JPH02100036A - Film exposing device and film exposing method using device - Google Patents

Abstract

PURPOSE:To enable accurate positioning by detecting the position of a film which is fed in a slacking state from a film supply reel to a supply-side friction roller and from a take-up side friction roller to a film take-up reel at the upper and lower positions. CONSTITUTION:The position of the film which is fed in the slacking state without no tension from the film supply reel 1 to the supply-side friction roller 31 is detected at the two upper and lower positions by 1st and 2nd photosensors 33a and 33b, and 34a and 34b respectively. Further, the position of the film which is conveyed in the slacking state without tension from the take-up side friction roller 32 to the film take-up reel 4 is detected at the two upper and lower positions by 3rd and 4th photosensors 36a and 36b, and 37a and 37b. Consequently, the high-accuracy positioning is performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a film exposure apparatus mainly used for producing flexible printed circuits and a method using the apparatus.

[Prior art] In general, assembly of semiconductor elements using the film rear method,
Flexible printed circuits (hereinafter referred to as FPCs) used in liquid crystal boards, cameras, calculators, IC carts, etc.
) has a thickness of 25g to 125I as the base material.
Polyester films and polyimide films of about L+++ are used.

In this kind of FPC film, the mounting pattern is exposed by an exposure device and goes through processes such as etching.
It is mounted by element gabonding etc.

FIG. 4 is a diagram showing a schematic configuration of a conventional film exposure apparatus, in which 7 is a projector that projects a pattern on a reticle 8 onto an FPC film 12, and inside it is a light source 9. Optical system including integrator lens 10. It includes a projection lens 11 and the like. Also, film supply reel l
Since the FPC film 12 and the spacer film 13 for preventing damage are wrapped around each other, the spacer film 13
is wound onto another first reel 14, and the FPC film 12 is wound onto another first reel 14.
Only the film is sent to the film take-up reel 4. The FPC film 12 sent to the film take-up reel 4 is overlapped with another spacer film 13 for preventing damage, and then wound.

This spacer film 13 is connected to the first glue 14
It may be brought from a separate second reel 15.

The FPC film 12 is transported by a pair of pinch rollers 16 and a fixed size feed roller 1 driven by a stepping motor (not shown).
7 and is fed by fixed size feed rollers 17. 18 and 19 are guide rollers that are generally provided as needed. Also, 2 and 5 are the first. The second tension roller is used to apply the necessary tension when supplying and winding the film.

In the configuration shown in Fig. 4, feeding accuracy and FPC film 12
It is required that the accuracy of the resting position when the film is stopped is high, but in conjunction with the operation of the film supply reel 1
The tension roller 2 and the second tension roller 5 are moved up and down at appropriate times to apply the necessary tension to prevent the film from sagging while the film is fed and wound. At this time, ideally the tension generated on the film supply side and the tension generated on the film winding side should be constant, but in reality they vary. Considering this on the film supply side, FPC film 1
2 is gradually supplied, the winding diameter of this FPC film 12 changes, and the first tension roller 2 is rotated in an arc shape by the fulcrum 20 and arm 21 that direct the first tension roller 2. Therefore, the angle formed by the film portions A and A2 located before and after the first tension roller 2 constantly changes.

A similar phenomenon occurs on the second side, which is the winding side of the FPC film 12.
This also occurs at the tension roller 5 position.

For this reason, the tension value of the FPC film 12 changes unstably, and the "slip amount" when the fixed-size feed roller 17 is operated changes. On the other hand, when the fixed size feed roller 17 is stopped, a positioning pin (on the stage 30) is inserted into the perforation provided at the edge of the FPC film 12, and when the FPC film 12 is completely and accurately positioned, the stage 30 After the upper bottle is inserted to some extent halfway into the perforation, the friction of the sizing feed roller 17 is released, but at this time, if a positional shift occurs due to the tension imbalance, the perforation may be etched.

The perforations widened, making accurate positioning impossible.

[Problems to be Solved by the Invention] Since FPCs are used as mounting boards for ICs and the like in film exposure apparatuses, high accuracy is often required, such as an error range of 10 g. The film is held by a pinch roller and a sizing feed roller driven by a stepping motor, and is fed by friction with the sizing feed roller, and the accuracy of this feeding must be within a few digits. In order for the film to be fed between the supply side and the take-up side with constant tension, the tension applied to both the supply and take-up sides must be constant.

Conventional film exposure equipment is equipped with tension rollers to apply tension to the film supply side and take-up side, and it is difficult to match the speed at which the film is fed and the speed at which the roller moves up and down. If this is not done properly, unnecessary slack and tension will occur in the film. Film is fed by friction, so if a tension imbalance occurs above a certain level between the film supply side and the film take-up side, the film may slip due to the tension, even if the film is being fed smoothly. Therefore, a brake is used to prevent tension imbalance.However, reducing the tension mechanism to prevent unnecessary tension and slack due to the reaction of that tension is important because as the feed speed increases, the tension roller becomes less able to follow the tension. There was a problem that it would be difficult.

In addition, a proposal has been made to solve the above problem by providing an auxiliary roller between the film supply reel and the tension roller and moving the tension roller linearly (Japanese Patent Application No. 1983, filed by the same applicant as this application). -1389
No. 01 and Japanese Patent Application No. 62-22401), it has been found that the use of a tension roller itself has problems.

In other words, when the film feeding speed by the supply reel is higher than the fixed-length feeding speed, the film bends and descends, and the tension roller rises above the film due to inertia and then falls onto the film, resulting in an unnecessary amount of film being fed out. It depends on the tension or the film.

In addition, when the film feeding speed by the supply reel is lower than the fixed-length feed speed, the tension roller rises and fixed-length feed ends, and when the film stops at a predetermined position, the tension roller jumps due to inertia, and then the film As the film falls upward, more tension than necessary is applied to the film as before.

If the tension roller is rising when fixed-length feed is stopped, the tension roller rises above the film surface due to inertia and then falls to the film surface, at which time a large tension is applied to the film.

Further, when the tension roller is descending, the film is strongly pulled due to the sudden stop of the tension roller, and a large tension is applied to the film. The same thing happens when the reels start and stop.

As described above, due to the difference in speed between fixed-length feed and film feed, when the tension roller floats or jumps due to inertia and falls onto the film, more tension than necessary is applied. As a result, when the film is stopped, the exposure pattern may shift due to frame misalignment between the perforations and the bin, and the perforations may be damaged, and when the film is being advanced, the film may slip.
There was a problem in that an error occurred in the stop position and positioning could not be performed correctly.

The present invention has been made to solve the above problems, and includes a film exposure device and its film exposure device that can remove unnecessary tension from film transport and smoothly transport the film without causing any slack associated with the film transport. The purpose is to provide a method of using the device.

[Means for Solving the Problems] In order to achieve the above object, the first invention provides a system in which friction rollers that apply tension to the film exposed at a predetermined position are provided on the supply side and the winding side of the film. A first sensor is installed at two locations above and below to detect the position of the film being transported in a flexed state without any tension between the film supply reel and the friction roller on the supply side.
゜The second photosensor and the third sensor detect the position of the film being transported in a bent state without any tension between the friction roller on the winding side and the film winding reel at two upper and lower locations. In the second invention, the friction roller on the take-up side also serves as a fixed-length feed roller for transporting the film, and the friction roller on the supply side serves as a fixed-length feed roller for transporting the film. The third invention has a control function during film transport, and the third invention is based on the first film provided on the supply side of the apparatus of the first invention. After the first photosensor detects the bent bottom of the film being transferred in a bent state, the film supply reel starts feeding the film, and the film is transferred to the second photosensor. It stops when the bending bottom is detected, and furthermore, the third... After the bottom of the film is detected by the fourth photosensor, winding by the film take-up reel is started, and when the bottom of the film is detected by the third photosensor. A fourth invention is a method for stopping the transport of a film, and a fourth invention is a method of the first invention, which includes a torque roller that applies tension to the film fed out from the film supply reel and a tension roller that applies tension to the film that is wound onto the film take-up reel. It has a configuration in which a torque roller is provided.

[Function] With each of the above configurations, the force applied to the exposed film is always constant, so highly accurate positioning is possible.

[Embodiment] FIG. 1 is a diagram showing a schematic configuration of an embodiment of a film exposure apparatus according to the present invention. In FIG. 1, 31 is a pair of friction rollers provided on the supply side, 32 is a pair of friction rollers provided on the winding side, and 33a
, 33b are the light emitting part and light receiving part of the first photosensor provided at the upper part of the film supply side, 34a and 34b are the light emitting part and light receiving part of the second photosensor provided at the lower part of the supply side, and 35 is the light receiving part The stage lifting mechanism 36a and 36b move the stage 30 up and down, and the light emitting part and light receiving part 37a and 3 of the third photosensor are provided at the upper part of the film winding side.
7b is a light emitting part and a light receiving part of a fourth photosensor provided at the lower part of the winding side, 38 is a nozzle for blowing compressed air onto the film to be exposed, and the same reference numerals as in FIG. Indicates the same or equivalent part.

FIG. 2 shows the first filter installed on the supply side of the film exposure apparatus shown in FIG. 7 is a time chart showing a state in which film supply is controlled by a second photosensor.

The film supply shown in FIG. Although it is controlled by the second photosensor, the film is fed during exposure on the stage 30 by rotating a stepping motor (not shown) in response to a fixed-length feed signal. This fixed size feed signal is transmitted to the first and second photosensors when the film is detected (
OFF), a predetermined number of pulses are sent to the stepping motor at predetermined intervals regardless of whether it is detected or not (ON). In this embodiment, the friction roller 32 on the winding side is connected to a stepping motor and also serves as a fixed-length feed roller.

Below, during film feeding in Figure 1, the film supply side is
The explanation will be based on the time chart shown in the figure.

■First photosensor 33 located at the top of the film supply side
a, 33b are OFF, the second photosensors 34a, 3
4b is ON, that is, a state in which the bending bottom portion 13a of the film is located at an intermediate height between the first photosensors 33a, 33b and the second photosensors 34a, 34b is defined as an initial state.

Next, a stepping motor (not shown) receives a fixed-length feed signal, and the friction roller 32 feeds the film by a fixed length.

(2) After the film is fed several times by a fixed size step, the film is fed and the flexible bottom portion 13a rises, and at time A, the first photosensors 33a and 33b are turned on.

■At time A1, the first photosensors 33a and 33b are turned off.
When the temperature reaches N, the film supply reel 1 is simultaneously driven to supply the film, so the film bends again and the first photosensors 33a and 33b become 0FF (time A2), but the film supply reel 1 continues to supply the film. As the film continues to bend, the film bends even more.

(2) When the film supply reel 1 is further driven and the film continues to be fed out, the bending bottom portion 13a of the film turns off the second photosensors 34a and 34b at time A3.

Next, the film supply reel 1 stops driving by detecting the OFF signals of the second photosensors 34a and 34b.
Film advance stops.

(2) During this period, constant feeding continues without interruption, and the bent bottom portion 13a of the film gradually rises again, and at time B□, the operations of (1) to (2) are repeated.

Further, on the winding side, similarly to the supply side, third photosensors 36a, 36b, fourth photosensors 37a, 37
b, and the third photosensors 36a, 36
When b is ON, there is little deflection of the film, so the film take-up reel 4 starts winding, and then the fourth photosensor 37a.

37b detects the film and stops the last spring taking, but the detailed explanation will be omitted as it is the same as that on the supply side.

The stage 30 in FIG. 1 is raised and lowered by a stage lifting mechanism 35 consisting of an air cylinder, a linear guide, etc. After the film has stopped at the exposure position and the bottle has been inserted into the perforation, the vacuum mechanism is activated to lift the film to the ONL. Vacuum adsorption.

Further, the shaft of the lower roller of the friction roller 32 on the winding side is connected to a stepping motor (not shown) via a gear and a toothed belt.

Furthermore, compressed air is injected from the nozzle 38 onto the surface of the film above a predetermined position to remove dust from the film surface, as the film is fed a fixed length and stopped at a predetermined position.

FIG. 3 is a diagram showing a schematic configuration of main parts in another embodiment of the present invention, and 39.40 is a torque roller. Further, since the same reference numerals as in FIG. 1 have the same or equivalent functions, their explanation will be omitted.

When a large amount of film is to be supplied, the film supply reel l becomes large. In this case, when the remaining amount of film on the film supply reel l decreases, the film becomes more sagging.
Detection by the photosensors 33a, 33b, 34a, and 34b will not be successful. Also, film supply reel l
If the size of the film becomes large, the film supply reel l may have to be installed at a position away from the guide roller 18 or at a position lower than the guide roller 18, as shown in FIG. 3, due to space problems. Also in this case, the photosensors 33a, 33b, 34a.

It is difficult to form a deflection of the film in the detection circuit part 34b. Therefore, a torque roller 39 having its own torque generated by a dedicated torque motor is arranged as shown in FIG. The torque roller 39 applies torque in the same direction as the film supply reel 1 to give tension to the film fed out from the film supply reel 1 so that it does not sag, and between the torque roller 39 and the friction roller 31. to bend the film.

Incidentally, a torque roller 40 is similarly provided on the winding side, and the torque roller 40 is conversely connected to the film winding reel 4.
Apply torque in the opposite direction to the film take-up hanger 4.
This prevents the film being wound from bending. The other configurations and operations are the same as those in FIG. 1, so their explanations will be omitted.

[Effects of the Invention] As explained above, in film exposure according to the present invention, the tension applied to the exposed film is mainly determined only by the tension applied by the two friction rollers, and is determined by the winding diameter of the supply reel and take-up reel. It is always constant because it is not affected by Also, there is no need to use conventional tension rollers. Therefore, there is no shift in the exposed pattern due to a shift in the film stop position, and no damage to the perforations occurs.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a schematic configuration of an embodiment of a film exposure apparatus according to the present invention, and FIG. 2 is a diagram showing a film supply by a first and second photosensor provided on the supply side of the film exposure apparatus of FIG. 1. FIG. 3 is a diagram showing a schematic configuration of main parts in another embodiment of the present invention, and FIG. 4 is a diagram showing a schematic configuration of a conventional film exposure apparatus. In the figure. 1: Film supply reel 4: Film take-up reel 31, : 12: Friction roller 33a on the supply side or take-up side: Light emitting part 33b of the first photosensor: Light receiving part 34a of the first photosensor: Second 7 Light-emitting part 34b of the photo sensor: Light-receiving part 36a of the second photosensor: Light-emitting part 36b of the third photosensor = Light-receiving part 37a of the third photosensor: Light-emitting part 37b of the fourth photosensor = Fourth Photosensor light receiving section 35: Stage lifting mechanism 39.40: Torque roller agent Patent attorney 1) Haru Kitatake Figure 1

Claims (4)

[Claims] (1) At a predetermined position until the film sent out from the film supply reel is wound onto the film take-up reel,
In a film exposure device that exposes the film by being irradiated with light that has passed through a reticle, friction rollers are provided on the film supply side and winding side to apply tension to the film to be exposed at the predetermined position. First and second photosensors detect the position of the film being transported in a flexed state with no tension applied up to the friction roller on the supply side at two locations above and below, and the film is wound from the friction roller on the winding side. The third and fourth sensors detect the position of the film being transported in a flexed state with no tension applied to the reel at two locations above and below.
1. A film exposure apparatus comprising: a photosensor. (2) Claim (1) characterized in that the friction roller on the winding side also serves as a fixed-size feed roller for transporting the film, and the friction roller on the supply side has a control function when transporting the film. ) The film exposure apparatus described in . (3) At a predetermined position until the film sent out from the film supply reel is wound onto the film take-up reel,
In a film exposure method using a film exposure device that exposes the film by irradiation with light passing through a reticle, friction rollers are provided on the film supply side and the film winding side to apply tension to the film exposed at the predetermined position. The first and second photosensors detect the position of the film being transported in a flexed state with no tension between the film supply reel and the friction roller on the supply side at two locations above and below, and Between the friction roller and the film take-up reel, the position of the film being transported in a flexed state with no tension is detected at two locations above and below by a third and fourth photosensor, and is provided on the supply side. After the bent bottom of the film being transferred in the bent state is detected by the first photosensor among the first and second photosensors, feeding of the film by the film supply reel is started. The film stops when the bottom of the film is detected by the second photosensor, and further, of the third and fourth photosensors provided on the winding side, the bottom of the film is detected by the fourth photosensor. The film exposure method is characterized in that the film winding reel starts winding the film, and stops transporting the film when the bottom of the film is detected by a third photosensor. (4) At a predetermined position until the film sent out from the film supply reel is wound onto the film take-up reel,
In a film exposure device that exposes the film by being irradiated with light that has passed through a reticle, friction rollers are provided on the film supply side and winding side to apply tension to the film to be exposed at the predetermined position. A supply side torque roller that applies tension to the film being sent out and a take-up side torque roller that applies tension to the film wound on the film take-up reel are provided, and the tension is controlled between the supply side torque roller and the supply side friction roller. The first and second photosensors detect the position of the film being transported in a state where it is not bent and is being transported at two locations above and below, and the film is being transported in a state where the film is not bent and is not under tension between the friction roller on the winding side and the torque roller on the winding side. 1. A film exposure apparatus comprising: third and fourth photosensors for detecting the position of a film being transported in an open state at two locations, upper and lower.