JPS6144833U - Burning quartz tube - Google Patents

Burning quartz tube

Info

Publication number
JPS6144833U
JPS6144833U JP12971784U JP12971784U JPS6144833U JP S6144833 U JPS6144833 U JP S6144833U JP 12971784 U JP12971784 U JP 12971784U JP 12971784 U JP12971784 U JP 12971784U JP S6144833 U JPS6144833 U JP S6144833U
Authority
JP
Japan
Prior art keywords
quartz tube
burning
burning quartz
partition plate
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12971784U
Other languages
Japanese (ja)
Inventor
稔夫 簗木
Original Assignee
新日本無線株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新日本無線株式会社 filed Critical 新日本無線株式会社
Priority to JP12971784U priority Critical patent/JPS6144833U/en
Publication of JPS6144833U publication Critical patent/JPS6144833U/en
Pending legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１区ａは本考案の実施例を示す断面図１［ｆｆｌｂは
第１図ａの仕切板の正面図である。 第２図ａは従来のバーニング管の構造を示す断面図第２
図ｂは第２図ａの仕切板の正面図である。 １・・・バーニング石英管、１ａ・・・石英管の内壁、
２ａ，２ｂ・・・細管、３・・・燃焼室、・４・・・ホ
ート、５・・・ウエハ、６・・・仕切板、７，８・・・
貫通穴。Section 1 a is a cross-sectional view showing an embodiment of the present invention [fflb is a front view of the partition plate in FIG. 1 a. Figure 2a is a sectional view showing the structure of a conventional burning tube.
Figure b is a front view of the partition plate of Figure 2a. 1... Burning quartz tube, 1a... Inner wall of quartz tube,
2a, 2b... Thin tube, 3... Combustion chamber, 4... Hort, 5... Wafer, 6... Partition plate, 7, 8...
Through hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 燃焼室と、該燃焼室の燃焼による炎からウェハを隔離す
るための貫通穴を有する仕切板を備えたバーニング石英
管において、前記仕切板とバーニング石英管の内壁との
間に複数個の貫通穴を設けたことを特徴とするバーニン
グ石英管。A burning quartz tube comprising a combustion chamber and a partition plate having through holes for isolating the wafer from flames caused by combustion in the combustion chamber, wherein a plurality of through holes are provided between the partition plate and an inner wall of the burning quartz tube. A burning quartz tube characterized by being provided with.
JP12971784U 1984-08-27 1984-08-27 Burning quartz tube Pending JPS6144833U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12971784U JPS6144833U (en) 1984-08-27 1984-08-27 Burning quartz tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12971784U JPS6144833U (en) 1984-08-27 1984-08-27 Burning quartz tube

Publications (1)

Publication Number Publication Date
JPS6144833U true JPS6144833U (en) 1986-03-25

Family

ID=30688334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12971784U Pending JPS6144833U (en) 1984-08-27 1984-08-27 Burning quartz tube

Country Status (1)

Country Link
JP (1) JPS6144833U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325364A (en) * 1976-08-23 1978-03-09 Hitachi Ltd Hydrogen combustion type oxidation furnace

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325364A (en) * 1976-08-23 1978-03-09 Hitachi Ltd Hydrogen combustion type oxidation furnace

Similar Documents

Publication Publication Date Title
JPS6144833U (en) Burning quartz tube
JPS5954155U (en) Mold cooling pipe
JPS6139213U (en) combustion tube
JPS6016824U (en) All primary surface combustion burner
JPS5959628U (en) gas infrared burner
JPS6091927U (en) grill burner
JPS59133714U (en) automotive silencer
JPS59124821U (en) gas burner
JPS6118439U (en) Silent ventilation system
JPS58194325U (en) gas burner
JPS59108023U (en) burner nozzle
JPS58135U (en) gas burner
JPS59124820U (en) gas burner
JPS60114380U (en) valve
JPS5911201U (en) stove
JPS593115U (en) combustor
JPS5942414U (en) pot type burner
JPS59106559U (en) magnetic filter device
JPS584269U (en) sliding nozzle device
JPS5976828U (en) gas combustor
JPS60160326U (en) gasification burner
JPS58125139U (en) envelope with holes
JPS5932805U (en) pot type burner
JPS59144325U (en) gun type burner
JPS6134315U (en) oil burner