JPH02102652U - - Google Patents
Info
- Publication number
- JPH02102652U JPH02102652U JP988389U JP988389U JPH02102652U JP H02102652 U JPH02102652 U JP H02102652U JP 988389 U JP988389 U JP 988389U JP 988389 U JP988389 U JP 988389U JP H02102652 U JPH02102652 U JP H02102652U
- Authority
- JP
- Japan
- Prior art keywords
- electron
- backscattered
- control
- dose
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988389U JPH02102652U (OSRAM) | 1989-02-01 | 1989-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988389U JPH02102652U (OSRAM) | 1989-02-01 | 1989-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102652U true JPH02102652U (OSRAM) | 1990-08-15 |
Family
ID=31217023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP988389U Pending JPH02102652U (OSRAM) | 1989-02-01 | 1989-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102652U (OSRAM) |
-
1989
- 1989-02-01 JP JP988389U patent/JPH02102652U/ja active Pending
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