JPH02109941U - - Google Patents
Info
- Publication number
- JPH02109941U JPH02109941U JP1807189U JP1807189U JPH02109941U JP H02109941 U JPH02109941 U JP H02109941U JP 1807189 U JP1807189 U JP 1807189U JP 1807189 U JP1807189 U JP 1807189U JP H02109941 U JPH02109941 U JP H02109941U
- Authority
- JP
- Japan
- Prior art keywords
- air
- air conditioner
- room
- forming device
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004378 air conditioning Methods 0.000 claims description 4
- 230000001143 conditioned effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Central Air Conditioning (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989018071U JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989018071U JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02109941U true JPH02109941U (tr) | 1990-09-03 |
JPH065541Y2 JPH065541Y2 (ja) | 1994-02-09 |
Family
ID=31232385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989018071U Expired - Lifetime JPH065541Y2 (ja) | 1989-02-17 | 1989-02-17 | 空気調和設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH065541Y2 (tr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006317048A (ja) * | 2005-05-11 | 2006-11-24 | Takenaka Komuten Co Ltd | クリーンルーム |
JP2012507321A (ja) * | 2008-10-31 | 2012-03-29 | エアソネット アーベー | 手術室の換気装置およびその方法 |
WO2019176424A1 (ja) * | 2018-03-15 | 2019-09-19 | 信越半導体株式会社 | シリコン多結晶充填作業用のクリーンブース |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6069441A (ja) * | 1983-09-26 | 1985-04-20 | Ryowa Chiyouon Kogyo Kk | ス−パ−クリ−ンシステム |
-
1989
- 1989-02-17 JP JP1989018071U patent/JPH065541Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6069441A (ja) * | 1983-09-26 | 1985-04-20 | Ryowa Chiyouon Kogyo Kk | ス−パ−クリ−ンシステム |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006317048A (ja) * | 2005-05-11 | 2006-11-24 | Takenaka Komuten Co Ltd | クリーンルーム |
JP2012507321A (ja) * | 2008-10-31 | 2012-03-29 | エアソネット アーベー | 手術室の換気装置およびその方法 |
WO2019176424A1 (ja) * | 2018-03-15 | 2019-09-19 | 信越半導体株式会社 | シリコン多結晶充填作業用のクリーンブース |
JP2019156694A (ja) * | 2018-03-15 | 2019-09-19 | 信越半導体株式会社 | シリコン多結晶充填作業用のクリーンブース |
Also Published As
Publication number | Publication date |
---|---|
JPH065541Y2 (ja) | 1994-02-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |