したとき
の棒状部材の周方向の変位を、アクチユエータの中心よ
り４１ｍｍの点て差動トランスにより測定した。Results of investigating the operating characteristics of a piezoelectric actuator fabricated in the shape shown in Figure 3, using aluminum as the material for the end plate 2, PZT as the ceramic material for the piezoelectric element piece 4, and phosphor bronze for the electrode plate 6. shows. In addition,
One piece of piezoelectric ceramic is 1.5mm thick and 40m in diameter.
mφ, the laminated piezoelectric body l has a thickness of 7.5 mm, and the end plate 2 has a thickness of 5 mm and a diameter of 60 mmφ. One end plate 2 of the piezoelectric actuator is fixed, a rod-shaped member is placed radially around the outer periphery of the other end plate 2, and the displacement of the rod-shaped member in the circumferential direction when power is applied is calculated as follows: Measurement was made using a differential transformer at a point 41 mm from the center of the .
電源電圧を０〜５００Ｖ、０〜１００ＯＶの範囲で変化
させた場合の変位量を第４図に、−５００〜＋５００Ｖ
、−１０００〜→−＋０００Ｖの範囲で変化させた場合
の変位量を第５図に示す。また、第４図の場合の変位量
をもとに、端板２．２の間の捩りの角度、１枚の捩り素
子７の歪み角率を算出した結果を第１表に示す。Figure 4 shows the amount of displacement when the power supply voltage is changed in the range of 0 to 500V, 0 to 100OV, -500 to +500V.
, -1000 to -+000V is shown in FIG. 5. Further, Table 1 shows the results of calculating the torsion angle between the end plates 2.2 and the distortion angle rate of one torsion element 7 based on the displacement amount in the case of FIG. 4.
第１表
このグラフに示されるように、変位量は電源電圧の変化
に対して一定のヒステリシスを持つもののほぼ直線的に
変化する。この変位量は、図及び表に示すように、電圧
変化に対して非フ；；に微小である。Table 1 As shown in this graph, the amount of displacement changes almost linearly with respect to changes in power supply voltage, although there is a certain hysteresis. As shown in the figure and table, this amount of displacement is extremely small relative to voltage changes.
なお、この圧電セラミックスの索祠であるＰＺ１’は、
その厚み滑り定数ｄ１５か４５１ｘｌＯｍ／Ｖであるが
、圧電セラミックスとしてこの定数（１１，の大きい柔
軟な水利を使用することにより、電圧に対する変位量の
大きいアクヂュ、エータを製造することがてきる。In addition, this piezoelectric ceramic cable shrine PZ1' is
Its thickness-slip constant d15 is 451 x lOm/V, and by using a flexible water conduit with a large constant (11) as a piezoelectric ceramic, it is possible to manufacture actuators and ethers that have a large displacement with respect to voltage.
このような圧電アクチュエータの使用方法としては、端
板２の一方の中心に駆動軸を設けてこれを回転駆動する
回転型のアクチュエータ、あるいは、端板２の端部に延
びる駆動アームを設（」てこのアームの先端を一定の距
離動かずようにした直線移動型のアクヂュ、エータなと
に応用することかてき、また適当な交番電流を付Ｊ〕す
ることにより、それらの方向に振動させることができろ
。Such a piezoelectric actuator can be used as a rotary actuator, in which a drive shaft is provided at the center of one of the end plates 2 and driven to rotate, or in a rotary actuator, in which a drive arm is provided that extends to the end of the end plate 2. It can be applied to linearly moving actuators, eater, etc. in which the tip of the lever arm does not move a certain distance, or it can be made to vibrate in those directions by applying an appropriate alternating current. Be able to do it.
［−発明の効果」
以」−詳述したように、この発明は、平板状の圧電体を
板面に沿う一方向に分極させた圧電素子片を、複数、分
極方向が同心円の接線に沿うように平面配置し、この圧
電素子片の両面に電極を設置して捩り素子を構成し、こ
の捩り素子を単層あるいは多層に重ねて配置した乙ので
あるので、圧電素子の厚み滑り効果を利用して極微小な
回転変位を得ることがてき、減速機＋１４を設（Ｊすに
細かい変位の制御を行うことがてき、そのような微小の
変位の作動を必要と４−る精密Ｒ器にお（ｊる駆動諌と
して好適である。[-Effects of the Invention] As described in detail, the present invention provides a plurality of piezoelectric element pieces in which a flat piezoelectric material is polarized in one direction along the plate surface, and the polarization direction is along the tangent line of a concentric circle. Electrodes are placed on both sides of this piezoelectric element piece to form a torsion element, and this torsion element is arranged in a single layer or in multiple layers, making use of the thickness sliding effect of the piezoelectric element. It is possible to obtain an extremely small rotational displacement by using a reduction gear, and a reduction gear +14 is installed. It is suitable as a driving force.
第１図はこの発明の一実施例の圧電アクチュエータを示
す斜視図、第２図（」圧電素子片の分極の状況を示す図
、第３図は圧電アクチュエータの側面図、第４図及び第
５図は電圧と変位の関係を示すグラフである。
２ ・・端板、４ ・・・圧電素子片、６・・・電極板
、７ ・・捩り素子。FIG. 1 is a perspective view showing a piezoelectric actuator according to an embodiment of the present invention, FIG. 2 is a diagram showing the state of polarization of a piezoelectric element piece, FIG. The figure is a graph showing the relationship between voltage and displacement. 2... End plate, 4... Piezoelectric element piece, 6... Electrode plate, 7... Torsion element.
Claims (1)
子片を、複数、分極方向が同心円の接線に沿うように平
面配置し、この圧電素子片の両面に電極を設置して捩り
素子を構成し、この捩り素子を単層あるいは多層に重ね
て配置したことを特徴とする圧電アクチュエータ。A plurality of piezoelectric element pieces, each made by polarizing a flat piezoelectric material in one direction along the plate surface, are arranged on a plane so that the polarization directions are along the tangents of concentric circles, electrodes are placed on both sides of the piezoelectric element pieces, and the piezoelectric element pieces are twisted. A piezoelectric actuator comprising a torsion element and arranged in a single layer or in multiple layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63267885A JPH02114865A (en) | 1988-10-24 | 1988-10-24 | Piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63267885A JPH02114865A (en) | 1988-10-24 | 1988-10-24 | Piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02114865A true JPH02114865A (en) | 1990-04-26 |
Family
ID=17450981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63267885A Pending JPH02114865A (en) | 1988-10-24 | 1988-10-24 | Piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02114865A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5306980A (en) * | 1990-07-16 | 1994-04-26 | Atlantic Richfield Company | Torsional force transducer and method of operation |
-
1988
- 1988-10-24 JP JP63267885A patent/JPH02114865A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5306980A (en) * | 1990-07-16 | 1994-04-26 | Atlantic Richfield Company | Torsional force transducer and method of operation |
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