JPH0189740U - - Google Patents

Info

Publication number
JPH0189740U
JPH0189740U JP18508987U JP18508987U JPH0189740U JP H0189740 U JPH0189740 U JP H0189740U JP 18508987 U JP18508987 U JP 18508987U JP 18508987 U JP18508987 U JP 18508987U JP H0189740 U JPH0189740 U JP H0189740U
Authority
JP
Japan
Prior art keywords
buffer
heat treatment
type heat
treatment furnace
furnace according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18508987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069504Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987185089U priority Critical patent/JPH069504Y2/ja
Publication of JPH0189740U publication Critical patent/JPH0189740U/ja
Application granted granted Critical
Publication of JPH069504Y2 publication Critical patent/JPH069504Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1987185089U 1987-12-04 1987-12-04 バッファ型熱処理炉 Expired - Lifetime JPH069504Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987185089U JPH069504Y2 (ja) 1987-12-04 1987-12-04 バッファ型熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987185089U JPH069504Y2 (ja) 1987-12-04 1987-12-04 バッファ型熱処理炉

Publications (2)

Publication Number Publication Date
JPH0189740U true JPH0189740U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-13
JPH069504Y2 JPH069504Y2 (ja) 1994-03-09

Family

ID=31476417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987185089U Expired - Lifetime JPH069504Y2 (ja) 1987-12-04 1987-12-04 バッファ型熱処理炉

Country Status (1)

Country Link
JP (1) JPH069504Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016163025A (ja) * 2015-03-05 2016-09-05 三菱電機株式会社 半導体製造装置および半導体デバイスの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325364A (en) * 1976-08-23 1978-03-09 Hitachi Ltd Hydrogen combustion type oxidation furnace
JPS58116737A (ja) * 1981-12-30 1983-07-12 Oki Electric Ind Co Ltd 半導体ウエハの熱処理装置
JPS6218039A (ja) * 1985-07-17 1987-01-27 Tdk Corp 半導体ウエフアの酸化装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325364A (en) * 1976-08-23 1978-03-09 Hitachi Ltd Hydrogen combustion type oxidation furnace
JPS58116737A (ja) * 1981-12-30 1983-07-12 Oki Electric Ind Co Ltd 半導体ウエハの熱処理装置
JPS6218039A (ja) * 1985-07-17 1987-01-27 Tdk Corp 半導体ウエフアの酸化装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016163025A (ja) * 2015-03-05 2016-09-05 三菱電機株式会社 半導体製造装置および半導体デバイスの製造方法

Also Published As

Publication number Publication date
JPH069504Y2 (ja) 1994-03-09

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