JPH02108769U - - Google Patents
Info
- Publication number
- JPH02108769U JPH02108769U JP1408789U JP1408789U JPH02108769U JP H02108769 U JPH02108769 U JP H02108769U JP 1408789 U JP1408789 U JP 1408789U JP 1408789 U JP1408789 U JP 1408789U JP H02108769 U JPH02108769 U JP H02108769U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- ultrasonic
- ultrasonic atomizer
- mist
- follows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- 239000003595 mist Substances 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000889 atomisation Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Special Spraying Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1408789U JPH02108769U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1408789U JPH02108769U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108769U true JPH02108769U (enrdf_load_stackoverflow) | 1990-08-29 |
Family
ID=31224969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1408789U Pending JPH02108769U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108769U (enrdf_load_stackoverflow) |
-
1989
- 1989-02-10 JP JP1408789U patent/JPH02108769U/ja active Pending
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