JPS5325364A - Hydrogen combustion type oxidation furnace - Google Patents
Hydrogen combustion type oxidation furnaceInfo
- Publication number
- JPS5325364A JPS5325364A JP9969676A JP9969676A JPS5325364A JP S5325364 A JPS5325364 A JP S5325364A JP 9969676 A JP9969676 A JP 9969676A JP 9969676 A JP9969676 A JP 9969676A JP S5325364 A JPS5325364 A JP S5325364A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen combustion
- combustion type
- oxidation furnace
- type oxidation
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9969676A JPS5325364A (en) | 1976-08-23 | 1976-08-23 | Hydrogen combustion type oxidation furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9969676A JPS5325364A (en) | 1976-08-23 | 1976-08-23 | Hydrogen combustion type oxidation furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5325364A true JPS5325364A (en) | 1978-03-09 |
Family
ID=14254201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9969676A Pending JPS5325364A (en) | 1976-08-23 | 1976-08-23 | Hydrogen combustion type oxidation furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5325364A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58122739A (en) * | 1982-01-18 | 1983-07-21 | Hitachi Ltd | Oxidation diffusion furnace |
JPS6144833U (en) * | 1984-08-27 | 1986-03-25 | 新日本無線株式会社 | Burning quartz tube |
JPH0189740U (en) * | 1987-12-04 | 1989-06-13 |
-
1976
- 1976-08-23 JP JP9969676A patent/JPS5325364A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58122739A (en) * | 1982-01-18 | 1983-07-21 | Hitachi Ltd | Oxidation diffusion furnace |
JPH0520900B2 (en) * | 1982-01-18 | 1993-03-22 | Hitachi Ltd | |
JPS6144833U (en) * | 1984-08-27 | 1986-03-25 | 新日本無線株式会社 | Burning quartz tube |
JPH0189740U (en) * | 1987-12-04 | 1989-06-13 |
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