JPH02106852U - - Google Patents
Info
- Publication number
- JPH02106852U JPH02106852U JP1474889U JP1474889U JPH02106852U JP H02106852 U JPH02106852 U JP H02106852U JP 1474889 U JP1474889 U JP 1474889U JP 1474889 U JP1474889 U JP 1474889U JP H02106852 U JPH02106852 U JP H02106852U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pump
- resonant
- extraction electrode
- coupling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005381 potential energy Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 241000931526 Acer campestre Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1474889U JPH02106852U (https=) | 1989-02-10 | 1989-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1474889U JPH02106852U (https=) | 1989-02-10 | 1989-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106852U true JPH02106852U (https=) | 1990-08-24 |
Family
ID=31226226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1474889U Pending JPH02106852U (https=) | 1989-02-10 | 1989-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106852U (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3617911A (en) * | 1969-04-01 | 1971-11-02 | Bell Telephone Labor Inc | Wide band direct-current-pumped semiconductor maser |
-
1989
- 1989-02-10 JP JP1474889U patent/JPH02106852U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3617911A (en) * | 1969-04-01 | 1971-11-02 | Bell Telephone Labor Inc | Wide band direct-current-pumped semiconductor maser |
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