JPS63136982A - Electrostatic actuator - Google Patents

Electrostatic actuator

Info

Publication number
JPS63136982A
JPS63136982A JP28324886A JP28324886A JPS63136982A JP S63136982 A JPS63136982 A JP S63136982A JP 28324886 A JP28324886 A JP 28324886A JP 28324886 A JP28324886 A JP 28324886A JP S63136982 A JPS63136982 A JP S63136982A
Authority
JP
Japan
Prior art keywords
element
stator
pattern
formed
electrostatic actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28324886A
Inventor
Yasuhiko Ishiwatari
Eigo Kawakami
Tomoji Komata
Masato Niibe
Hiroyasu Nose
Nobuo Watanabe
Tetsuya Yano
Hiroshi Yoneda
Satoshi Yuasa
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP28324886A priority Critical patent/JPS63136982A/en
Publication of JPS63136982A publication Critical patent/JPS63136982A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To easily work an electrostatic actuator by composing a movable element of a conductive material, and disposing a dielectric layer on the surface of the element to simplify the construction.
CONSTITUTION: An electrostatic actuator is composed of stators 10a∼10c, and movable elements 30a, 30b. An electrode pattern 20 made of a conductor is formed at a predetermined interval on the stator 10, and a dielectric pattern 40 is formed at a pitch to become 1:1.16 ratio with the pattern 20 of the stator 10 is also formed on the element 30. The interval (d) of the electrode 20 of the stator 10 and the pattern 40 of the element 30 is held at 0.1∼0.2mm, and all the elements 30 are supported integrally movably in directions of arrows A, B, as shown. Thus, in order to move the element 30, a predetermined pulselike voltage is sequentially applied in a moving direction to the electrodes 20 of the stator 10 to draw the element 30 between the electrodes to which the voltage is applied.
COPYRIGHT: (C)1988,JPO&Japio
JP28324886A 1986-11-28 1986-11-28 Electrostatic actuator Pending JPS63136982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28324886A JPS63136982A (en) 1986-11-28 1986-11-28 Electrostatic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28324886A JPS63136982A (en) 1986-11-28 1986-11-28 Electrostatic actuator

Publications (1)

Publication Number Publication Date
JPS63136982A true JPS63136982A (en) 1988-06-09

Family

ID=17663002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28324886A Pending JPS63136982A (en) 1986-11-28 1986-11-28 Electrostatic actuator

Country Status (1)

Country Link
JP (1) JPS63136982A (en)

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63154073A (en) * 1986-12-17 1988-06-27 Toshiaki Watanabe Semiconductor motor
JPS6474071A (en) * 1987-09-11 1989-03-20 Toshiba Corp Static actuator
EP0381212A2 (en) * 1989-02-02 1990-08-08 Hitachi, Ltd. Electrostatic-type multidimensional actuator
JPH02285978A (en) * 1989-04-24 1990-11-26 Res Dev Corp Of Japan Electrostatic actuator using film
EP0411476A1 (en) * 1989-08-02 1991-02-06 Hitachi, Ltd. Electrostatic actuator
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
US5084645A (en) * 1989-11-30 1992-01-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electrorepulsive actuator
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
JPH04285485A (en) * 1991-03-11 1992-10-09 Semiconductor Energy Lab Co Ltd Accelerator for object and its accelerating method
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
US5378954A (en) * 1990-04-16 1995-01-03 Fujitsu Limited Electrostatic actuator
US5399415A (en) * 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5430339A (en) * 1990-02-02 1995-07-04 Fraunhofer Gesellschaft Zur Foerderung Der Forschung E.V. Electric motor
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5572076A (en) * 1989-02-02 1996-11-05 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Dielectric micromechanical element
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
US5726509A (en) * 1989-02-02 1998-03-10 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Dielectric motor
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US7265476B1 (en) * 2003-10-31 2007-09-04 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS micro-translation device with improved linear travel capability
US7514840B2 (en) * 2004-11-24 2009-04-07 Alps Electric Co., Ltd. Electrostatic actuator
US7583006B2 (en) * 2005-07-26 2009-09-01 Siimpel Corporation MEMS digital linear actuator
US20090236932A1 (en) * 2008-03-24 2009-09-24 Sanyo Electric Co., Ltd. Electrostatic acting device
JP2010081724A (en) * 2008-09-25 2010-04-08 Sanyo Electric Co Ltd Electrostatic inductive power generation device
US7834513B2 (en) * 2007-09-10 2010-11-16 Lawrence Livermore National Security, Llc Electrostatic generator/motor having rotors of varying thickness and a central stator electrically connected together into two groups
US8466600B2 (en) 2006-08-31 2013-06-18 Sanyo Electric Co., Ltd. Electrostatic operation device
US8643249B2 (en) 2007-09-10 2014-02-04 Lawrence Livermore National Security, Llc Electrostatic generator/motor configurations
US9270204B2 (en) 2013-06-13 2016-02-23 Lawrence Livermore National Security, Llc Technique for enhancing the power output of an electrostatic generator employing parametric resonance
US9614462B2 (en) 2007-09-10 2017-04-04 Lawrence Livermore National Security, Llc Rippled disc electrostatic generator/motor configurations utilizing magnetic insulation
US10110146B2 (en) 2014-09-30 2018-10-23 Lawrence Livermore National Security, Llc Pulse-train drive system for electrostatic generators and motors

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0520994B2 (en) * 1986-12-17 1993-03-23 Takahashi Akio
JPS63154073A (en) * 1986-12-17 1988-06-27 Toshiaki Watanabe Semiconductor motor
JPS6474071A (en) * 1987-09-11 1989-03-20 Toshiba Corp Static actuator
EP0381212A2 (en) * 1989-02-02 1990-08-08 Hitachi, Ltd. Electrostatic-type multidimensional actuator
US5726509A (en) * 1989-02-02 1998-03-10 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Dielectric motor
US5572076A (en) * 1989-02-02 1996-11-05 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Dielectric micromechanical element
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
US5072288A (en) * 1989-02-21 1991-12-10 Cornell Research Foundation, Inc. Microdynamic release structure
JPH02285978A (en) * 1989-04-24 1990-11-26 Res Dev Corp Of Japan Electrostatic actuator using film
JPH0691754B2 (en) * 1989-04-24 1994-11-14 新技術事業団 Contact type electrostatic actuator that utilizes a film
EP0411476A1 (en) * 1989-08-02 1991-02-06 Hitachi, Ltd. Electrostatic actuator
US5084645A (en) * 1989-11-30 1992-01-28 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electrorepulsive actuator
US5430339A (en) * 1990-02-02 1995-07-04 Fraunhofer Gesellschaft Zur Foerderung Der Forschung E.V. Electric motor
US5378954A (en) * 1990-04-16 1995-01-03 Fujitsu Limited Electrostatic actuator
US5585683A (en) * 1990-04-16 1996-12-17 Fujitsu Limited Electrostatic actuators of various configuration with belt-like electrodes to induce an image charge on a resistance member and cause relative motion
JPH04285485A (en) * 1991-03-11 1992-10-09 Semiconductor Energy Lab Co Ltd Accelerator for object and its accelerating method
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
US5449903A (en) * 1991-05-14 1995-09-12 Cornell Research Foundation, Inc. Methods of fabricating integrated, aligned tunneling tip pairs
US5399415A (en) * 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
US5914553A (en) * 1997-06-16 1999-06-22 Cornell Research Foundation, Inc. Multistable tunable micromechanical resonators
US7265476B1 (en) * 2003-10-31 2007-09-04 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS micro-translation device with improved linear travel capability
US7514840B2 (en) * 2004-11-24 2009-04-07 Alps Electric Co., Ltd. Electrostatic actuator
US7583006B2 (en) * 2005-07-26 2009-09-01 Siimpel Corporation MEMS digital linear actuator
JP5216590B2 (en) * 2006-08-31 2013-06-19 三洋電機株式会社 Electrostatic operation device
US8466600B2 (en) 2006-08-31 2013-06-18 Sanyo Electric Co., Ltd. Electrostatic operation device
US7834513B2 (en) * 2007-09-10 2010-11-16 Lawrence Livermore National Security, Llc Electrostatic generator/motor having rotors of varying thickness and a central stator electrically connected together into two groups
US8643249B2 (en) 2007-09-10 2014-02-04 Lawrence Livermore National Security, Llc Electrostatic generator/motor configurations
US9614462B2 (en) 2007-09-10 2017-04-04 Lawrence Livermore National Security, Llc Rippled disc electrostatic generator/motor configurations utilizing magnetic insulation
US20090236932A1 (en) * 2008-03-24 2009-09-24 Sanyo Electric Co., Ltd. Electrostatic acting device
JP2010081724A (en) * 2008-09-25 2010-04-08 Sanyo Electric Co Ltd Electrostatic inductive power generation device
US9270204B2 (en) 2013-06-13 2016-02-23 Lawrence Livermore National Security, Llc Technique for enhancing the power output of an electrostatic generator employing parametric resonance
US10110146B2 (en) 2014-09-30 2018-10-23 Lawrence Livermore National Security, Llc Pulse-train drive system for electrostatic generators and motors

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