JPH02114441U - - Google Patents
Info
- Publication number
- JPH02114441U JPH02114441U JP2353189U JP2353189U JPH02114441U JP H02114441 U JPH02114441 U JP H02114441U JP 2353189 U JP2353189 U JP 2353189U JP 2353189 U JP2353189 U JP 2353189U JP H02114441 U JPH02114441 U JP H02114441U
- Authority
- JP
- Japan
- Prior art keywords
- board
- vacuum suction
- workpiece
- placing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000000704 physical effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Belt Conveyors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989023531U JP2507213Y2 (ja) | 1989-02-28 | 1989-02-28 | 半導体ウエハ−の加工、測定用真空吸着盤 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989023531U JP2507213Y2 (ja) | 1989-02-28 | 1989-02-28 | 半導体ウエハ−の加工、測定用真空吸着盤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02114441U true JPH02114441U (en, 2012) | 1990-09-13 |
| JP2507213Y2 JP2507213Y2 (ja) | 1996-08-14 |
Family
ID=31242600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989023531U Expired - Lifetime JP2507213Y2 (ja) | 1989-02-28 | 1989-02-28 | 半導体ウエハ−の加工、測定用真空吸着盤 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507213Y2 (en, 2012) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275513A (ja) * | 1992-03-27 | 1993-10-22 | Kyocera Corp | 半導体ウェハ保持装置 |
| JP2002015977A (ja) * | 2000-06-29 | 2002-01-18 | Kyocera Corp | 基板ホルダー |
| JP2009055017A (ja) * | 2007-07-30 | 2009-03-12 | Kyocera Corp | 保持用治具およびそれを用いた吸着装置 |
| WO2009141113A1 (de) * | 2008-05-21 | 2009-11-26 | WINKLER+DüNNEBIER AG | Transportriemen mit vermindertem schüsseleffekt |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61197498U (en, 2012) * | 1985-05-29 | 1986-12-09 | ||
| JPS6372139A (ja) * | 1986-09-12 | 1988-04-01 | Toshiba Seiki Kk | 半導体チツプの載置台 |
-
1989
- 1989-02-28 JP JP1989023531U patent/JP2507213Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61197498U (en, 2012) * | 1985-05-29 | 1986-12-09 | ||
| JPS6372139A (ja) * | 1986-09-12 | 1988-04-01 | Toshiba Seiki Kk | 半導体チツプの載置台 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05275513A (ja) * | 1992-03-27 | 1993-10-22 | Kyocera Corp | 半導体ウェハ保持装置 |
| JP2002015977A (ja) * | 2000-06-29 | 2002-01-18 | Kyocera Corp | 基板ホルダー |
| JP2009055017A (ja) * | 2007-07-30 | 2009-03-12 | Kyocera Corp | 保持用治具およびそれを用いた吸着装置 |
| WO2009141113A1 (de) * | 2008-05-21 | 2009-11-26 | WINKLER+DüNNEBIER AG | Transportriemen mit vermindertem schüsseleffekt |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2507213Y2 (ja) | 1996-08-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |