JPH02106269A - Polishing machine having abnormal charging detector - Google Patents

Abstract

PURPOSE:To prevent the generation of rejectives by providing a detector for detecting the abnormal position in the vertical direction of a surface plate member at the time of abnormal charging of a workpiece in the vicinity of an upper surface plate member. CONSTITUTION:In a polishing machine for polishing a workpiece 5 while interposingly pressing same between upper/lower surface plates 1, 2, when the workpiece 5 is interposed between the upper/lower surface plates 1, 2 by lowering the upper surface plate 1, a detector 17 detects the abnormal position in the vertical direction of the upper surface plate member 1. By the detecting signal of this detector 17, the operation hereafter is stopped until the workpiece 5 is normally charged. As a result, it becomes possible to recharge the workpiece 5 while enabling an unmanned operation.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention provides a polisher and a polisher for polishing workpieces such as wafers and memory disks, which are equipped with a detector for detecting abnormal loading of the workpiece. The present invention relates to a polishing machine having an abnormal loading detector.

[Conventional technology]

The case of a conventionally used double-sided polisher will be explained. Fourth
As shown in the figure, the upper surface plate 1 and the lower surface plate 2 are each independently driven by a drive source (not shown). The upper surface plate 1 is attached to an upper surface plate holding plate 3, and the upper surface plate holding plate 3 is attached to a holding shaft 4 with a self-aligning type bearing (not shown). Therefore, the upper surface plate 1 can rotate even if it is slightly inclined with respect to the lower surface plate 2. Cut between the upper surface plate L and the lower surface plate 2,
It is disc-shaped and has a workpiece holding hole 6 on the inside for holding a workpiece 5 such as a sea urchin in a flat shape, and teeth are provided on the outer peripheral surface, meshing with an internal gear 7 and a sun gear 8. A plurality of carriers 9 are set which revolve while rotating. In addition, polishing cloths (not shown) are applied to opposing surfaces of the upper surface plate 1 and the lower surface plate 2, respectively.

Further, the abrasive supply means 12 necessary for polishing is provided on the upper surface plate l.
This abrasive supply means 12 connects an abrasive receiver 13 attached to an upper surface plate holding plate 3 provided at the center of the upper part of the upper surface plate 1, and an abrasive agent receiver 13 that feeds the upper surface plate 1 from the abrasive agent receiver 13. It consists of a tube 15 disposed between an abrasive supply port 14 and an abrasive supply port 14 provided vertically through the tube 15. The abrasive is supplied from an abrasive supply line (not shown) to an abrasive receiver 13, and then passed through the tube 15. , the abrasive flows down through the abrasive supply port 14 and is supplied to the workpiece 5. Conventionally, a device for detecting abnormal loading of a workpiece has not been particularly provided.

Note that the upper surface plate 1, the upper surface plate holding plate 3, etc. rise leaving the carrier 9 on the lower surface plate 2 and move away from the lower surface plate 2.

With the above structure, during polishing, the workpiece 5 such as a wafer is held in the workpiece holding hole 6 of the carrier 9, and abrasive is supplied to the upper surface plate 1. ! :Lower surface plate 2
While pressing the workpiece 5, the carrier 9 fully rotates and revolves, and the polishing process is performed by the relative movement of the upper and lower surface plates 1.2.

[Problem to be solved by the invention]

When polishing a workpiece 5 such as a wafer or a memory disk, the workpiece is loaded into the workpiece holding hole 6 of the carrier 9, and the workpiece 5 is held in the workpiece holding hole 6 as shown in FIG. If a part of the workpiece 5 does not fully enter the carrier IJ 9 and is pressed between the upper and lower surface plates to perform polishing in the next state, the workpiece 5 that has been loaded normally will also Since uniform processing pressure is not applied, variations occur in the polishing process depending on the workpiece. Also, during polishing, the workpiece 5 that is not properly loaded may come off the workpiece holding hole 6, and
If the workpiece 5 moves between the lower surface plates and is easily broken, it will easily break, and the broken and scattered small pieces will also invade the remaining workpieces 5, affecting all remaining workpieces, and in severe cases. In some cases, the carrier 9 is damaged and the entire polishing machine is also damaged. Therefore, during the polishing process, there were problems such as the operator having to stay near the polishing machine and supervising it with utmost care.

In order to solve these problems, the present invention has been developed so that when the workpiece 5 is loaded into the workpiece holding hole 6 of the carrier 9 and the upper surface plate member is lowered to the polishing position, the upper surface plate member is in the normal position. We provide a complete polishing machine that can use a detector to detect when the workpiece is lifted higher (in the case of abnormal loading), reload the workpiece, and also enable unmanned operation. There is a particular thing.

[Means to solve the problem]

The present invention is a polishing machine that completely polishes the workpiece by loading the workpiece into a holding hole of a carrier and clamping it between the upper and lower surface plates, by lowering the upper surface plate member and moving the workpiece between the upper and lower surface plates. This polishing machine is equipped with a detector that detects abnormal positions in the vertical direction of the upper surface plate member when the workpiece is clamped, and this detector can stop further operation. It is.

[For production]

During polishing, when the workpiece is held between the upper and lower surface plates, abnormal positions in the vertical direction of the upper surface plate members are detected and further operations are stopped until the workpiece is loaded correctly. . This not only makes it possible to reload the workpiece, but also enables unmanned operation.

〔Example〕

An embodiment of the present invention will be described with reference to FIG. 1, which is a double-sided polisher. The same members as those of the conventional double-side polishing apparatus explained with reference to FIG. 4 have already been explained, so the same reference numerals are given and the explanation will be omitted.

On the upper surface of the frame 16 located on the outside of the internal gear, near the surface plate, there are several mounting posts for mounting a photoelectric switch 17, which is a detector for detecting abnormal positions in the vertical direction of the upper surface plate 1. These pillars 18 are equipped with photoelectric switches (
(reflective type) are mounted toward the center of the upper surface plate so that the optical axis of each photoelectric switch is slightly above the top surface of the upper surface plate (a distance slightly greater than the thickness of the wafer, etc.).

Therefore, during polishing, the workpiece 5fc, such as a wafer or memory disk, is held in the workpiece holding hole 6 of the carrier.
After loading, when the upper surface plate 1 is lowered and the workpiece 5 is sandwiched between the upper and lower surface plates, the workpiece 5 is completely inserted into the workpiece holding hole 6 as shown in FIG. If the upper surface plate 1 is not mounted on the carrier 9 and a part of it is placed on the carrier 9, the upper surface plate 1 is tilted about the self-aligning type bearing (not shown) provided on the holding shaft 4 approximately by the thickness of the workpiece 5. It will be in a position where it is lifted upward.

When the upper surface plate 1 moves slightly upward in this way, the light emitted from the photoelectric switch 17 hits the upper side of the upper surface plate 1 and is reflected, detecting abnormal loading of the workpiece 5 and issuing an alarm. Stop further operation. Then, raise the upper surface plate by 1 gold and check the workpiece 5 again. : After reloading correctly, lower the upper surface plate 1 and supply the abrasive, then lower the upper surface plate.
Rotate the lower surface plate and restart polishing. When the workpiece 5 is loaded correctly, the optical axis of the photoelectric switch also comes off the upper surface plate 1, so it is not detected and normal operation can be performed.

FIG. 3 shows another embodiment, in which a proximity switch 19 is provided above the upper surface plate 1 in place of the photoelectric switch, and abnormal loading of the workpiece 5 is detected on the upper surface plate 1. Detection is performed based on the difference in distance between the top surface of the camera and the proximity switch.

The proximity switch gets in the way when lifting the surface plate 1 for loading the workpiece, so the arm 2 for mounting the proximity switch 19 is
0 is a rotary type and is kept away from the outer periphery of the upper surface plate 1.

The rest of the configuration and operation are the same as those of the embodiment shown in FIG. 1, so their explanation will be omitted.

In the embodiments described above, a photoelectric switch or a proximity switch was used as the detector, but other detectors may be used as long as they can detect the vertical position of the upper surface plate member.

〔Effect of the invention〕

Installing a detector makes it possible to detect abnormal loading of the workpiece.
Since the workpiece can be reloaded, it is possible to prevent the production of defective products, and it is also possible to prevent damage to the carrier and machine. It also has remarkable effects, such as making it possible to operate machines unmanned.

[Brief explanation of the drawing]

FIG. 1 and FIG. 2 show one embodiment of the present invention.
The figure is a sectional view when normally loaded, FIG. 2 is a sectional view when abnormally loaded, FIG. 3 is a sectional view of another embodiment of the present invention, FIGS.
The figures show a conventional polishing machine, with FIG. 4 being a sectional view when normally loaded, and FIG. 5 being a sectional view when being abnormally loaded. 1...Upper surface plate, 2...Lower surface plate, 5...
...Workpiece, 6...Workpiece holding hole, 9
...Carrier, 17...Photoelectric switch (
Detector), 19... Proximity switch (detector).

Claims (1)

[Claims] In a polishing machine that loads a workpiece into a holding hole in a carrier and presses it between an upper and lower surface plate to polish the workpiece, when the workpiece is loaded with abnormality, the abnormal position of the upper surface plate member in the vertical direction is detected. A polishing machine having an abnormal loading detector, characterized in that a detector for detecting the abnormality is provided near an upper surface plate member.