JPH018711Y2 - - Google Patents

Info

Publication number
JPH018711Y2
JPH018711Y2 JP1984044606U JP4460684U JPH018711Y2 JP H018711 Y2 JPH018711 Y2 JP H018711Y2 JP 1984044606 U JP1984044606 U JP 1984044606U JP 4460684 U JP4460684 U JP 4460684U JP H018711 Y2 JPH018711 Y2 JP H018711Y2
Authority
JP
Japan
Prior art keywords
bearing
housing
damper
ring
thermal conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984044606U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6137497U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984044606U priority Critical patent/JPS6137497U/ja
Publication of JPS6137497U publication Critical patent/JPS6137497U/ja
Application granted granted Critical
Publication of JPH018711Y2 publication Critical patent/JPH018711Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/44Centrifugal pumps
    • F16C2360/45Turbo-molecular pumps

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Support Of The Bearing (AREA)
JP1984044606U 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ Granted JPS6137497U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984044606U JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984044606U JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Publications (2)

Publication Number Publication Date
JPS6137497U JPS6137497U (ja) 1986-03-08
JPH018711Y2 true JPH018711Y2 (OSRAM) 1989-03-08

Family

ID=30557332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984044606U Granted JPS6137497U (ja) 1984-03-26 1984-03-26 タ−ボ分子ポンプの軸受ダンパ

Country Status (1)

Country Link
JP (1) JPS6137497U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001243A1 (ja) * 2004-06-25 2006-01-05 Osaka Vacuum, Ltd. ターボ分子ポンプの軸受支持構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001243A1 (ja) * 2004-06-25 2006-01-05 Osaka Vacuum, Ltd. ターボ分子ポンプの軸受支持構造
CN100432446C (zh) * 2004-06-25 2008-11-12 株式会社大阪真空机器制作所 涡轮分子泵的轴承支承结构
JP4703565B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 ターボ分子ポンプの軸受支持構造

Also Published As

Publication number Publication date
JPS6137497U (ja) 1986-03-08

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