JPH0187528U - - Google Patents
Info
- Publication number
- JPH0187528U JPH0187528U JP18457587U JP18457587U JPH0187528U JP H0187528 U JPH0187528 U JP H0187528U JP 18457587 U JP18457587 U JP 18457587U JP 18457587 U JP18457587 U JP 18457587U JP H0187528 U JPH0187528 U JP H0187528U
- Authority
- JP
- Japan
- Prior art keywords
- mark
- semiconductor substrate
- inspecting
- utility
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案による一実施例の検査パターン
図、第２図は同実施例にシフト分を考慮した検査
パターン図、第３図及び第４図は同検査パターン
の使用状態図である。
ａ１，ａ２……パターン、ｂ１，ｂ２……間隔
、Ｃ１，Ｃ２……線パターン。
FIG. 1 is a diagram of a test pattern of an embodiment of the present invention, FIG. 2 is a diagram of a test pattern of the same embodiment with a shift taken into consideration, and FIGS. 3 and 4 are diagrams of how the same test pattern is used. a 1 , a 2 ... pattern, b 1 , b 2 ... interval, C 1 , C 2 ... line pattern.
Claims (1)
マークにおいて、 半導体基板に対向させる透明基板面に、対向す
る間隔が不連続なステツプ状に変化する平行な２
辺をもつマークを形成してなることを特徴とする
半導体ウエハーの検査マーク。[Claims for Utility Model Registration] In a mark for inspecting a pattern formed on a semiconductor substrate, two parallel marks are formed on the surface of a transparent substrate facing the semiconductor substrate, and the opposing distance changes in discontinuous steps.
A semiconductor wafer inspection mark characterized by forming a mark with sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18457587U JPH0187528U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18457587U JPH0187528U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187528U true JPH0187528U (en) | 1989-06-09 |
Family
ID=31475926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18457587U Pending JPH0187528U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187528U (en) |
-
1987
- 1987-12-02 JP JP18457587U patent/JPH0187528U/ja active Pending