JPH019152Y2 - - Google Patents

Info

Publication number
JPH019152Y2
JPH019152Y2 JP14734484U JP14734484U JPH019152Y2 JP H019152 Y2 JPH019152 Y2 JP H019152Y2 JP 14734484 U JP14734484 U JP 14734484U JP 14734484 U JP14734484 U JP 14734484U JP H019152 Y2 JPH019152 Y2 JP H019152Y2
Authority
JP
Japan
Prior art keywords
substrate
mask
holder
front surface
thick substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14734484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163831U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14734484U priority Critical patent/JPH019152Y2/ja
Publication of JPS6163831U publication Critical patent/JPS6163831U/ja
Application granted granted Critical
Publication of JPH019152Y2 publication Critical patent/JPH019152Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP14734484U 1984-10-01 1984-10-01 Expired JPH019152Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14734484U JPH019152Y2 (en, 2012) 1984-10-01 1984-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14734484U JPH019152Y2 (en, 2012) 1984-10-01 1984-10-01

Publications (2)

Publication Number Publication Date
JPS6163831U JPS6163831U (en, 2012) 1986-04-30
JPH019152Y2 true JPH019152Y2 (en, 2012) 1989-03-13

Family

ID=30705573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14734484U Expired JPH019152Y2 (en, 2012) 1984-10-01 1984-10-01

Country Status (1)

Country Link
JP (1) JPH019152Y2 (en, 2012)

Also Published As

Publication number Publication date
JPS6163831U (en, 2012) 1986-04-30

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