JPH0189957U - - Google Patents

Info

Publication number
JPH0189957U
JPH0189957U JP18637087U JP18637087U JPH0189957U JP H0189957 U JPH0189957 U JP H0189957U JP 18637087 U JP18637087 U JP 18637087U JP 18637087 U JP18637087 U JP 18637087U JP H0189957 U JPH0189957 U JP H0189957U
Authority
JP
Japan
Prior art keywords
gas
distribution chamber
shower electrode
outlet holes
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18637087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543096Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987186370U priority Critical patent/JPH0543096Y2/ja
Publication of JPH0189957U publication Critical patent/JPH0189957U/ja
Application granted granted Critical
Publication of JPH0543096Y2 publication Critical patent/JPH0543096Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987186370U 1987-12-09 1987-12-09 Expired - Lifetime JPH0543096Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987186370U JPH0543096Y2 (enrdf_load_stackoverflow) 1987-12-09 1987-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987186370U JPH0543096Y2 (enrdf_load_stackoverflow) 1987-12-09 1987-12-09

Publications (2)

Publication Number Publication Date
JPH0189957U true JPH0189957U (enrdf_load_stackoverflow) 1989-06-13
JPH0543096Y2 JPH0543096Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=31477600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987186370U Expired - Lifetime JPH0543096Y2 (enrdf_load_stackoverflow) 1987-12-09 1987-12-09

Country Status (1)

Country Link
JP (1) JPH0543096Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置
JPS6187319A (ja) * 1984-10-05 1986-05-02 Hitachi Ltd プラズマを用いた化学気相成膜装置
JPS6187872A (ja) * 1984-10-05 1986-05-06 Hitachi Ltd 平行平板型プラズマｃｖｄ装置のアノ−ド電極

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6137969A (ja) * 1984-07-31 1986-02-22 Canon Inc プラズマｃｖｄ薄膜製造装置
JPS6187319A (ja) * 1984-10-05 1986-05-02 Hitachi Ltd プラズマを用いた化学気相成膜装置
JPS6187872A (ja) * 1984-10-05 1986-05-06 Hitachi Ltd 平行平板型プラズマｃｖｄ装置のアノ−ド電極

Also Published As

Publication number Publication date
JPH0543096Y2 (enrdf_load_stackoverflow) 1993-10-29

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