JPH0185606U - - Google Patents

Info

Publication number
JPH0185606U
JPH0185606U JP18210287U JP18210287U JPH0185606U JP H0185606 U JPH0185606 U JP H0185606U JP 18210287 U JP18210287 U JP 18210287U JP 18210287 U JP18210287 U JP 18210287U JP H0185606 U JPH0185606 U JP H0185606U
Authority
JP
Japan
Prior art keywords
plate
surface plate
support rod
flat
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18210287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18210287U priority Critical patent/JPH0185606U/ja
Publication of JPH0185606U publication Critical patent/JPH0185606U/ja
Pending legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
JP18210287U 1987-11-30 1987-11-30 Pending JPH0185606U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18210287U JPH0185606U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18210287U JPH0185606U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Publications (1)

Publication Number Publication Date
JPH0185606U true JPH0185606U (enrdf_load_stackoverflow) 1989-06-07

Family

ID=31473557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18210287U Pending JPH0185606U (enrdf_load_stackoverflow) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0185606U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (ja) * 2006-11-06 2008-05-22 Nec Electronics Corp 反り測定システム、成膜システム、及び反り測定方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105261A (en) * 1977-02-25 1978-09-13 Hitachi Ltd Shape measuring method of plate form objects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53105261A (en) * 1977-02-25 1978-09-13 Hitachi Ltd Shape measuring method of plate form objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008116354A (ja) * 2006-11-06 2008-05-22 Nec Electronics Corp 反り測定システム、成膜システム、及び反り測定方法

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