JPH0196648U - - Google Patents
Info
- Publication number
- JPH0196648U JPH0196648U JP19384887U JP19384887U JPH0196648U JP H0196648 U JPH0196648 U JP H0196648U JP 19384887 U JP19384887 U JP 19384887U JP 19384887 U JP19384887 U JP 19384887U JP H0196648 U JPH0196648 U JP H0196648U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- closed
- chamber
- acceleration
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims 6
Description
第１図は本考案の実施例による電子ビーム銃の
断面図及び第２図は従来例の電子ビーム銃の断面
図である。
なお図において、Ｐ……排気源、２１，２２，
２３……配管、２０……密閉連絡室、Ｖ２，Ｖ３
……バルブ。
FIG. 1 is a sectional view of an electron beam gun according to an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional electron beam gun. In the figure, P...exhaust source, 21, 22,
23... Piping, 20... Sealed communication room, V 2 , V 3
……valve.
Claims (1)
ソードと対向して配設される加速用アノードを収
納した密閉加速室と、該密閉加速室からの電子ビ
ームが導入される密閉電子ビーム処理室と前記電
子ビーム処理室と前記加速室とを連絡し、前記カ
ソードから発生し、前記加速用アノードにより加
速された電子ビームを通過させるための筒体から
成り、前記加速室及び前記電子ビーム処理室を各
々排気するようにした電子ビーム銃において、共
通の排気源を密閉連絡部に接続し、該密閉連絡部
を各配管及び各バルブを介して前記密閉加速室及
び前記密閉電子ビーム処理室に接続したことを特
徴とする電子ビーム銃。 a closed acceleration chamber housing at least a cathode that generates thermoelectrons and an accelerating anode disposed opposite to the cathode; a closed electron beam processing chamber into which an electron beam from the closed acceleration chamber is introduced; and the electron beam It is comprised of a cylindrical body that connects the processing chamber and the acceleration chamber, through which the electron beam generated from the cathode and accelerated by the acceleration anode passes, and exhausts the acceleration chamber and the electron beam processing chamber, respectively. In the electron beam gun, a common exhaust source is connected to a sealed communication section, and the sealed communication section is connected to the closed acceleration chamber and the closed electron beam processing chamber through each piping and each valve. An electron beam gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19384887U JPH0196648U (en) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19384887U JPH0196648U (en) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196648U true JPH0196648U (en) | 1989-06-27 |
Family
ID=31484620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19384887U Pending JPH0196648U (en) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196648U (en) |
-
1987
- 1987-12-21 JP JP19384887U patent/JPH0196648U/ja active Pending