JPS63138496U - - Google Patents
Info
- Publication number
- JPS63138496U JPS63138496U JP3141087U JP3141087U JPS63138496U JP S63138496 U JPS63138496 U JP S63138496U JP 3141087 U JP3141087 U JP 3141087U JP 3141087 U JP3141087 U JP 3141087U JP S63138496 U JPS63138496 U JP S63138496U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- rotor
- wall surface
- molecular pump
- turbo molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035699 permeability Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141087U JPS63138496U (ko) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141087U JPS63138496U (ko) | 1987-03-04 | 1987-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63138496U true JPS63138496U (ko) | 1988-09-12 |
Family
ID=30837114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3141087U Pending JPS63138496U (ko) | 1987-03-04 | 1987-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63138496U (ko) |
-
1987
- 1987-03-04 JP JP3141087U patent/JPS63138496U/ja active Pending