JPH0184438U - - Google Patents
Info
- Publication number
- JPH0184438U JPH0184438U JP1987179566U JP17956687U JPH0184438U JP H0184438 U JPH0184438 U JP H0184438U JP 1987179566 U JP1987179566 U JP 1987179566U JP 17956687 U JP17956687 U JP 17956687U JP H0184438 U JPH0184438 U JP H0184438U
- Authority
- JP
- Japan
- Prior art keywords
- rails
- tables
- axis direction
- piezoelectric motor
- sample moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本案の一実施例の概略構成図、第２図
は第１図の詳細図である。
１……ベース、２……Ｙテーブル、３……Ｘテ
ーブル、４……スライダ、５……圧電モータ、６
……ばね、７……電源、８……ガイドレール。
FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIG. 2 is a detailed diagram of FIG. 1. 1...Base, 2...Y table, 3...X table, 4...Slider, 5...Piezoelectric motor, 6
...Spring, 7...Power source, 8...Guide rail.
Claims (1)
に移動可能なＹテーブルと、ＸＹテーブルを支え
るベースと、Ｘ，Ｙテーブルそれぞれを直線的に
案内するレールと、Ｘ，Ｙテーブルそれぞれを駆
動する駆動源より成る試料移動台において、前記
Ｘ，Ｙ各レールを前記Ｘ，Ｙ各テーブルとはさみ
込む形で、圧電モータを設置したことを特徴とす
る試料移動台。 ２ 圧電モータは、適当な余圧を印加され、前記
Ｘ，Ｙ各レールに押し付けられ、前記Ｘ，Ｙ各レ
ールで移動を案内されることを特徴とする実用新
案登録請求の範囲第１項記載の試料移動台。[Claims for Utility Model Registration] 1. A table movable in the X-axis direction, a Y-table movable in the Y-axis direction, a base that supports the XY table, and a rail that linearly guides each of the X and Y tables. , a sample moving table comprising a drive source for driving each of the X and Y tables, characterized in that a piezoelectric motor is installed in such a way that the X and Y rails are sandwiched between the X and Y tables. . 2. The piezoelectric motor is applied with an appropriate extra pressure, is pressed against the X and Y rails, and is guided in movement by the X and Y rails. sample moving table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179566U JPH0184438U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179566U JPH0184438U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184438U true JPH0184438U (en) | 1989-06-05 |
Family
ID=31471113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179566U Pending JPH0184438U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184438U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028652A1 (en) * | 1998-11-05 | 2000-05-18 | Japan Science And Technology Corporation | Ultrasonic motor |
| JP2002329771A (en) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | Stage equipment |
-
1987
- 1987-11-27 JP JP1987179566U patent/JPH0184438U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028652A1 (en) * | 1998-11-05 | 2000-05-18 | Japan Science And Technology Corporation | Ultrasonic motor |
| JP2002329771A (en) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | Stage equipment |
| JP4632569B2 (en) * | 2001-04-26 | 2011-02-16 | 京セラ株式会社 | Stage equipment |
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