JP2000221145A - Apparatus for applying flaw detect solution to ceramics substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently and surely apply a flaw detect solution in a short time and improve a detect accuracy for cracks, by letting the flaw detect solution applied to a ceramics substrate penetrate a crack by a porous roller, then washing off the unwanted flaw detect solution, and drying the substrate. SOLUTION: While a ceramics substrate 1 is transferred by a transfer roller 14, a flaw detect solution 2 is supplied by a circulation pump 16 from a flaw detect solution tank 15 to a spray nozzle 5, sprayed and applied from above and below the substrate 1. A pair of porous rollers 8 are pressed from above and below the substrate 1 to rub the flaw detect solution 2 into a crack of the substrate 1. Then water is sprayed at a cleaning part B by a spray nozzle 6 from above and below the substrate 1, thereby washing out the extra flaw detect solution 2. Moisture on the surface of the substrate 1 is squeezed out by a porous moisture-removing roller 9. At a drying part C, the water remaining on the surface of the substrate 1 is removed by a moisture-removing roller 10, and air is sprayed from above and below the substrate 1 to remove the moisture remaining in holes and on the surface of the substrate 1. Hot wind is sprayed from the nozzle of a dryer 11 to have the substrate dried.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for applying a test liquid for crack inspection of a ceramic substrate.

[0002]

2. Description of the Related Art In general, cracks in a ceramic substrate are hardly detected by visual inspection, and inspection is generally performed after applying a flaw detection liquid in order to increase inspection accuracy. The method of applying the flaw detection liquid is as follows.

First, as shown in FIG. 7 (a), a plurality of ceramic substrates 1 are placed in a basket-shaped container 102, and FIG.
As shown in (b), this container 102 is
Into the flaw detection liquid tank 101 containing. In this state, the entire surface of the ceramic substrate 1 is scattered so that the flaw detection liquid 2 is applied, and the ceramic substrate 1 is left for 5 to 20 minutes. Next, the container 102 is taken out of the flaw detection liquid tank 101, the ceramic substrate 1 is washed with shower water or immersed in water, the flaw detection liquid 2 on the surface is lightly washed off, and the container 102 is put into a drying chamber together with the container. It is performed in an atmosphere at 80 to 90 ° C. for 8 hours.

As another method, the ceramic substrate 1 is placed in a basket-like container 102 in the same manner as described above, and the container 102 is placed in a sealable container containing the flaw detection liquid 2, and the ceramic substrate 1 is placed in the container. Then, an inert gas is supplied and pressurized for the purpose of permeating the flaw detection liquid 2 into the cracks, left for 1 to 2 minutes, taken out, and washed and dried by the methods described above.

As shown in FIGS. 5 (a) and 5 (b), the flaw detection liquid 2 penetrates into the cracks 19 on the ceramic substrate 1 coated with the flaw detection liquid in this way, and can be easily inspected visually. .

[0006]

However, in the conventional method, in order to allow the flaw detection liquid 2 to penetrate into the cracks 19 of the ceramic substrate 1, the immersion time in the flaw detection liquid 2 shown in FIG. Alternatively, it is necessary to perform hermetic pressurization in the same state, which is troublesome and inefficient. Further, there has been a problem that subsequent washing and drying are also required for a long time.

In addition, since cleaning is performed manually, for example, as shown in FIG. 5A, cracks 19 of the ceramic substrate 1 and residual unevenness of the flaw detection liquid 2 are generated around the crack 19, and drying is performed as shown in FIG. Since the drying is performed in the drying chamber with the container 102 kept in the container 102, drying stains are generated on the surface of the ceramic substrate 1 due to the overlapping of the ceramic substrates 1. All of these have caused a decrease in the detection accuracy of the crack inspection.

[0008]

SUMMARY OF THE INVENTION The present invention has been made in view of the foregoing, and has been made in consideration of the above circumstances, and has been made so that a flaw detection solution applied to a ceramic substrate is penetrated into cracks by a porous roller pressed from above and below. It consists of a liquid application section, a cleaning section for washing off unnecessary flaw detection liquid, and a drying section. The flaw detection liquid application device is constructed by continuously providing these, so that flaw detection liquid application processing can be performed efficiently in a short time. Further, the penetration of the flaw detection liquid into the cracks is ensured, and the drying spot due to the uneven cleaning and the overlap can be prevented, so that the detection accuracy of the crack inspection can be improved.

[0009]

Embodiments of the present invention will be described below in detail.

As shown in FIG. 1, the flaw detection liquid application apparatus of the present invention comprises a flaw detection liquid application section A, a cleaning section B, and a drying section C.

The flaw detection liquid application section A is a flaw detection liquid tank 1 shown in FIG.
From 5, the flaw detection liquid 2 is supplied to the spray nozzle 5 by the circulation pump 16, sprayed onto the ceramic substrate 1, and then applied by the roller 8. Flaw detection liquid application part A
As shown in FIG.
While the wafer is conveyed in the direction of the arrow by the conveyance roller 14, the flaw detection liquid 2 is sprayed from above and below the ceramic substrate 1 by the spray nozzle 5.
And apply. Next, as shown in FIG. 2B, a pair of rollers 8 are pressed from above and below the ceramic substrate 1 to rub the flaw detection liquid 2 thereon.

The roller 8 is made of a porous material. For example, a porous resin such as a sponge roller shown in Table 1 is preferable. The diameter D1 of the roller 8 is 35 mm.
In the following, it is preferable that the pressure applied from above and below the ceramic substrate 1 be 3 to 5 kgf / cm ² . The basis for setting the diameter D1 of the roller 8 to 35 mmφ or less is that the flaw detection liquid application device of the present invention is a general-purpose machine that can support a general ceramic substrate, and the minimum outer side size of the general ceramic substrate is 25.4 mm. Therefore, in order to cope with this, the pitch P of the transport roller 14 is set to 25 mm, and since the diameter D2 of the transport roller 14 is 10 mm, the diameter D1 of the roller 8 interposed therebetween is a maximum of 3 mm.
5 mm.

The pressure at which the roller 8 is pressed from above and below the ceramic substrate 1 is set to 3 to 5 Kgf / cm ^{2 if the} pressure is less than 3 kgf / cm ^2.
Of the test solution 2 into the crack 19 of
If it exceeds gf / cm ² , the transport speed of the ceramic substrate 1 at the roller 8 becomes slow, and the ceramic substrate 1
This is because stagnation occurs.

In the above-described embodiment, the flaw detection liquid 2 is applied from the spray nozzle 5, but, for example, the flaw detection liquid 2 is supplied from the center of the roller 8, and the flaw detection liquid 2 is applied through the roller 8 and pressed. It can be made to penetrate cracks. When both sides of the ceramic substrate 1 are guaranteed, the flaw detection liquid 2 is applied to both sides as in the above-described embodiment. However, when only one side is guaranteed, the flaw detection liquid 2 is applied to only one side.
In such a case, a method of applying the flaw detection liquid 2 through the roller 8 is preferable.

Further, in this step, ultrasonic waves can be applied to the ceramic substrate 1 to further increase the degree of penetration into cracks.

[0016]

[Table 1]

Next, the cleaning section B comprises spray nozzles 6 and 6a and a water removing roller 9 as shown in FIG. The detailed description of the cleaning section B is as follows: As shown in FIG.
Sprays water 3 to wash off the flaw detection liquid 2. Next, FIG.
As shown in (b), the porous moisture removal roller 9
The water 3 on the surface of the ceramic substrate 1 is squeezed from above and below. In addition, a spray nozzle 6a is further provided above the water removing roller 9 on the side of the ceramic substrate 1 entering, but this is because the water removing roller 9 is easily stained with the flaw detection liquid 2, and the purpose is to wash the stain. Thus, the water 3 is sprayed on the water removing roller 9. The material, size, and pressure conditions of the water removing roller 9 in the cleaning section B are determined by the flaw detection liquid application section A.
Roller 8 is the same.

Further, as shown in FIG. 1, the drying section C comprises a water removing roller 10 for the ceramic substrate 1, a spray nozzle 7 for air blow, and a drier 11, and a ring blow to the spray nozzle 7. Add 17
Hot air is supplied from a hot air generator 18 to the dryer 11. As shown in FIG. 4A, the details of the drying section C are as follows. First, the moisture removing roller 10 is pressed from above and below the ceramic substrate 1. It is the same as the roller 8 in the section A, and the purpose is to squeeze out the water 3 remaining on the surface of the ceramic substrate 1 in the same manner as the water removing roller 9 in the washing section. Thereafter, air 4 is blown from above and below the ceramic substrate 1 by a spray nozzle 7 for air blow shown in FIG. In this air blow, there is a ceramic substrate 1 having a hole, and since water remains in the hole, a spray nozzle is provided from above and below the ceramic substrate 1 for the purpose of removing the water and removing the surface water. In step 7, the air 4 is blown at a pressure of 4 to 5 kgf / cm ^{2 at} an inclination angle of 15 to 20 ° from a direction opposite to the direction in which the ceramic substrate 1 is conveyed. Thereafter, as shown in FIG. 4C, the ceramic substrate 1 is transported to the dryer 11. The internal temperature of the dryer 11 is 80 to 150
℃, pipe 12 consists of four sets of upper and lower, one pipe 1
2, two nozzles 13 having a hole diameter of 2.5 mmφ are provided, and hot air is injected from the nozzles 13.

The effective width in which the ceramic substrate 1 of each of the flaw detection liquid application section A, the cleaning section B, and the drying section C of the flaw detection liquid application apparatus of the present invention can be processed is about 500 mm. In parallel up to the row, ceramic substrate 1
Flaw detection liquid application treatment.

With the above device configuration, for example, FIG.
To the crack 19 of the ceramic substrate 1 as shown in FIG.
As shown in FIG. 5 (b), the flaw detection liquid 2 can be automatically and reliably penetrated, and a clean treated surface free from coating unevenness and dry spots can be obtained.
It can be done in a short time in seconds.

[0021]

Embodiments of the present invention will be described below.

The ceramic substrate 1 used in the embodiment is made of Al
Consists ₂ O ₃ content of 96% alumina ceramic, as illustrated in FIG. 6 (a), perimeter size L1 = 62 mm, L
2 = 60 mm, diameter D3 of through hole 20 = 0.4 m
m, the distance L3 between the through hole 20 and the outer side of the ceramic substrate 1 was 0.8 mm. In addition, a length between the through hole 20 and the outer side of the ceramic substrate 1 is set to be 0.
An 8 mm crack 19 is formed, and as shown in FIG. 6B, the width W1 and W2 of the crack 19 are 2 to 4 μm, and the crack T penetrates the ceramic substrate 1 with the depth T = 0.64 mm. The presence of the crack 19 was confirmed with a microscope of 32 times magnification.

The ceramic substrate 1 is applied by the immersion treatment of the flaw detection liquid 2 shown in FIG. 7 (b) of the prior art, the one using the flaw detection liquid application apparatus according to the present invention shown in FIG. Sheet prepared. As the flaw detection solution 2, the dye permeation flaw detection solution shown in Table 2 was used. The processing of the ceramics substrate 1 of the flaw detection liquid application device of the present invention was performed continuously in five rows in parallel.

[0024]

[Table 2]

The same inspector visually inspected the cracks 19 on the ceramic substrate 1 subjected to the above-mentioned flaw detection liquid application treatment under illumination of a 100 W incandescent lamp, and compared the detection accuracy. First, as a result of comparing the processing time of the flaw detection liquid application processing according to the conventional technology and the flaw detection liquid application apparatus according to the present invention,
The flaw detection liquid application method according to the prior art uses a ceramic substrate 1
Was applied to 300 sheets of flaw detection liquid 2 and processing time required for washing was 20 minutes, and subsequent drying required 6 hours. In contrast, the processing time in the flaw detection liquid application device according to the present invention is:
300 sheets of ceramic substrate 1 are applied with flaw detection liquid, washed,
It took 15 minutes to perform drying, and efficient processing could be performed in a shorter time than in the prior art.

The results of comparison of the crack detection accuracy of the ceramic substrate 1 subjected to the above-described flaw detection liquid application show that the detection accuracy of the crack 19 of the ceramic substrate 1 subjected to the flaw detection liquid application processing by the conventional technique is 88.3%. On the other hand, the detection accuracy of the crack 19 of the ceramic substrate 1 processed by the flaw detection liquid application device according to the present invention was 100%, and the improvement of the crack detection accuracy was confirmed.

[0027]

According to the present invention, the flaw detection liquid is supplied from the flaw detection liquid tank to the spray nozzle, sprayed onto the ceramic substrate, and a porous roller is pressed from above and below the ceramic substrate to allow the flaw detection liquid to penetrate into the crack portion. The cleaning and drying system is continuously implemented, so that the flaw detection liquid can be applied efficiently and the flaw detection liquid permeates into cracks on the ceramic substrate. Since there is no drying spot, the detection accuracy of crack inspection can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of an apparatus for applying a test liquid for a ceramic substrate according to the present invention.

FIGS. 2A and 2B are cross-sectional views of a flaw detection liquid application unit of the flaw detection liquid application apparatus for a ceramic substrate according to the present invention.

FIGS. 3A and 3B are cross-sectional views of a cleaning unit of the apparatus for applying a test liquid for a ceramic substrate according to the present invention.

FIGS. 4A to 4C are cross-sectional views of a drying unit of the apparatus for applying a flaw detection liquid for a ceramic substrate according to the present invention.

5A is a plan view of a ceramic substrate, and FIG. 5B is a cross-sectional view of a crack portion of the ceramic substrate.

6A is a plan view of a ceramic substrate used in an example of the present invention, and FIG. 6B is a sectional view of a crack portion.

FIG. 7 is a view for explaining a conventional method for applying a test liquid.
(A) is a perspective view of the container and the ceramic substrate,
(B) is a sectional view of the ceramic substrate immersed in the flaw detection liquid tank.

[Explanation of symbols]

 1, ceramic substrate 2, flaw detection liquid 3, water 4, air 5, spray nozzle 6, 6a, spray nozzle 7, spray nozzle 8, roller 9, moisture removal roller 10, moisture removal roller 11, dryer 12, pipe 13, Nozzle 14, transport roller 15, flaw detection liquid tank 16, circulation pump 17, ring blow 18, hot air generator 19, crack 20, through hole 101, flaw detection liquid tank 102, container A, flaw detection liquid application section B, cleaning section C, Drying part D1, D2, D3, diameter P, pitch L1, L2, outer dimension L3, distance between outer edges T, depth W1, W2, width

Claims (1)

[Claims] 1. A flaw detection liquid application section in which a flaw detection liquid applied to a ceramic substrate is penetrated into cracks by a porous roller pressed from above and below, a cleaning section for washing off unnecessary flaw detection liquid, and a drying section. A flaw detection liquid application device for a ceramic substrate, comprising: