JPH0210315Y2 - - Google Patents

Info

Publication number
JPH0210315Y2
JPH0210315Y2 JP122586U JP122586U JPH0210315Y2 JP H0210315 Y2 JPH0210315 Y2 JP H0210315Y2 JP 122586 U JP122586 U JP 122586U JP 122586 U JP122586 U JP 122586U JP H0210315 Y2 JPH0210315 Y2 JP H0210315Y2
Authority
JP
Japan
Prior art keywords
filter
cryopump
gas
piston
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP122586U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62114176U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP122586U priority Critical patent/JPH0210315Y2/ja
Publication of JPS62114176U publication Critical patent/JPS62114176U/ja
Application granted granted Critical
Publication of JPH0210315Y2 publication Critical patent/JPH0210315Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP122586U 1986-01-10 1986-01-10 Expired JPH0210315Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP122586U JPH0210315Y2 (enrdf_load_stackoverflow) 1986-01-10 1986-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP122586U JPH0210315Y2 (enrdf_load_stackoverflow) 1986-01-10 1986-01-10

Publications (2)

Publication Number Publication Date
JPS62114176U JPS62114176U (enrdf_load_stackoverflow) 1987-07-20
JPH0210315Y2 true JPH0210315Y2 (enrdf_load_stackoverflow) 1990-03-14

Family

ID=30778935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP122586U Expired JPH0210315Y2 (enrdf_load_stackoverflow) 1986-01-10 1986-01-10

Country Status (1)

Country Link
JP (1) JPH0210315Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62114176U (enrdf_load_stackoverflow) 1987-07-20

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