JPH018711Y2 - - Google Patents
Info
- Publication number
- JPH018711Y2 JPH018711Y2 JP1984044606U JP4460684U JPH018711Y2 JP H018711 Y2 JPH018711 Y2 JP H018711Y2 JP 1984044606 U JP1984044606 U JP 1984044606U JP 4460684 U JP4460684 U JP 4460684U JP H018711 Y2 JPH018711 Y2 JP H018711Y2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- housing
- damper
- ring
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920001971 elastomer Polymers 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 10
- 238000010422 painting Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000013021 overheating Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 229920002449 FKM Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Support Of The Bearing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984044606U JPS6137497U (ja) | 1984-03-26 | 1984-03-26 | タ−ボ分子ポンプの軸受ダンパ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984044606U JPS6137497U (ja) | 1984-03-26 | 1984-03-26 | タ−ボ分子ポンプの軸受ダンパ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6137497U JPS6137497U (ja) | 1986-03-08 |
| JPH018711Y2 true JPH018711Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-08 |
Family
ID=30557332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984044606U Granted JPS6137497U (ja) | 1984-03-26 | 1984-03-26 | タ−ボ分子ポンプの軸受ダンパ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6137497U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006001243A1 (ja) * | 2004-06-25 | 2006-01-05 | Osaka Vacuum, Ltd. | ターボ分子ポンプの軸受支持構造 |
-
1984
- 1984-03-26 JP JP1984044606U patent/JPS6137497U/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006001243A1 (ja) * | 2004-06-25 | 2006-01-05 | Osaka Vacuum, Ltd. | ターボ分子ポンプの軸受支持構造 |
| CN100432446C (zh) * | 2004-06-25 | 2008-11-12 | 株式会社大阪真空机器制作所 | 涡轮分子泵的轴承支承结构 |
| JP4703565B2 (ja) * | 2004-06-25 | 2011-06-15 | 株式会社大阪真空機器製作所 | ターボ分子ポンプの軸受支持構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6137497U (ja) | 1986-03-08 |
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