JPH02101623U - - Google Patents

Info

Publication number
JPH02101623U
JPH02101623U JP1090389U JP1090389U JPH02101623U JP H02101623 U JPH02101623 U JP H02101623U JP 1090389 U JP1090389 U JP 1090389U JP 1090389 U JP1090389 U JP 1090389U JP H02101623 U JPH02101623 U JP H02101623U
Authority
JP
Japan
Prior art keywords
electrode
substrate
resin layer
utility
solid state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1090389U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1090389U priority Critical patent/JPH02101623U/ja
Publication of JPH02101623U publication Critical patent/JPH02101623U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第2図は本考案に係る固体素子の実施
例を示し、第1図は上面図、第2図は側面図、第
3図〜第5図は従来の固体素子を示す図で、第1
図は上面図、第2図は側面図、第3図は固体素子
を複数箇設けたウエハーの概略上面図である。 1,11……基板、2,12……入力電極、3
,13……出力電極、15……樹脂層、6,7,
16,17……プロービングニードル。
1 to 2 show an embodiment of the solid-state device according to the present invention, FIG. 1 is a top view, FIG. 2 is a side view, and FIGS. 3 to 5 are views showing conventional solid-state devices. , 1st
The figure is a top view, FIG. 2 is a side view, and FIG. 3 is a schematic top view of a wafer provided with a plurality of solid-state devices. 1, 11...Substrate, 2, 12...Input electrode, 3
, 13... Output electrode, 15... Resin layer, 6, 7,
16, 17...probing needle.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板上にプロービング用の電極が形成されてな
る固定素子において、該電極上に樹脂層が形成さ
れてなる構成の固体素子。
A fixed element having a probing electrode formed on a substrate, and a solid state element having a structure in which a resin layer is formed on the electrode.
JP1090389U 1989-01-31 1989-01-31 Pending JPH02101623U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1090389U JPH02101623U (en) 1989-01-31 1989-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1090389U JPH02101623U (en) 1989-01-31 1989-01-31

Publications (1)

Publication Number Publication Date
JPH02101623U true JPH02101623U (en) 1990-08-13

Family

ID=31218977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1090389U Pending JPH02101623U (en) 1989-01-31 1989-01-31

Country Status (1)

Country Link
JP (1) JPH02101623U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593943A (en) * 1982-06-29 1984-01-10 Fujitsu Ltd Manufacture of semiconductor device
JPS63198346A (en) * 1987-02-13 1988-08-17 Matsushita Electronics Corp Semiconductor integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593943A (en) * 1982-06-29 1984-01-10 Fujitsu Ltd Manufacture of semiconductor device
JPS63198346A (en) * 1987-02-13 1988-08-17 Matsushita Electronics Corp Semiconductor integrated circuit

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