JPH02108332U - - Google Patents
Info
- Publication number
- JPH02108332U JPH02108332U JP1738689U JP1738689U JPH02108332U JP H02108332 U JPH02108332 U JP H02108332U JP 1738689 U JP1738689 U JP 1738689U JP 1738689 U JP1738689 U JP 1738689U JP H02108332 U JPH02108332 U JP H02108332U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- tube
- reaction tube
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1738689U JPH02108332U (cs) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1738689U JPH02108332U (cs) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108332U true JPH02108332U (cs) | 1990-08-29 |
Family
ID=31231125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1738689U Pending JPH02108332U (cs) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108332U (cs) |
-
1989
- 1989-02-15 JP JP1738689U patent/JPH02108332U/ja active Pending
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