JPH0192137U - - Google Patents

Info

Publication number
JPH0192137U
JPH0192137U JP18823287U JP18823287U JPH0192137U JP H0192137 U JPH0192137 U JP H0192137U JP 18823287 U JP18823287 U JP 18823287U JP 18823287 U JP18823287 U JP 18823287U JP H0192137 U JPH0192137 U JP H0192137U
Authority
JP
Japan
Prior art keywords
buffer plate
side walls
piece
wafer
elastic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18823287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729640Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18823287U priority Critical patent/JPH0729640Y2/ja
Publication of JPH0192137U publication Critical patent/JPH0192137U/ja
Application granted granted Critical
Publication of JPH0729640Y2 publication Critical patent/JPH0729640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP18823287U 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板 Expired - Lifetime JPH0729640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18823287U JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18823287U JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Publications (2)

Publication Number Publication Date
JPH0192137U true JPH0192137U (ro) 1989-06-16
JPH0729640Y2 JPH0729640Y2 (ja) 1995-07-05

Family

ID=31479338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18823287U Expired - Lifetime JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Country Status (1)

Country Link
JP (1) JPH0729640Y2 (ro)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06501668A (ja) * 1991-03-08 1994-02-24 フルオロウェア・インコーポレーテッド シッパ用ウェハ―コンテナ
JPH0672482A (ja) * 1992-05-26 1994-03-15 Empak Inc 基板ウェファー懸架容器、基板ウェファー懸架装置、及び基板ウェファー懸架容器に挿入するためのクッション
WO2009131016A1 (ja) * 2008-04-25 2009-10-29 信越ポリマー株式会社 リテーナ、及びリテーナを備えた基板収納容器
JP2014093400A (ja) * 2012-11-02 2014-05-19 Shin Etsu Polymer Co Ltd ウェーハカセットの梱包体

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06501668A (ja) * 1991-03-08 1994-02-24 フルオロウェア・インコーポレーテッド シッパ用ウェハ―コンテナ
JPH0672482A (ja) * 1992-05-26 1994-03-15 Empak Inc 基板ウェファー懸架容器、基板ウェファー懸架装置、及び基板ウェファー懸架容器に挿入するためのクッション
WO2009131016A1 (ja) * 2008-04-25 2009-10-29 信越ポリマー株式会社 リテーナ、及びリテーナを備えた基板収納容器
US8118169B2 (en) 2008-04-25 2012-02-21 Shin-Etsu Polymer Co., Ltd. Retainer and substrate storage container provided with same retainer
JP5270668B2 (ja) * 2008-04-25 2013-08-21 信越ポリマー株式会社 リテーナ、及びリテーナを備えた基板収納容器
JP2014093400A (ja) * 2012-11-02 2014-05-19 Shin Etsu Polymer Co Ltd ウェーハカセットの梱包体

Also Published As

Publication number Publication date
JPH0729640Y2 (ja) 1995-07-05

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