JPH02106830U - - Google Patents
Info
- Publication number
- JPH02106830U JPH02106830U JP1359689U JP1359689U JPH02106830U JP H02106830 U JPH02106830 U JP H02106830U JP 1359689 U JP1359689 U JP 1359689U JP 1359689 U JP1359689 U JP 1359689U JP H02106830 U JPH02106830 U JP H02106830U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- receiver
- light emitter
- photoelectric switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1359689U JPH02106830U (fr) | 1989-02-09 | 1989-02-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1359689U JPH02106830U (fr) | 1989-02-09 | 1989-02-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02106830U true JPH02106830U (fr) | 1990-08-24 |
Family
ID=31224038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1359689U Pending JPH02106830U (fr) | 1989-02-09 | 1989-02-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02106830U (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006156740A (ja) * | 2004-11-30 | 2006-06-15 | Eibisu:Kk | 半導体ウエハ収納容器の検査装置 |
JP2018509751A (ja) * | 2015-01-22 | 2018-04-05 | エスケー シルトロン カンパニー リミテッド | ウエハー移送装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63188951A (ja) * | 1987-01-30 | 1988-08-04 | Kokusai Electric Co Ltd | カセツトのウエ−ハ取出し・収納装置 |
-
1989
- 1989-02-09 JP JP1359689U patent/JPH02106830U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63188951A (ja) * | 1987-01-30 | 1988-08-04 | Kokusai Electric Co Ltd | カセツトのウエ−ハ取出し・収納装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006156740A (ja) * | 2004-11-30 | 2006-06-15 | Eibisu:Kk | 半導体ウエハ収納容器の検査装置 |
JP2018509751A (ja) * | 2015-01-22 | 2018-04-05 | エスケー シルトロン カンパニー リミテッド | ウエハー移送装置 |
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