JPH02101528U - - Google Patents

Info

Publication number

JPH02101528U

JPH02101528U JP862689U JP862689U JPH02101528U JP H02101528 U JPH02101528 U JP H02101528U JP 862689 U JP862689 U JP 862689U JP 862689 U JP862689 U JP 862689U JP H02101528 U JPH02101528 U JP H02101528U

Authority

JP

Japan

Prior art keywords

bell gear

cvd

susceptor

wafer

auxiliary heater

Prior art date

1989-01-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
• 229910052799 carbon Inorganic materials 0.000 claims 2
• 238000010926 purge Methods 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000006698 induction Effects 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 239000000112 cooling gas Substances 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1

Cited By (1)