JPH02106830U

JPH02106830U -

Info

Publication number: JPH02106830U
Application number: JP1359689U
Authority: JP
Priority date: 1989-02-09
Filing date: 1989-02-09
Publication date: 1990-08-24

Description

[Brief explanation of drawings]

第１図１は本考案の一実施例を示すウエーハー
枚数計数装置の正面図、第１図２はその側面図、
第２図は演算器４に入力する光電スイツチ１の出
力波形図、第３１〜３はウエーハー４を支持する
ウエーハーキヤリア５の溝の部分の拡大図、第３
図４，５はそれぞれ第３図３のラインｅ，ｄでの
、反対方向に傾いた隣りあつた２枚のウエーハー
間の位置関係を示す図、第４図１は発光器１ａと
受光器１ｂにそれぞれ収束器８、スリツト板９が
取り付けられた状態を示す図、第４図２はスリツ
ト板９の平面図、第４図３は収束器８の平面図、
第４図４は発光器１ａからの光が検出しようとし
ているウエーハー４の隣のウエーハー４で反射さ
れて受光器１ｂに入力する様子を示す図、第５図
１〜３、第６図１〜３は従来のウエーハー枚数計
数方法を示す図である。１……光電スイツチ、１ａ……発光器、１ｂ…
…受光器、１ｃ……光軸、２……フレーム、３…
…演算器、４……ウエーハー、５……ウエーハー
キヤリア、５ａ……下部の開口、５ｂ……溝、６
……アーム、７……光軸１ｃとキヤリア内壁の距
離、８……収束器、９……スリツト板、９ａ……
スリツト、ａ……ウエーハーキヤリア５上の点、
ｂ……点ａを含む部分、ｃ〜ｅ……ライン、ｆ，
ｇ……ガタ、ｈ，ｉ……スキマ。 FIG. 1 is a front view of a wafer counting device showing an embodiment of the present invention, FIG. 1 is a side view thereof,
2 is an output waveform diagram of the photoelectric switch 1 that is input to the arithmetic unit 4, 31 to 3 are enlarged views of the groove portion of the wafer carrier 5 that supports the wafer 4, and 3
4 and 5 are diagrams showing the positional relationship between two adjacent wafers tilted in opposite directions at lines e and d in FIG. 3, respectively, and FIG. FIG. 4 2 is a plan view of the slit plate 9, FIG. 4 3 is a plan view of the convergence device 8,
4 is a diagram showing how the light from the light emitter 1a is reflected by the wafer 4 next to the wafer 4 to be detected and input to the light receiver 1b; FIGS. 5 1-3; FIGS. 6 1- 3 is a diagram showing a conventional wafer number counting method. 1...Photoelectric switch, 1a...Light emitter, 1b...
...Receiver, 1c...Optical axis, 2...Frame, 3...
...Arithmetic unit, 4...Wafer, 5...Wafer carrier, 5a...Lower opening, 5b...Groove, 6
...Arm, 7...Distance between optical axis 1c and carrier inner wall, 8...Concentrator, 9...Slit plate, 9a...
Slit, a... Point on wafer carrier 5,
b... part including point a, c to e... line, f,
g... Backlash, h, i... Gap.

Claims

[Scope of Claim for Utility Model Registration] When the photoelectric switch and the wafer carrier are viewed from the front direction of the mounted wafer, the light emitter and receiver of the photoelectric switch are located above and below the wafer carrier; Hold the light emitter and receiver so that the optical axis connecting the light emitter and receiver of the switch intersects the wafer mounted on the wafer carrier, and the optical axis passes through the opening at the bottom of the wafer carrier. The frame, the wafer carrier or a mechanism for moving the frame in the wafer loading direction of the wafer carrier, and the light emitting device of the photoelectric switch are energized, and the signals from the photodetector that are blocked by the wafer are counted. A wafer number counting device having a computing unit for counting the number of wafers mounted on a wafer carrier.