JP3414467B2 - Electrostatic motor - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic motor driven by a three-phase alternating current using an electrostatic force as a power source.

[0002]

2. Description of the Related Art Conventional electric actuators mainly use electromagnetic force as a driving force source. However, since these actuators have large weights of permanent magnets and electromagnetic coils, they are the most important performance indicators of the actuator. Since the power density is small and requires a large current,
The calorific value was large.

Various electrostatic actuators have been proposed to solve this problem. However, the conventional electrostatic actuator has (a) a stator and a mover,
Since suction force is generated in the meantime, it is practically difficult to operate without a mechanism for reducing the frictional force. (B)
There is a need for a mechanism to maintain the optimum spacing between the stator and mover. However, the advantage of the electrostatic actuator that the weight of the actuator becomes large, the weight can be reduced and a large force can be generated cannot be utilized.

For this reason, Japanese Patent Laid-Open No. 2-285978 has already been used.
As the publication, "an electrostatic actuator using a film" has been proposed. Further, in this type of electrostatic actuator, an electrostatic actuator driven by a three-phase alternating current has been filed as Japanese Patent Application No. 4-225551.
That is, as shown in FIG.
The electrodes 2, 3 and 4 are formed so as to be out of phase, and the electrodes 6, 7 and 8 are also formed so as to be out of phase by 120 ° also on the mover 5, and the three-phase AC power supply 9 to 3 are connected to these electrodes. Phase alternating current is supplied. 10 is a traveling wave generated in the stator 1, 11 is a traveling wave generated in the mover 5,
Reference numeral 2 is a driving force acting on the mover 5.

[0005]

However, in the electrostatic actuator driven by the above-mentioned three-phase alternating current,
When the electrodes for driving the electrodes are arranged, as shown in FIG. 22, for example, in the stator 20, the three electrodes 23, 25, 27 to which a three-phase alternating current is applied are arranged as a set. When forming it, the A-phase electrode 23 that extends upward from the common wiring 21 formed on the back surface of the stator 20 through the through hole 22 and branches in the orthogonal direction
To form.

Next, the B-phase electrode 25 branches from the common wiring 24 on the same plane in a direction orthogonal to each other, and the A-phase electrode 23
It is formed so that it is parallel to. Furthermore, the C-phase electrode 27
Are formed so as to branch from the common wiring 26 on the same plane in a direction orthogonal to each other and to be parallel to the B-phase electrodes 25. Thus, for wiring, only the B-phase electrode 25 and the C-phase electrode 27 can be wired on the same plane,
The formation of electrodes is extremely easy, but as described above, A
Since it is necessary to form the phase electrodes 23, it is necessary to form the common wiring 21 on the back surface and to branch upward in the orthogonal direction through the through holes 22, which increases the number of manufacturing steps. , The thickness of the substrate for forming the stator 20 increases.

The products manufactured in this way are
The above-mentioned laminated electrostatic motor in which the three-phase electrodes are stacked in multiple layers increases in size, which is not preferable. In order to solve such a problem, the present invention has a structure in which a stator element in which electrodes are arranged in an insulator and a mover element arranged between these stator elements are arranged in multiple stages, and a three-phase AC It is possible to provide an electrostatic motor in which electrodes are easily formed in an electrostatic motor to which a voltage is applied, and an insulator on which three-phase electrodes are formed can be thin, lightweight, and compact. To aim.

[0008]

In order to achieve the above object, the present invention provides [I] a stator element in which electrodes are formed in an insulator and electrodes arranged in the insulator, the electrodes being disposed between the stator elements. The mover elements on which the
In a slide type electrostatic motor to which a phase alternating current is applied, (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common electrode on the side facing the common wire. It has a comb-teeth-shaped second electrode that extends in a direction perpendicular to the wiring and has a predetermined distance from the first electrode and is formed in parallel with the first electrode and has a predetermined distance from the second electrode. And a first stator element formed in parallel with each other, in which electrodes of one phase to be formed at a constant pitch are skipped, and a comb-teeth shape extending in a direction perpendicular to the common wiring and formed at a constant pitch. The third electrode extends in a direction perpendicular to the common wiring on the side opposite to the common wiring and is formed in parallel with the third electrode at a predetermined interval and is formed in parallel with the comb-teeth-shaped first electrode. 4 electrodes, parallel to the fourth electrode with a predetermined distance First mover element that is formed and skips the one-phase electrode that should be formed at a constant pitch, and the position of the one-phase electrode that is skipped with respect to the electrode arrangement of the first stator element 1 is skipped with respect to the second stator element formed so as to shift and the electrode arrangement of the first mover element.
A second mover element formed so that the positions of the phase electrodes are shifted, and the reduction of the driving force by skipping the electrodes between the first stator element and the first mover element is performed. Compensation is made between the second stator element and the second mover element so as to obtain a generally uniform driving force.

(B) The comb-teeth-shaped first electrodes extending in the right angle direction from the common wiring and formed at a constant pitch, and the first electrodes extending in the right angle direction from the common wiring opposite to the common wiring.
A second comb-like electrode that is formed in parallel with the electrode and is also formed at a constant pitch.
And a first stator element that is formed in parallel with a predetermined interval and that has a one-phase electrode that should be formed at a constant pitch is skipped, and is formed at a constant pitch that extends in a direction perpendicular to the common wiring. The comb-teeth-shaped third electrode extending from the common wiring on the side opposite to the common wiring in a direction perpendicular to the common wiring.
A fourth electrode having a comb-teeth shape, which is formed in parallel with the electrode of FIG.
Of the first movable element, which is formed in parallel with the electrodes of the first electrode and has a predetermined interval and in which the electrodes of one phase to be formed at a constant pitch are skipped, and the electrode arrangement of the first stator element. A second stator element having an electrode arrangement and an electrode arrangement of the first mover element,
A second mover element formed so that the position of the one-phase electrode to be skipped is shifted, and the driving force by the electrode skip between the first stator element and the first mover element. Is compensated between the second stator element and the second mover element so as to obtain a generally uniform driving force.

[II] A stator element in which electrodes are formed in an insulator and is arranged between the stator elements,
In a slide-type electrostatic motor in which mover elements having electrodes formed in an insulator are arranged in multiple stages and a three-phase alternating current is applied, a comb-teeth shape extending in a right angle direction from a common wire and formed at a constant pitch. The first electrode and a comb-teeth-shaped first electrode extending in a direction perpendicular to the common wiring on the side opposite to the common wiring and formed in parallel with the first electrode at a predetermined interval and formed at the same constant pitch. A first stator element having two electrodes, formed in parallel with the second electrode at a predetermined interval and skipping one-phase electrode to be formed at a constant pitch; A comb-teeth-shaped third electrode extending in the right-angled direction and formed at a constant pitch, and a third electrode extending in the right-angle direction from the common wiring on the side opposite to the common wiring and formed in parallel with the third electrode Comb teeth that are also formed with a constant pitch A first mover element having a fourth electrode, formed in parallel with the fourth electrode at a predetermined interval, and skipping one-phase electrode to be formed at a constant pitch; A second stator element formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first stator element;
Second electrode formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the mover element
A second stator element, the third stator element being formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the second stator element; And a third mover element formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the mover element of FIG. The reduction of the driving force due to the electrode skip between the child elements is compensated between the stator element of the other stage and the movable element of the other stage so that a uniform driving force is obtained.

[III] Stator elements in which electrodes are formed in an insulator and mover elements made of an object having minute conductivity are arranged in multiple stages, and three-phase AC In a slide type electrostatic motor to be applied, (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a right angle from a common wire on a side facing the common wire. A second comb-shaped electrode that extends in the same direction and is formed in parallel with the first electrode and has a predetermined distance, and has a predetermined distance from the second electrode. A first stator element that is formed in parallel and skips one-phase electrodes that should be formed at a constant pitch, and has minute conductivity arranged so as to correspond to the first stator element. First possible consisting of objects It is arranged so as to correspond to the child element and the first mover element, and is formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first stator element. A second stator element, (d)
A second mover element, which is arranged so as to correspond to the second stator element and is made of an object having minute conductivity, and an electrode between the first stator element and the first mover element. The reduction of the driving force due to the skip is compensated between the second stator element and the second movable element so as to obtain an even driving force as a whole.

(B) A first stator element formed of an object having a minute conductivity, and extending in a direction perpendicular to the common wiring and formed at a constant pitch so as to correspond to the first stator element. The comb-shaped first electrode extends from the common wiring on the side opposite to the common wiring in a direction perpendicular to the first wiring.
A second comb-like electrode that is formed in parallel with the electrode and is also formed at a constant pitch.
And a first mover element that is formed in parallel with the electrode of FIG. 1 and has a predetermined interval and skips one-phase electrodes that should be formed at a constant pitch, and is arranged so as to correspond to the first mover element. Second stator element made of an object having a minute conductivity, and comb teeth arranged so as to correspond to the second stator element, extending in a direction perpendicular to the common wiring and formed at a constant pitch. -Shaped first electrode and a comb-teeth shape that is formed in parallel with the first electrode and extends in a direction perpendicular to the common wiring on the side opposite to the common wiring and has a predetermined interval and is parallel to the first electrode. A second mover element that has a second electrode, is formed in parallel with the second electrode at a predetermined distance, and skips one-phase electrode that should be formed at a constant pitch. First stator element and first mover The reduction of the driving force by skipping electrodes between Remento second stator element and the second
In this case, compensation is made between the mover elements to obtain an even driving force as a whole.

[IV] A stator element having electrodes formed in the insulator and a mover element having electrodes formed in the insulator arranged between the stator elements are arranged in multiple stages, and a three-phase alternating current is applied. (A) Radial first electrodes formed at a constant pitch extending in the radial direction from the common wiring formed on the outer peripheral portion, and the common wiring formed on the inner peripheral portion A radial second electrode extending in the radial direction from the first electrode in combination with the first electrode, the radial second electrode being also formed at a constant pitch, and should be formed at a constant pitch adjacent to the second electrode. The first stator element in which the phase electrodes are skipped, the radial third electrodes formed at a constant pitch extending in the radial direction from the common wiring formed in the outer peripheral portion, and formed in the inner peripheral portion. Radial direction from common wiring A radial fourth electrode that extends in combination with the first electrode and is also formed at a constant pitch is provided, and one phase of one phase to be formed adjacent to the radial fourth electrode at a constant pitch is provided. A first mover element whose electrodes are skipped, and a second stator element formed so that the positions of the skipped one-phase electrodes are shifted with respect to the electrode arrangement of the first stator element. And 1 skipped with respect to the electrode arrangement of the first mover element
A second stator element formed so that the positions of the phase electrodes are shifted, and the reduction of the driving force by skipping the electrodes between the first stator element and the first mover element is performed. Compensation is made between the second stator element and the second mover element so as to obtain a generally uniform driving force.

(B) The radial first electrodes are formed at a constant pitch and extend radially from the common wiring formed on the outer peripheral portion, and the radial first electrodes extend radially from the common wiring formed on the inner peripheral portion. It has a radial second electrode that is also formed with a constant pitch in combination with the first electrode, and skips one-phase electrodes that are adjacent to the second electrode and that should be formed with a constant pitch. The first stator element, the radial third electrodes extending at a constant pitch from the common wire formed on the outer peripheral portion in the radial direction, and the radial third electrodes extending from the common wire formed at the inner peripheral portion in the radial direction. And a radial fourth electrode that is also formed at a constant pitch in combination with the first electrode, and skips the one-phase electrode that is adjacent to the fourth electrode and that should be formed at a constant pitch. A first mover element, and The electrode arrangement of a stator element, and a second stator element position of one phase of electrodes to be skipped is formed so as to shift the first
A second movable element in the form of a disk on which an electrode is formed similarly to that of the first movable element, and the driving force by the skip of the electrode between the first stator element and the first movable element is provided. The reduction is compensated between the second stator element and the second mover element so as to obtain a generally uniform driving force.

[V] a stator element in which electrodes are formed in an insulator and arranged between the stator elements;
In a rotary electrostatic motor to which three-phase alternating current is applied, in which mover elements made of an object having minute conductivity are arranged in multiple stages, a fixed pitch extending in a radial direction from a common wire formed on the outer periphery is provided. A radial first electrode that is formed and a radial second electrode that extends radially from the common wiring formed on the inner peripheral portion and is combined with the first electrode and that is also formed at a constant pitch are formed. A first stator element having a first-phase electrode that is adjacent to the second electrode and should be formed at a constant pitch and is skipped; and is arranged so as to correspond to the first stator element. A disk-shaped first mover element made of an object having a minute conductivity, and arranged so as to correspond to the first mover element, and the electrode arrangement of the first stator element,
A circle composed of a second stator element formed so that the positions of the skipped one-phase electrodes are shifted, and a minute electrically conductive object arranged so as to correspond to the second stator element. A plate-shaped second mover element is provided, and reduction of driving force due to electrode skipping between the first stator element and the first mover element is reduced by the second stator element and the second mover element. Compensation is made between the mover elements so as to obtain a generally uniform driving force.

[VI] A stator element made of an object having a minute conductivity and a plurality of mover elements arranged between the stator elements and having electrodes formed in an insulator are arranged in multiple stages, and a three-phase alternating current is generated. In a rotary electrostatic motor to be applied, a disk-shaped first stator element having minute conductivity and common wiring formed on an outer peripheral portion so as to correspond to the first stator element From the common wiring formed on the inner peripheral portion in the radial direction, and the first electrodes radially formed at a constant pitch, and extending in the radial direction from the first electrode, and also formed at the constant pitch. First mover element having a radial second electrode and skipping one phase electrode adjacent to the second electrode and having a constant pitch, and the first mover. Corresponds to the element A second disk-shaped stator element made of an object having minute conductivity and arranged so as to correspond to the second stator element, and the electrode of the first mover element. For placement,
A disc-shaped second mover element formed so that the position of the skipped one-phase electrode is shifted, and the electrode between the first stator element and the first mover element is provided. The reduction of the driving force due to the skip is compensated between the second stator element and the second movable element so as to obtain an even driving force as a whole.

[VII] Stator elements having electrodes formed in the insulator and mover elements having electrodes formed in the insulator are arranged in multiple stages, and three-phase alternating current is applied. In the slide type electrostatic motor, a comb-teeth-shaped first electrode extending in a right angle direction from the common wiring and formed at a constant pitch, and a common electrode on a side opposite to the common wiring extending in the right angle direction. It has a comb-teeth-shaped second electrode that is also formed in parallel with the first electrode and has a predetermined spacing, and is formed in parallel with the second electrode that has a predetermined spacing. A first stator element having a comb-teeth-shaped third electrode that is also formed at a constant pitch, and a comb-teeth-shaped fourth electrode that extends in a direction perpendicular to the common wiring and is formed at a constant pitch. , On the side facing the common wiring The fourth extending perpendicularly from the wiring
A fifth electrode having a comb-teeth shape which is formed in parallel with the electrode at a predetermined interval and is also formed at a constant pitch.
And a first mover element that is formed in parallel with the electrode of FIG. 1 at a predetermined interval and skips the one-phase electrode that should be formed at a constant pitch, and the electrode is formed similarly to the first stator element. A second stator element and a second mover element formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first mover element. , Compensating the reduction of the driving force due to the electrode skip between the first stator element and the first movable element between the second stator element and the second movable element, This is to obtain an even driving force.

[VIII] Stator elements made of a substance having a minute conductivity and mover elements arranged between the stator elements and having electrodes formed in an insulator are arranged in multiple stages, and a three-phase alternating current is generated. In the applied rotary electrostatic motor, the radial first electrodes formed at a constant pitch and extending in the radial direction from the common wiring formed on the outer peripheral portion and the radial first electrode formed on the inner peripheral portion A second radial electrode that extends in the same direction and is combined with the first electrode and is also formed at a constant pitch, and is formed in parallel with the second electrode at a predetermined interval and is formed at a constant pitch. A first stator element in which one-phase electrodes to be formed are skipped, radial fourth electrodes formed at a constant pitch and extending in a radial direction from a common wiring formed in an outer peripheral portion, and an inner peripheral portion Formed in The first wire extends from the through wire in the radial direction.
Disc-shaped first mover having a radial fifth electrode which is also formed at a constant pitch in combination with the first electrode and is formed so that the position of the skipped one-phase electrode is shifted. An element, a disk-shaped second stator element in which electrodes are formed similarly to the first stator element, and an electrode arrangement of the first mover element,
A disc-shaped second mover element formed so that the position of the skipped one-phase electrode is shifted, and the electrode between the first stator element and the first mover element is provided. The reduction of the driving force due to the skip is compensated between the second stator element and the second movable element so as to obtain an even driving force as a whole.

[0019]

According to the present invention, as described above, the stator elements in which electrodes are formed in the insulator and the mover elements in which electrodes are formed in the insulator are arranged in multiple stages. In the electrostatic motor to be arranged and to which the three-phase alternating current is applied, at least one of the stator element and the mover element is arranged in two phases, so that the electrodes can be easily formed.

Further, the reduction of the driving force due to the skipping of the electrodes is constituted so as to be compensated between the respective stator elements and the movable element, so that it is possible to obtain an even driving force as a whole.

[0021]

Embodiments of the present invention will now be described in detail with reference to the drawings. 1 is a sectional view of a slide type electrostatic motor showing a first embodiment of the present invention, FIG. 2 is a plan view showing an electrode arrangement of a stator of the electrostatic motor, and FIG. 3 is a diagram showing the stator of FIG. FIG. 4 is a plan view showing the arrangement of the electrodes and the electrodes of the mover, FIG. 4 is a sectional view showing a modification of the first electrode arrangement of the slide type electrostatic motor showing the first embodiment of the present invention, and FIG. Sectional drawing which shows the modification of the 2nd electrode arrangement | positioning of the slide type electrostatic motor which shows the 1st Example of this invention, FIG. 6: is the slide type electrostatic motor which shows the 1st Example of this invention. 3 is a sectional view showing a modification of the electrode arrangement of FIG. 3, FIG. 7 is a sectional view showing a modification of the fourth electrode arrangement of the slide type electrostatic motor showing the first embodiment of the present invention, and FIG. FIG. 9 is a cross-sectional view of a process of forming electrodes of a slide-type electrostatic motor showing the first embodiment of the present invention. It is a perspective view of an electrostatic motor of de type. In addition, in FIG. 1, A of FIG. 2 and FIG.
-A line cross section is shown.

In the figure, the first stator element 31
[See FIG. 3 (b)] FIG. 3B is a view showing a comb-shaped A-phase electrode 33, which is made of an insulator and has a constant pitch and extends at a right angle from the common wiring 32 on the opposite side of the common wiring 32. Comb-shaped B-phase electrodes 35 that are formed in parallel with the A-phase electrodes 33 and extend in a right angle direction from the common line 34 at a predetermined interval and that are also formed at a constant pitch. The electrodes are formed in parallel with the B-phase electrodes 35 at a predetermined distance, and the C-phase electrodes to be formed at a constant pitch are skipped.

The first mover element 41 [see FIG.
[See (a) plan view]] is also made of an insulator, and the common wiring 42
From the common wiring 42 to the comb-shaped A-phase electrodes 43 extending in a right angle direction from the same plane and formed at a constant pitch.
From the common wiring 44 on the opposite side, extending in the same plane at a right angle and formed in parallel with the A-phase electrodes 43 at a predetermined interval and having a comb-tooth shape B formed at a constant pitch.
The phase-phase electrode 45 is formed in parallel with the phase-B electrode at a predetermined interval, and the phase-C electrode to be formed at a constant pitch is skipped.

Further, the second stator element 36 is formed such that the positions of the skipped B-phase electrodes are displaced to the left by a predetermined distance from the electrode arrangement of the first stator element 31. . Further, the second mover element 46 is formed such that the positions of the skipped A-phase electrodes are displaced leftward by a predetermined distance from the electrode arrangement of the first mover element 41.

Therefore, the first stator element 31
The C-phase electrode of the second stator element 36 is opposed to the position where the electrode is skipped in, and the reduction of the driving force is covered. By sequentially stacking the stator element and the mover element having the electrode arrangement thus configured above, a slide-type electrostatic motor in which the driving force is compensated can be configured.

Next, a modified example of the first electrode arrangement of the slide type electrostatic motor showing the first embodiment of the present invention will be described. In this example, as shown in FIG.
Stator element 31 and first mover element 41 of
The second stator element 36 and the second stator element 36 are similarly configured, but the second mover element 51 is configured so that the skip position of its electrode is displaced to the left by a predetermined distance with respect to the first mover element 41. Has been done. Furthermore, the third stator element 61 is configured to be displaced from the second stator element 36 by a predetermined distance in the left direction. Further, the third mover element 56 is also configured to be displaced to the left by a predetermined distance from the second mover element 51.

As described above, the electrode arrangements in which the three-stage stator elements and the mover elements are combined are arranged so as to be shifted. In addition, above the third mover element 56, the above-mentioned first stator element 31 and first mover element 41 are correspondingly sequentially laminated.

Next, a modified example of the second electrode arrangement of the slide type electrostatic motor showing the first embodiment of the present invention will be described. In this example, as shown in FIG. 5, an A-phase electrode and a B-phase electrode are formed in the first stator element 62-1 and the C phase is skipped. A first mover element 63-1 corresponds thereto, and a B-phase electrode and a C-phase electrode are formed on the second stator element 62-2 thereon, and an arrangement in which the A phase is skipped. Has become. The second mover element 63-2 corresponds thereto.

In addition, the third stator element 6 above it
In 2-3, a C-phase electrode and an A-phase electrode are formed, and the B-phase is skipped. A third mover element 63-3 corresponds to it. That is, each of the stator elements 62-1, 62-2, and 62-3 has an arrangement in which one-phase electrode is skipped and the skip position of the electrode is shifted to the left by a predetermined interval. The mover elements 63-1, 63-2, 6
In No. 3-3, each one-phase electrode is skipped, and the skip position of the electrode is shifted leftward by a predetermined distance.

Further, above the third mover element 63-3, the above-mentioned first stator element 62-1 and the first mover element 63-1 are arranged so as to be sequentially laminated. Has become. Next, a modified example of the third electrode arrangement of the slide-type electrostatic motor showing the first embodiment of the present invention will be described.

In this example, as shown in FIG. 6, the above-mentioned first stator element 31 is arranged, and the first mover element 51 is arranged thereon. A C-phase electrode 53 and an A-phase electrode 55 are arranged in the first mover element 51, and the B-phase electrode is skipped. The first stator element 31 is provided on the first mover element 51.
A second stator element 31 'having the same electrode arrangement as that of is arranged. On this second stator element 31 ', the first
With respect to the electrode arrangement of the mover element 51, the second element 56 is arranged so that the skip position of the electrode is shifted rightward by a predetermined distance.

Further, the first stator element 31 and the first mover element 51 are sequentially laminated on the second mover element 56 in correspondence with each other. Next, a modified example of the fourth electrode arrangement of the slide type electrostatic motor showing the first embodiment of the present invention will be described.
In this example, as shown in FIG. 7, the first stator element 31 and the first mover element 51 described above are arranged. On the first mover element 51, the second fixed element 61 is arranged so that the electrode skip position is shifted to the right by a predetermined distance with respect to the electrode arrangement of the first stator element 31. Is configured. A second mover element 51 ′ having an electrode arrangement similar to that of the first mover element 51 is arranged on the second stator element 61.

On the second mover element 51 ', the first stator element 31 and the first mover element 51 are sequentially laminated so as to correspond to each other. Next, a method of forming electrodes on the above-mentioned insulator will be described. First, as shown in FIG.
An insulating base (for example, glass epoxy resin) 71 on which two layers are stacked is prepared.

Next, as shown in FIG. 8B, the metal body 72 on the insulating base 71 is etched to form an electrode 73.
To form. Next, as shown in FIG. 8C, the surface is planarized with an insulating layer (for example, epoxy resin) 74,
An insulating layer (eg, epoxy resin) 75 is formed thereon. By arranging the electrodes as shown in FIGS. 1 and 4 to 7, the electrodes can be easily formed, and the insulator on which the electrodes are formed can be made thin.

Further, in driving the mover element, as described above, the electrode is skipped by shifting the arrangement of the electrodes facing each other at the position where the electrodes are skipped in the multi-layer type. Nevertheless, it is possible to obtain a uniform driving force without reducing the overall driving force of the mover. Next, a slide type electrostatic motor to which this embodiment is applied will be described with reference to FIG.

This multistage slide type electrostatic motor 78
Is provided with a stator 80, which is composed of a plurality of stages of stator elements 81, and these stator elements 81 are integrated by a connecting body 82. The electrodes of the stator element 81 are arranged as described above,
A 3-phase AC voltage is applied from a 3-phase AC power supply (not shown). For example, by providing a container 83 on the rear surface of the connecting body 82,
You may make it incorporate a 3-phase alternating current power supply.

On the other hand, 90 is a mover, which is composed of a plurality of stages of mover elements 91, and these mover elements 91 are integrated by a connecting body 92. The electrode arrangement as described above is performed on the electrodes of the mover element 91.
A three-phase AC voltage is applied from a phase AC power supply (not shown). For example, by providing a container 93 on the rear surface of the connecting body 92,
You may make it incorporate a phase alternating current power supply.

Next, a second embodiment of the present invention will be described. FIG. 10 is a sectional view of a slide type electrostatic motor showing a second embodiment of the present invention, and FIG. 11 is a plan view showing an electrode arrangement of a stator of the electrostatic motor. Also in this embodiment, the formation of the electrodes arranged only on the stator is the same as in the first embodiment.

In FIG. 10, the first stator element 101 is made of an insulator and has an A-phase electrode 103 and a B-phase electrode 105 arranged in parallel with the A-phase electrode 103, and is adjacent to the B-phase electrode 105. The C-phase electrode is skipped, and such electrode arrangement is sequentially arranged. In addition, the first mover element 111 is made of a minute electrically conductive object on which no electrode is formed. The second stator element 121 is arranged above the first mover element 111, and the electrode arrangement of the first stator element 101 is displaced leftward by a predetermined distance. That is, the skip portion of the electrode is arranged so as to be displaced to the left by a predetermined distance from the skip portion of the electrode of the first stator element 101.

A second mover element 111 'is arranged on the second stator element 121. In addition, 123 is C of the 2nd stator element 121.
The phase electrode, 125 is the A phase electrode. Also, FIG.
In No. 1, reference numeral 102 is an A-phase common wiring of the first stator element 101, and 104 is a B-phase common wiring thereof.

With such an electrode arrangement, the portions where the electrodes are skipped are displaced by shifting the arrangement of the electrodes facing each other, and the electrodes are skipped, but the overall movement of the movable element is driven. The force never decreases.
Further, the electrode arrangement can be modified as shown below. (1) As shown in FIG. 12, the first stator element 1
01-1 is made of an insulator and has an A-phase electrode and a B-phase electrode arranged in parallel with the A-phase electrode. The C-phase electrode adjacent to the B-phase electrode is skipped. The arrangements are arranged sequentially. In addition, the first mover element 111-1 is made of a minute electrically conductive object on which no electrode is formed. This first mover element 111-
The second stator element 101-2 is arranged above the first stator element 101-2, and the electrode arrangement of the second stator element 101-2 is a predetermined distance from the electrode arrangement of the first stator element 101-1. It is shifted to the right. That is, the electrode skip portion of the second stator element 101-2 is arranged so as to be displaced to the right by a predetermined distance from the electrode skip portion of the first stator element 101-1.

A second mover element 111-2 is arranged on the second stator element 101-2. The first stator element 101-1 and the first stator element 101-1 described above are provided above the second mover element 111-2.
The mover elements 111-1 are sequentially repeated and stacked to be arranged in multiple stages. (2) As shown in FIG. 13, the first stator element 1
The reference numeral 31-1 is made of an object having a minute conductivity on which no electrode is formed. On top of that, the first mover element 141
Place -1. This first mover element 141-
At 1, a three-phase electrode in which one phase is skipped is arranged.
On the first mover element 141-1, the second stator element 131-2 made of an object having a minute conductivity in which no electrode is formed is arranged. On this second stator element 131-2, one phase is skipped 3
Second mover element 141-2 on which phase electrode is formed
Are placed. This second mover element 141-2
The electrode arrangement of No. 1 is configured so as to be displaced from the electrode arrangement of the first mover element 141-1 by a predetermined distance in the left direction.

On the second mover element 141-2, there is arranged the third stator element 131-3, which is an object having a minute conductivity and has no electrodes formed thereon. The third mover element 141-3 is arranged on the third stator element 131-3. The electrode arrangement of the third mover element 141-3 is configured to be further displaced to the left by a predetermined distance from the electrode arrangement of the second mover element 141-2. On the third mover element 141-3, the first stator element 131-1 and the first mover element 141 described above are provided.
-1 is stacked and sequentially repeated to be arranged in multiple stages.

Next, a third embodiment of the present invention will be described with reference to FIG.
4 to 17 will be described. FIG. 14 is a partially cutaway perspective view of a rotary electrostatic motor showing a third embodiment of the present invention.
5 is a plan view of the first stator element, FIG. 16 is a plan view of the second stator element, and FIG. 17 is a partially cutaway perspective view showing a modification of the rotary electrostatic motor.

As shown in FIG. 14, there are provided a mover made up of a plurality of multi-staged stators having electrodes formed in an insulator and a minute electrically conductive object made of an insulator placed between them. The rotary electrostatic motor 200 has a disk-shaped first stator element 201. This first
As shown in FIG. 15, the stator element 201 of FIG. 15 has radial B-phase electrodes 204 arranged at a constant pitch in a radial direction from a substantially circumferential B-phase common wiring 203 formed on an outer peripheral portion. And radial A-phase electrodes 207 that are also formed at a constant pitch in the radial direction from the ring-shaped common wiring 206 of the A-phase formed on the inner peripheral portion facing each other. The electrode 207 and the adjacent radial B-phase electrode 204 are arranged so as to be skipped by a predetermined distance.

Reference numeral 202 is a connection wiring to the B-phase common wiring 203, and 205 is a connection wiring to the A-phase common wiring 206. Corresponding to the first stator element 201, the rotatable first movable element 301, which is composed of a disc-shaped minute conductive object in which electrodes having the same axis 208 are not formed, corresponds to the first stator element 201. Is located in.
Further, a disk-shaped second stator element 4 is provided above it.
01 is arranged with the axis 208 in common. The second stator element 401 has a first stator element 401, as shown in FIG.
An electrode similar to that of the first stator element 201 described above is arranged such that the electrode skip position is advanced by a predetermined angle (θ degrees) in the counterclockwise direction with respect to the stator element 201.

That is, in FIG. 16, 403 is a substantially circular B-phase common wiring formed on the outer peripheral portion, and 404 is a radial wiring formed from the B-phase common wiring 403 at a constant pitch in the radial direction. A B-phase electrode, 406 is a ring-shaped A-phase common wiring formed on the inner peripheral portion, and 407 is a radial A-phase electrode formed at a constant pitch in the radial direction from this A-phase common wiring 406. Yes, the radial A-phase electrode 40
7 and the adjacent radial B-phase electrodes 404 are skipped by a predetermined distance. In addition,
Reference numeral 402 is a connection wiring to the B-phase common wiring 403, and 405 is a connection wiring to the A-phase common wiring 406.

That is, the radial direction CD in FIG. 15 and FIG.
The electrodes of the stator element and the mover element in the cross section of the line can be arranged, for example, as shown in FIGS. Further, the above-mentioned stator element may be an object having no electrodes and having minute conductivity, and one-phase electrodes may be skipped in the mover element, and the skip portions may be displaced. In that case, the electrodes of the stator element and the mover element can be arranged as shown in FIG. 13, for example.

As shown in FIG. 17, the rotary electrostatic motor 450 of this embodiment has a B-phase electrode 451b extending in the radial direction from a substantially circumferential common wiring 451a formed on the outer peripheral portion. , An A-phase electrode 451d extending in the radial direction from a ring-shaped common wiring 451c formed on the inner peripheral portion, and C
First stator element 45 with phase electrodes skipped
1 and a shaft 458 on the first stator element 451.
Similarly, the first movable element 452 arranged to skip the one-phase electrode and the first movable element
Second stator element 453 in which the one-phase electrode formed on the movable element 452 is skipped, and the second movable element in which the one-phase electrode is skipped on the second stator element 453. 454 is arranged. Here, the stator element, the mover element, and their electrode arrangement can be provided, for example, as shown in FIGS. 1 and 4 to 7 described above.

Next, the electrode arrangement of the slide type electrostatic motor showing the fourth embodiment of the present invention will be described with reference to FIGS.
Will be explained. In this embodiment, three-phase electrodes are normally arranged on the stator element without skips, and one electrode is skipped on the mover element. That is, for example, as shown in FIG. 18, the first stator element 501-1 has a regular three-phase electrode, that is, an A phase,
The B-phase and C-phase electrodes are formed at a fixed pitch, and the first mover element 601-1 is arranged thereon. This first
An electrode in which one phase is skipped is formed on the mover element 601-1. The first mover element 601
On -1, a second stator element 501-2 having regular three-phase electrodes formed at a fixed pitch is arranged. The second mover element 601-2 is arranged on the second stator element 501-2. The electrode arrangement of the second mover element 601-2 is displaced to the left by a predetermined distance from the electrode arrangement of the first mover element 601-1. The second mover element 601-
The first stator element 501-1 and the first mover element 601-1 are arranged on the second unit 2, and thereafter, they are repeatedly stacked in sequence.

The electrode arrangement of the stator element and the electrode arrangement of the mover element in the fourth embodiment may be reversed. That is, as shown in FIG.
The first stator element 701-1 includes B-phase electrodes and C-phase electrodes, and is configured so that the A-phase electrodes are skipped. On the first stator element 701-1, a first mover element 80 in which regular three-phase electrodes, that is, A-phase, B-phase, and C-phase electrodes are formed at a constant pitch
Place 1-1. This first mover element 801
A second stator element 7 in which an electrode composed of an A-phase electrode and a B-phase electrode in which one phase is skipped is formed on -1.
01-2 is arranged, and its skip position is arranged so as to be displaced from the first stator element 701-1 by a predetermined distance in the left direction. Further, the second stator element 70
On the 1-2, a regular three-phase electrode, that is, A phase, B phase, C
A second mover element 801-2 having phase electrodes formed at a fixed pitch is arranged. The first stator element 701-1 and the first mover element 801-1 described above are arranged thereon, and they are sequentially laminated as described above.

In this embodiment, since the mover element is a three-phase electrode without skip (see FIG. 22), the electrode formation in that portion cannot be improved, but the electrode formation in the mover element is not improved. Can be improved, so that it is possible to exert a certain effect. Next, a rotary electrostatic motor according to a fifth embodiment of the present invention will be described.

As shown in FIG. 20, the rotary electrostatic motor 900 of this embodiment has a first stator element 901.
Has a normal three-phase electrode consisting of A phase, B phase, and C phase, and a first mover element 902 having two electrodes with one phase skipped on it has a shaft 908 as well. It is arranged and consists of the regular A phase, B phase, and C phase on it 3
A second stator element 903 in which a phase electrode is formed is arranged, and a second mover element 904 having two electrodes in which one phase is skipped is arranged thereon.

Here, the electrode arrangement of the first stator element 901 will be described. For example, as shown in FIG. 20, a phase A phase extending in the radial direction from a ring-shaped common wiring 901a formed in the inner peripheral portion is shown. An electrode 901b, a B-phase electrode 901d extending in the radial direction from a substantially circumferential common wiring 901c formed on the outer periphery, and a C-phase electrode 901e arranged adjacent to the B-phase electrode 901d. .

The arrangement of the stator element and the mover element and their electrodes can be performed, for example, as shown in FIGS. In this embodiment, since the stator element is a three-phase electrode without skip (see FIG. 22), the electrode formation in that portion cannot be improved, but the electrode formation in the mover element can be improved. Therefore, a certain effect can be achieved.

The present invention is not limited to the above embodiments, and various modifications can be made within the scope of the present invention, and these modifications are not excluded from the scope of the present invention.

[0057]

As described in detail above, according to the present invention, the following effects can be obtained. (1) In an electrostatic motor to which a stator element and mover elements arranged between the stator elements are arranged in multiple stages and a three-phase alternating current is applied, electrodes can be easily formed and a three-phase electrode is also used. It is possible to obtain a compact electrostatic motor by reducing the thickness of the insulator in which is formed and making it lightweight.

(2) Driving the electrode skipped portion by shifting the position where the electrode of the stator element or the movable element is skipped, by shifting the skip position of the electrode of the stator element or the movable element of another stage. By compensating for the reduction in force, an even driving force can be obtained overall.

[Brief description of drawings]

FIG. 1 is a sectional view of a slide type electrostatic motor showing a first embodiment of the present invention.

FIG. 2 is a plan view showing an electrode arrangement of a stator of a slide type electrostatic motor showing a first embodiment of the present invention.

3 is a plan view showing an arrangement of electrodes of a stator and electrodes of a mover in FIG. 1. FIG.

FIG. 4 is a cross-sectional view showing a modified example of the first electrode arrangement of the slide-type electrostatic motor showing the first embodiment of the present invention.

FIG. 5 is a cross-sectional view showing a modified example of the second electrode arrangement of the slide-type electrostatic motor showing the first embodiment of the present invention.

FIG. 6 is a sectional view showing a modified example of the third electrode arrangement of the slide type electrostatic motor showing the first embodiment of the invention.

FIG. 7 is a sectional view showing a modification of the fourth electrode arrangement of the slide type electrostatic motor showing the first embodiment of the invention.

FIG. 8 is a sectional view of a process of forming electrodes of the slide-type electrostatic motor according to the first embodiment of the present invention.

FIG. 9 is a perspective view of a slide-type electrostatic motor to which the first embodiment of the present invention is applied.

FIG. 10 is a sectional view of a slide-type electrostatic motor showing a second embodiment of the present invention.

FIG. 11 is a plan view showing an electrode arrangement of a stator of a slide type electrostatic motor showing a second embodiment of the present invention.

FIG. 12 is a sectional view showing a modification of the first electrode arrangement of the slide type electrostatic motor showing the second embodiment of the present invention.

FIG. 13 is a sectional view showing a modification of the second electrode arrangement of the slide type electrostatic motor showing the second embodiment of the present invention.

FIG. 14 is a partially cutaway perspective view of a rotary electrostatic motor showing a third embodiment of the present invention.

FIG. 15 is a plan view of a first stator element of a rotary electrostatic motor showing a third embodiment of the present invention.

FIG. 16 is a plan view of a second stator element of a rotary electrostatic motor showing a third embodiment of the present invention.

FIG. 17 is a partially cutaway perspective view showing a modification of the rotary electrostatic motor showing the third embodiment of the present invention.

FIG. 18 is a sectional view showing an electrode arrangement of a slide-type electrostatic motor showing a fourth embodiment of the present invention.

FIG. 19 is a cross-sectional view showing a modification of the electrode arrangement of the slide-type electrostatic motor showing the fourth embodiment of the present invention.

FIG. 20 is a sectional view of a rotary electrostatic motor according to a fifth embodiment of the present invention.

FIG. 21 is a configuration diagram of an electrostatic actuator showing a prior art.

FIG. 22 is a plan view of electrode wiring of an electrostatic motor showing prior art.

[Explanation of symbols]

31, 62-1, 101, 101-1, 131-1, 2
01,451,501-1,701-1,901 First stator element 31 ', 36, 62-2, 121, 101-2, 131
-2, 401, 453, 501-2, 701-2, 90
3 Second stator elements 32, 34, 42, 44, 102, 104, 203, 2
06,403,406,451a, 451c, 901
a, 901c common wiring 33, 43, 55, 103, 125, 207, 407,
451d, 901b A-phase electrodes 35, 45, 105, 204, 404, 451b, 90
1d B-phase electrodes 41, 63-1, 111, 111-1, 141-1, 3
01, 452, 601-1, 801-1, 902 First movable element 46, 51, 51 ', 63-2, 111', 111-
2,141-2,454,601-2,801-2,9
04 second mover element 53, 123, 901e C-phase electrodes 61, 62-3, 131-3 Third stator element 56, 63-3, 141-3 Third mover element 71 Insulation base 72 Metal body 73 Electrodes 74, 75 Insulation layer 78 Sliding type electrostatic motor 80 Stator 81 Stator element 82, 92 Coupled body 83, 93 Container 90 Mover 91 Mover element 91 200 Rotation type electrostatic motor 202, 205 , 402, 405 connection wiring 208, 458, 908 axis

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-3-270682 (JP, A) JP-A-4-271284 (JP, A) JP-A 64-74071 (JP, A) JP-A-4- 281371 (JP, A) JP 4-340372 (JP, A) JP 2-311186 (JP, A) JP 5-260767 (JP, A) JP 5-184162 (JP, A) JP-A-2-285978 (JP, A) JP-A-6-78566 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H02N 1/00 H02N 11/00

Claims (11)

(57) [Claims] 1. A stator element in which electrodes are formed in an insulator and a mover element in which electrodes are formed in the insulator are arranged in multiple stages, and three-phase alternating current is applied. In a slide type electrostatic motor according to the present invention, (a) a comb-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. It has a second comb-teeth-shaped electrode that extends in parallel with the first electrode and has a predetermined interval and is also formed at a constant pitch, and has a predetermined interval and is parallel to the second electrode. A first stator element that is formed and skips one-phase electrodes that should be formed at a constant pitch; and (b) a comb-teeth-shaped third electrode that extends in a direction perpendicular to the common wiring and is formed at a constant pitch. Of the electrode of the side opposite to the common wiring It has a comb-teeth-shaped fourth electrode that extends in a direction perpendicular to the common wiring and is formed in parallel with the third electrode at a predetermined interval and is also formed at a constant pitch. A first mover element that is formed in parallel with a space and skips one-phase electrodes that should be formed at a constant pitch; and (c) electrode arrangement of the first stator element, A second stator element formed so that the position of the skipped one-phase electrode is shifted; and (d) an electrode arrangement of the skipped one-phase electrode with respect to the electrode arrangement of the first mover element. A second mover element formed to shift in position,
(E) Compensation for a reduction in driving force due to electrode skipping between the first stator element and the first mover element between the second stator element and the second mover element, An electrostatic motor characterized by obtaining a uniform driving force. 2. A stator element in which electrodes are formed in an insulator and a mover element in which electrodes are formed in the insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a slide type electrostatic motor according to the present invention, (a) a comb-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. It has a second comb-teeth-shaped electrode that extends in parallel with the first electrode and has a predetermined interval and is also formed at a constant pitch, and has a predetermined interval and is parallel to the second electrode. A first stator element that is formed and skips one-phase electrodes that should be formed at a constant pitch; and (b) a comb-teeth-shaped third electrode that extends in a direction perpendicular to the common wiring and is formed at a constant pitch. Of the electrode of the side opposite to the common wiring It has a comb-teeth-shaped fourth electrode that extends in a direction perpendicular to the common wiring and is formed in parallel with the third electrode at a predetermined interval and is also formed at a constant pitch. A first mover element that is formed in parallel with a space and skips one-phase electrodes that should be formed at a constant pitch; and (c) electrode arrangement of the first stator element, A second stator element formed so that the position of the skipped one-phase electrode is shifted; and (d) an electrode arrangement of the skipped one-phase electrode with respect to the electrode arrangement of the first mover element. A second mover element formed to shift in position,
(E) a third stator element formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the second stator element, and (f) the second movable element. A third mover element formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the child element, and (g) the stator element of each stage and each stage Electrostatically characterized in that a reduction in driving force due to electrode skipping between the mover elements is compensated between the stator element in the other stage and the mover element in the other stage to obtain an even drive force overall. motor. 3. A stator element in which electrodes are formed in an insulator and a mover element in which electrodes are formed in the insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a slide type electrostatic motor according to the present invention, (a) a comb-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. It has a second comb-teeth-shaped electrode that extends in parallel with the first electrode and has a predetermined interval and is also formed at a constant pitch, and has a predetermined interval and is parallel to the second electrode. A first stator element that is formed and skips one-phase electrodes that should be formed at a constant pitch; and (b) a comb-teeth-shaped third electrode that extends in a direction perpendicular to the common wiring and is formed at a constant pitch. Of the electrode of the side opposite to the common wiring It has a comb-teeth-shaped fourth electrode that extends in a direction perpendicular to the common wiring and is formed in parallel with the third electrode at a predetermined interval and is also formed at a constant pitch. A first mover element that is formed in parallel with a space and skips one-phase electrodes that should be formed at a constant pitch; and (c) an electrode similar to the electrode arrangement of the first stator element. A second stator element having an arrangement, and (d) a second mover formed so that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first mover element. And (e) reducing the driving force by skipping electrodes between the first stator element and the first mover element between the second stator element and the second mover element. Compensate and drive force evenly overall An electrostatic motor, characterized in that to obtain. 4. A stator element in which electrodes are formed in an insulator, and a plurality of mover elements, which are arranged between the stator elements and are made of a substance having minute conductivity, are arranged in multiple stages, and a three-phase alternating current is applied. (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. Extending in parallel with the first electrode at a predetermined interval and in parallel with the first electrode, and having a comb-teeth-shaped second electrode formed at a constant pitch and parallel to the second electrode at a predetermined interval. A first stator element formed on the first electrode and skipping a one-phase electrode to be formed at a constant pitch; and (b) a minute conductive element arranged so as to correspond to the first stator element. First movable consisting of an object having A child element, and (c) is arranged so as to correspond to the first mover element, and the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first stator element. A second stator element to be formed; (d) a second mover element made of an object having a minute conductivity and arranged so as to correspond to the second stator element; and (e) the above The reduction of the driving force due to the electrode skipping between the first stator element and the first mover element is compensated for between the second stator element and the second mover element, so that a uniform total is achieved. An electrostatic motor characterized by obtaining driving force. 5. A stator element composed of an object having a minute conductivity and a plurality of mover elements arranged between the stator elements and having electrodes formed in an insulator are arranged in multiple stages, and a three-phase alternating current is applied. In the slide type electrostatic motor described above, (a) a first stator element made of an object having minute conductivity, and (b) a right angle from a common wiring so as to correspond to the first stator element. A comb-shaped first electrode extending in a predetermined direction and formed at a constant pitch,
It has a comb-teeth-shaped second electrode that is formed in parallel with the first electrode and extends in a direction perpendicular to the common line on the opposite side of the common line and that is also formed in parallel with the first electrode. A first mover element that is formed in parallel with the second electrode at a predetermined interval and skips one-phase electrodes that should be formed at a constant pitch; and (c) the first mover. A second stator element, which is arranged so as to correspond to the element and is made of an object having minute conductivity, and (d) is arranged so as to correspond to the second stator element, and is arranged in a direction perpendicular to the common wiring. A first comb-teeth-shaped electrode that extends at a constant pitch and a first electrode that extends in a direction perpendicular to the common wiring on the opposite side of the common wiring and that is formed in parallel with the first electrode at a predetermined interval. Comb-tooth-shaped second electrodes formed at a constant pitch A, an electrode with a predetermined distance of the second formed parallel to, and a second movable element elements 1 phase electrodes to be formed at a constant pitch is skipped,
(E) Compensation for a reduction in driving force due to electrode skipping between the first stator element and the first mover element between the second stator element and the second mover element, An electrostatic motor characterized by obtaining a uniform driving force. 6. A stator element in which an electrode is formed in an insulator and a mover element in which an electrode is formed in the insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a rotary electrostatic motor according to claim 1, (a) radial first electrodes formed at a constant pitch extending in a radial direction from a common wire formed on an outer peripheral portion,
A radial second electrode that extends in the radial direction from the common wiring formed on the inner peripheral portion and is combined with the first electrode and is also formed at a constant pitch, is adjacent to the second electrode. A first stator element in which one-phase electrode to be formed at a constant pitch is skipped, and (b) a radial first radial element formed at a constant pitch extending from a common wire formed on an outer peripheral portion in a radial direction. 3 and a radial fourth electrode that extends radially from the common wiring formed on the inner peripheral portion and is combined with the first electrode and is also formed at a constant pitch. With respect to the first mover element in which the one-phase electrode to be formed adjacent to the fourth electrode at a constant pitch is skipped, and (c) the electrode arrangement of the first stator element is skipped. So that the position of the one-phase electrode shifts A second stator element formed, and (d) a second stator formed so that the positions of the skipped one-phase electrodes are shifted with respect to the electrode arrangement of the first mover element. With elements,
(E) Compensation for a reduction in driving force due to electrode skipping between the first stator element and the first mover element between the second stator element and the second mover element, An electrostatic motor characterized by obtaining a uniform driving force. 7. A stator element in which an electrode is formed in an insulator and a mover element in which an electrode is formed in the insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a rotary electrostatic motor according to claim 1, (a) radial first electrodes formed at a constant pitch extending in a radial direction from a common wire formed on an outer peripheral portion,
A radial second electrode that extends in the radial direction from the common wiring formed on the inner peripheral portion and is combined with the first electrode and is also formed at a constant pitch, is adjacent to the second electrode. A first stator element in which one-phase electrode to be formed at a constant pitch is skipped, and (b) a radial first radial element formed at a constant pitch extending from a common wire formed on an outer peripheral portion in a radial direction. The third electrode and a radial fourth electrode that extends in the radial direction from the common wiring formed on the inner peripheral portion and is combined with the first electrode and are also formed at a constant pitch. The first mover element in which one-phase electrodes to be formed at a constant pitch adjacent to the first electrode are skipped, and (c) the electrode arrangement of the first stator element is skipped 1 Formed so that the positions of the phase electrodes are shifted. A second stator element that,
(D) a disc-shaped second mover element on which electrodes are formed similarly to the first mover element,
(E) Compensation for a reduction in driving force due to electrode skipping between the first stator element and the first mover element between the second stator element and the second mover element, An electrostatic motor characterized by obtaining a uniform driving force. 8. A stator element in which an electrode is formed in an insulator and a mover element made of a substance having a minute conductivity, which is arranged between the stator elements, is arranged in multiple stages, and a three-phase alternating current is applied. (A) Radial first electrodes formed at a constant pitch and extending in the radial direction from the common wiring formed on the outer peripheral portion, and the common wiring formed on the inner peripheral portion A radial second electrode that extends in the radial direction from the first electrode in combination with the first electrode and is also formed at a constant pitch, and should be formed at a constant pitch adjacent to the second electrode. A first stator element in which the phase electrodes are skipped, and (b) the first stator element.
Disk-shaped first mover element made of an object having minute conductivity and arranged so as to correspond to the stator element, and (c) is arranged so as to correspond to the first mover element. A second stator element formed such that the position of the skipped one-phase electrode is shifted with respect to the electrode arrangement of the first stator element,
(D) A disc-shaped second body made of a substance having a minute conductivity and arranged so as to correspond to the second stator element.
And (e) reducing the driving force by skipping electrodes between the first stator element and the first mover element, the second stator element and the second mover. An electrostatic motor characterized by compensating between elements to obtain a uniform driving force overall. 9. A stator element composed of an object having minute conductivity and a plurality of mover elements arranged between the stator elements and having electrodes formed in an insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a rotary electrostatic motor to be used, (a) a first disc-shaped first conductive layer
And (b) first radial elements formed at a constant pitch extending in the radial direction from the common wiring formed on the outer peripheral portion so as to correspond to the first stator element.
And a radial second electrode that extends in the radial direction from the common wiring formed on the inner peripheral portion and is combined with the first electrode and is also formed at a constant pitch. A first mover element in which one-phase electrodes to be formed adjacent to the electrodes at a constant pitch are skipped; and (c) a minute conductivity arranged to correspond to the first mover element. A disk-shaped second stator element made of an object having: (d) the second stator element, which is arranged so as to correspond to the second stator element, and which is skipped with respect to the electrode arrangement of the first movable element And a disc-shaped second mover element formed so that the position of the one-phase electrode is shifted, (e) between the first stator element and the first mover element. The reduction of driving force by skipping electrodes is Electrostatic motor stator elements and compensates between the second movable element element, and wherein the obtaining the overall uniform driving force. 10. A stator element in which electrodes are formed in an insulator and a mover element in which electrodes are formed in the insulator are arranged in multiple stages, and three-phase alternating current is applied. In a slide type electrostatic motor according to the present invention, (a) a comb-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. It has a second comb-teeth-shaped electrode that extends in parallel with the first electrode and has a predetermined interval and is also formed at a constant pitch, and has a predetermined interval and is parallel to the second electrode. A first stator element having a comb-teeth-shaped third electrode which is also formed at a constant pitch, and (b) a comb-teeth-shaped element extending at a right angle from the common wiring and formed at a constant pitch. The fourth electrode faces the common wiring. A fifth comb-teeth-shaped electrode that is formed in parallel with the fourth electrode and that is formed in parallel with the fourth electrode and that is also formed at a constant pitch.
A first mover element that is formed in parallel with the fifth electrode at a predetermined interval and skips one-phase electrodes that should be formed at a constant pitch; and (c) the first stator element. Similarly to the second stator element in which electrodes are formed, and (d) the electrode arrangement of the first movable element is formed so that the position of the skipped one-phase electrode is shifted. A second mover element,
(E) Compensation for a reduction in driving force due to electrode skipping between the first stator element and the first mover element between the second stator element and the second mover element, An electrostatic motor characterized by obtaining a uniform driving force. 11. A stator element made of an object having minute conductivity and a plurality of mover elements arranged between the stator elements and having electrodes formed in an insulator are arranged in multiple stages, and a three-phase alternating current is applied. (A) Radial first electrodes formed at a constant pitch and extending in the radial direction from the common wiring formed on the outer peripheral portion, and the common wiring formed on the inner peripheral portion A radial second electrode that extends in the radial direction from the first electrode in combination with the first electrode and is also formed at a constant pitch, and is formed in parallel with the second electrode at a predetermined interval and has a constant pitch. A first stator element in which the one-phase electrode to be formed in step 1 is skipped, and (b) a radial fourth electrode formed at a constant pitch extending in the radial direction from the common wiring formed in the outer peripheral portion. And formed on the inner circumference Has a radial fifth electrode that extends in the radial direction from the common wiring and is combined with the first electrode and is also formed at a constant pitch, and is skipped 1
A disk-shaped first movable element formed so that the positions of the phase electrodes are shifted, and (c) a disk-shaped second movable element in which electrodes are formed in the same manner as the first stator element. A stator element; and (d) a disk-shaped second mover element formed so that the position of the skipped one-phase electrode is shifted relative to the electrode arrangement of the first mover element. And (e) compensating the reduction of the driving force due to the electrode skip between the first stator element and the first mover element between the second stator element and the second mover element. The electrostatic motor is characterized by obtaining an even driving force as a whole.