JPS6263931U - - Google Patents

Info

Publication number
JPS6263931U
JPS6263931U JP15621385U JP15621385U JPS6263931U JP S6263931 U JPS6263931 U JP S6263931U JP 15621385 U JP15621385 U JP 15621385U JP 15621385 U JP15621385 U JP 15621385U JP S6263931 U JPS6263931 U JP S6263931U
Authority
JP
Japan
Prior art keywords
discharge hole
view
semiconductor wafer
gas
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15621385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15621385U priority Critical patent/JPS6263931U/ja
Publication of JPS6263931U publication Critical patent/JPS6263931U/ja
Pending legal-status Critical Current

Links

JP15621385U 1985-10-11 1985-10-11 Pending JPS6263931U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15621385U JPS6263931U (enrdf_load_stackoverflow) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15621385U JPS6263931U (enrdf_load_stackoverflow) 1985-10-11 1985-10-11

Publications (1)

Publication Number Publication Date
JPS6263931U true JPS6263931U (enrdf_load_stackoverflow) 1987-04-21

Family

ID=31077624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15621385U Pending JPS6263931U (enrdf_load_stackoverflow) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPS6263931U (enrdf_load_stackoverflow)

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