JPH0187160U - - Google Patents

Info

Publication number
JPH0187160U
JPH0187160U JP18299887U JP18299887U JPH0187160U JP H0187160 U JPH0187160 U JP H0187160U JP 18299887 U JP18299887 U JP 18299887U JP 18299887 U JP18299887 U JP 18299887U JP H0187160 U JPH0187160 U JP H0187160U
Authority
JP
Japan
Prior art keywords
gas introduction
chemical vapor
vapor plating
introduction device
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18299887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18299887U priority Critical patent/JPH0187160U/ja
Publication of JPH0187160U publication Critical patent/JPH0187160U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP18299887U 1987-12-02 1987-12-02 Pending JPH0187160U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18299887U JPH0187160U (US06589383-20030708-C00041.png) 1987-12-02 1987-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18299887U JPH0187160U (US06589383-20030708-C00041.png) 1987-12-02 1987-12-02

Publications (1)

Publication Number Publication Date
JPH0187160U true JPH0187160U (US06589383-20030708-C00041.png) 1989-06-08

Family

ID=31474434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18299887U Pending JPH0187160U (US06589383-20030708-C00041.png) 1987-12-02 1987-12-02

Country Status (1)

Country Link
JP (1) JPH0187160U (US06589383-20030708-C00041.png)

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