JPH019163Y2 - - Google Patents
Info
- Publication number
- JPH019163Y2 JPH019163Y2 JP11547384U JP11547384U JPH019163Y2 JP H019163 Y2 JPH019163 Y2 JP H019163Y2 JP 11547384 U JP11547384 U JP 11547384U JP 11547384 U JP11547384 U JP 11547384U JP H019163 Y2 JPH019163 Y2 JP H019163Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- horizontal
- engagement
- side frames
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000630 rising effect Effects 0.000 claims description 16
- 235000012431 wafers Nutrition 0.000 description 19
- 239000000969 carrier Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11547384U JPS6133442U (ja) | 1984-07-28 | 1984-07-28 | ウエハ用キヤリヤのハンドリング治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11547384U JPS6133442U (ja) | 1984-07-28 | 1984-07-28 | ウエハ用キヤリヤのハンドリング治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6133442U JPS6133442U (ja) | 1986-02-28 |
JPH019163Y2 true JPH019163Y2 (cs) | 1989-03-13 |
Family
ID=30674443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11547384U Granted JPS6133442U (ja) | 1984-07-28 | 1984-07-28 | ウエハ用キヤリヤのハンドリング治具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6133442U (cs) |
-
1984
- 1984-07-28 JP JP11547384U patent/JPS6133442U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6133442U (ja) | 1986-02-28 |
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