JPH0195595U - - Google Patents

Info

Publication number
JPH0195595U
JPH0195595U JP19118587U JP19118587U JPH0195595U JP H0195595 U JPH0195595 U JP H0195595U JP 19118587 U JP19118587 U JP 19118587U JP 19118587 U JP19118587 U JP 19118587U JP H0195595 U JPH0195595 U JP H0195595U
Authority
JP
Japan
Prior art keywords
molecular pump
turbo
vacuum chamber
vacuum
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19118587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19118587U priority Critical patent/JPH0195595U/ja
Publication of JPH0195595U publication Critical patent/JPH0195595U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP19118587U 1987-12-16 1987-12-16 Pending JPH0195595U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19118587U JPH0195595U (ko) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19118587U JPH0195595U (ko) 1987-12-16 1987-12-16

Publications (1)

Publication Number Publication Date
JPH0195595U true JPH0195595U (ko) 1989-06-23

Family

ID=31482110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19118587U Pending JPH0195595U (ko) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0195595U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007224924A (ja) * 2007-05-11 2007-09-06 Boc Edwards Kk 真空ポンプ
KR100880504B1 (ko) * 2001-11-16 2009-01-28 에드워즈 가부시키가이샤 진공 펌프

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100880504B1 (ko) * 2001-11-16 2009-01-28 에드워즈 가부시키가이샤 진공 펌프
JP2007224924A (ja) * 2007-05-11 2007-09-06 Boc Edwards Kk 真空ポンプ

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