JPH02102771A - Fluid removing equipment for plane base plate - Google Patents

Abstract

PURPOSE:To effectively perform draining by equipping both a porous cylindrical roll body and a liquid sucking equipment for evacuating the inside of the cylinder of the roll body. CONSTITUTION:A pair of porous cylindrical roll bodies are arranged so that a plane base plate 11 carried by a roller conveyor 10 is pinched from both surface and rear sides and the cylindrical roll bodies rectangularly cross with the plane base plate 11. The liquid 13 on the plane base plate 11 is checked at once by respective roll bodies 4 and also the checked liquid 13 is sucked to the insides of the roll bodies 4 via a sponge cylinder 2 and a meshlike cylinder 1 by reduced pressure in the roll bodies 4 due to a water-driving type vacuum pump. Furthermore the liquid 13 is introduced into a suction pipe 5 via a perforated long groove 5a and passed through the pipe 5 and discharged to the prescribed place. Thereby certainty and reliability of fluid removing are improved.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to glass substrates and PCBs (PrintedCi
The present invention relates to a liquid draining device for a flat substrate that is used to remove liquid on the flat substrate in a process of cleaning the flat substrate such as a rcuit board.

[, Conventional technology]

Conventionally, this type of liquid draining device for flat substrates has been used, for example: 1) By rotating the stage with the flat substrate suctioned and fixed on the stage, the centrifugal force generated at that time drains the liquid on the flat substrate. One type spinner for cutting.

■Air knife method (which sprays high-pressure air onto the liquid on a flat substrate to prevent the liquid from being blown away)
(Refer to Japan Institute of Invention and Innovation Publication Technical Report, Publication No. 88-4997).

■One-roller type that dams up and removes liquid on a flat substrate by rotating the roller on the flat substrate.

(2) For example, a paper type that drains liquid using a low boiling point solvent such as a fluorocarbon solvent or IPA (isopropyl alcohol) (see Japanese Patent Laid-Open No. 61-290445).

A liquid draining device using, etc. has been proposed.

[Problem to be solved by the invention]

However, the single spinner type described above has the biggest drawback of low throughput, and also requires separate drive systems for the substrate rotating section and the substrate transport section, which tends to increase the size of the apparatus. Furthermore, it also has the disadvantage that the substrate is contaminated with liquid scattered by centrifugal force.

The air knife method, like the single spinner method mentioned above, has the disadvantage of contaminating the substrate with the blown liquid, but also has the disadvantage that high-pressure air blows into the processing tank before and after draining the liquid, adversely affecting the cleaning conditions. However, it also has the disadvantage that the setting of conditions such as the air blowing angle and pressure in the air knife is complicated.

Although the one-roller type has the advantage of a simple device structure, it cannot completely drain the liquid, and is only used as a liquid draining device in the previous stage, and is not suitable for R final finishing. The reality is that it cannot be used.

The vapor one-type is used in a punch-type washer and is not suitable for a branch-leaf type washer, and also has the disadvantage that the device becomes larger.

[Means for Solving the Problems] In order to solve the above problems, the liquid draining device for a flat substrate according to the present invention rotates in synchronization with the movement of the flat substrate while in contact with or in close proximity to the flat substrate. A porous cylindrical roll body that dams the liquid on the flat substrate of the lever, and by reducing the pressure inside the cylinder of this roll body, the liquid on the dammed flat substrate is transferred to the porous peripheral wall surface of the roll body. It is characterized by comprising a liquid suction device that sucks liquid into the inside of the roll body through the liquid suction device.

[For production]

According to the above configuration, the liquid on the flat substrate is temporarily dammed up by the roll body, and the dammed liquid is pumped through the porous peripheral wall surface by reducing the pressure inside the cylinder of the roll body by the liquid suction device. After being sucked into the cylinder of the roll body, it is discharged, for example, to a predetermined location. As a result, compared to a single roller type,
The reliability and reliability of the liquid draining process are significantly improved, and the liquid draining device for flat substrates of the present invention can be fully applied even in the final finishing stage of cleaning.

Furthermore, since there is no liquid splashing during such liquid draining, it is possible to avoid the situation where the flat substrate is contaminated by splashed liquid as in the case of the air knife method. - Since no supporting means is required, the size of the device does not increase, and unlike the Hepa type, smooth transportation of flat substrates is not hindered.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

In the liquid draining device for a flat substrate according to the present invention, the first
As shown in the figure, a porous sponge cylinder 2 constituting a porous peripheral wall surface is fitted around the outer periphery of a mesh-like cylinder l made of stainless steel in which a large number of small holes 1a are formed. These mesh-like cylinders l and sponge cylinders 2
has a cylindrical flange 3 fixed to both ends thereof.
It is integrated in 3. A roll body 4 is constituted by the above-mentioned mensch-like cylinder l, sponge cylinder 2, and flanges 3, and this roll body 4 is provided penetrating inside the cylinder as shown in FIG. It is provided so as to be rotatable relative to the suction pipe 5 made of stainless steel. In order to transmit such rotational driving force, a sprocket 7 is fitted to an extended portion 3a formed on one flange 3, and a driving force is transmitted to this sprocket 7 from a drive system (not shown). It has become.

Between the inner wall surfaces of the flanges 3, 3 and the outer wall surface of the suction pipe 5, O-rings 6, 6 (only one is shown in the figure) are provided, and the The roll body 4 is supported by the suction pipe 5, and atmospheric air is prevented from leaking into the roll body 4 through the gap between each flange 3 and the suction pipe 5. Further, the suction pipe 5 has a through-long groove (slit) 5a for communicating the inside of the cylinder with the inside of the cylinder of the roll body 4, in the section partitioned by the O-rings 6. Only one is formed in the longitudinal direction of 5. A water ring vacuum pump (not shown) is connected to both ends of the suction vibrator 5 as a liquid suction device for reducing the pressure inside the roll body 4 .

For example, as shown in FIG. 3, the above-mentioned liquid draining device for flat substrates is configured to sandwich the flat substrate 11 conveyed by the roller conveyor 10 from both the front and back sides, and at right angles to the flat substrate 11. In this way, a pair is deployed.

At this time, the sponge cylinders 2 and 2 in the roll bodies 4 and 4
is arranged so as to be in light contact with the flat substrate 11, and the suction pipe 5 is placed in contact with the flat substrate 1 in the sponge cylinder
In order to absorb the liquid contained in the sponge cylindrical body 2 at a stage before the contact portion with the sponge body 1 is rotated and separated from the flat substrate 11, the sponge cylinders 2 are each provided with their long through grooves 5a facing the flat substrate 11.

To describe the state of use in a liquid draining device for a flat substrate more specifically, the flat substrate 11 described above has a width of 3, for example.
00 mm, length 300 mm, and thickness 1.0, and after being brush-cleaned in a branch type glass cleaning device (not shown), it was subjected to water supply shower cleaning treatment, and then
While being conveyed on the roller conveyor 10, a liquid draining process is performed by a liquid draining device according to the present invention, and a drying process is further performed by a drying oven device. Roll body 4/4
The lengths of the sponge cylinders 2 and 2 are each set to 400 mm, which is 100 M wider than the width of the flat substrate 11, and the roll spacing is also set to 1.0 mm, corresponding to the thickness of the flat substrate 11 of 1.0 mm. ．． It is set to Omm. The conveyance speed of the flat substrate 11 by the roller conveyor 10 is set to 1.8 m/min, and the conveyance direction is set to the incoming direction, and correspondingly, the circumferential speed of the roll bodies 4 is also set to 1.8 m/min.
m/min, and the rotation direction is also set to be in the forward direction with respect to the input direction. In addition, water ring vacuum pumps are
One with a discharge capacity of 501/min is used.

According to the above configuration, the liquid 13 on the flat substrate 11 is temporarily dammed up by each roll body 4, and the dammed liquid 13 is turned into a sponge by reducing the pressure inside the roll body 4 by the water ring vacuum pump. It is sucked into the roll body 4 through the cylindrical body 2 and the mesh-like cylindrical body 1, and further guided into the suction vibrator 5 through the long through groove 5a, and then passed through the suction pipe 5 to the water ring type vacuum pump. It is guided and discharged to a predetermined location. As a result, the certainty and reliability of the liquid draining process is significantly improved compared to a simple one-roller system, and the liquid draining device for flat substrates of the present invention can be fully applied even in the final cleaning stage. can do. Furthermore, since the liquid 13 does not scatter at all during such liquid draining, it is possible to avoid the situation where the flat substrate 11 is contaminated with the liquid that has bounced back as in the case of the air knife method. Since there is no need for means for rotationally driving the substrate 11, the device does not become larger, and the smooth conveyance of the flat substrate 11 is not hindered unlike the paper type.

Note that the material constituting the porous peripheral wall surface of the roll body 4 is not limited to the sponge cylinder 2 described above.

Although various porous materials can be used instead of the sponge cylinder 2, deerskin is a particularly suitable material because it can absorb water without damaging the surface of the flat substrate 110.

〔Effect of the invention〕

As described above, the liquid draining device for a flat substrate according to the present invention can move the flat substrate while in contact with or in close proximity to the flat substrate. A porous cylindrical L2-roll body that rotates t11 and dams the liquid on this flat substrate, and a porous cylindrical L2-roll body that dams up the liquid on the flat substrate by rotating t11, and a porous cylindrical L2-roll body that dams up the liquid on the flat substrate by rotating t11, and the liquid on the dammed flat substrate that is dammed up by reducing the pressure inside the roll body. This configuration includes a liquid suction device that sucks liquid into the inside of the roll body through the peripheral wall surface.

As a result, the certainty and reliability of the liquid draining process is significantly improved compared to a single roller system, and the liquid draining device for flat substrates of the present invention can be used sufficiently even during the Q-final finishing stage of cleaning. Can be applied. Furthermore, since there is no liquid scattering during such liquid draining, it is possible to avoid the situation where the flat substrate is contaminated with splashed liquid as in the air knife method, and it is also possible to rotate the flat substrate as in the case of the spinner type. Since there is no need for a means to do so, the device does not become larger, and unlike paper-only systems, smooth transportation of flat substrates is not hindered, and other excellent effects are achieved.

[Brief explanation of the drawing]

1 to 3 show an embodiment of the present invention, in which FIG. 1 shows a broken surface of a liquid draining device for a flat substrate, and FIG. 2 shows a view taken along the line X-X in FIG. The cross-sectional view and FIG. 3 are explanatory diagrams showing the state of use of the liquid draining device for flat substrates. 1 is a mesh cylinder, 2 is a sponge cylinder (porous peripheral wall surface), 3 is a flange, 4 is a roll body, 5 is a suction pipe, 5
a is a penetrating long groove, 6 is an O-ring, 7 is a sprocket, 11
is a flat substrate.

Claims (1)

[Claims] 1. A porous cylindrical roll body that rotates in synchronization with the movement of the flat substrate while in contact with or in close proximity to the flat substrate to dam the liquid on the flat substrate, and a porous cylindrical roll body that dams up the liquid on the flat substrate, and by reducing the pressure inside the cylinder of this roll body, the above-mentioned A liquid draining device for a flat substrate, comprising a liquid suction device that sucks the liquid on the dammed flat substrate into the inside of the roll body through the porous peripheral wall surface of the roll.